Methods for fabricating magnetic writer structures using post-deposition tilting

Patent metadata

Field	Value
Publication number	US-9847099-B2
Application number	US-201213662300-A
Country	US
Kind code	B2
Filing date	Oct 26, 2012
Priority date	Aug 25, 2009
Publication date	Dec 19, 2017
Grant date	Dec 19, 2017

Abstract

A method according to one embodiment includes forming a first portion of a thin film writer structure on a substantially planar portion of a substrate such that planes of deposition of the first portion of the writer structure are substantially parallel to a plane of the substrate; forming a portion of a write gap of the writer structure at an angle of greater than 0° relative to the substantially planar portion of the substrate; and causing the writer structure to tilt at an angle relative to the plane of the substrate such that a plane of deposition of the write gap is oriented about perpendicular to a final media-facing surface of the writer structure.

First claim

What is claimed is:

1. A method, comprising:
forming a first portion of a thin film writer structure on a substantially planar portion of a substrate such that an upper surface of the first portion of the writer structure is substantially parallel to a plane of the substrate;
forming a portion of a write gap located directly adjacent a final media-facing surface of the writer structure at an angle of greater than 0° and less than 90° relative to the upper surface of the first portion;
orienting the writer structure to cause a plane of deposition of the portion of the write gap to be oriented substantially perpendicular to the plane corresponding to the final media-facing surface of the writer structure; and
fixing the writer structure in place to fix the plane of deposition of the portion of the write gap at the orientation substantially perpendicular to the plane corresponding to the final media-facing surface of the writer structure; and
planarizing the writer structure along the plane corresponding to a final media-facing surface of the writer structure.

2. A method as recited in claim 1 , comprising defining the media-facing surface having the writer structure in a configuration for interacting with a magnetic tape.

3. A method as recited in claim 1 , wherein the writer structure is formed on a rigid platform that tilts with the writer structure during the orienting.

4. A method as recited in claim 1 , wherein an axis of tilting during the orienting is about parallel to the plane of the substrate.

5. A method as recited in claim 1 , further comprising forming a magnetic sensor adjacent the writer structure, wherein the sensor and the writer structure tilt together during the orienting.

6. A method, comprising:
forming a first portion of a thin film writer structure on a substantially planar portion of a substrate such that an upper surface of the first portion of the writer structure is substantially parallel to a plane of the substrate;
forming a portion of a write gap of the writer structure at an angle of greater than 0° relative to the substantially planar portion of the substrate;
causing the writer structure to tilt at an angle relative to the plane of the substrate such that a plane of deposition of the write gap is oriented about perpendicular to a final media-facing surface of the writer structure; and
fixing the oriented writer structure in place on the substrate at the angle relative to the plane of the substrate after the orienting,
wherein causing the writer structure to tilt includes removing a sacrificial portion of the substrate for creating a pivot point about which the writer structure pivots,
wherein the pivot point is spaced apart from the writer structure such that the writer structure pivots along an arc.

7. A method as recited in claim 6 , wherein the pivot point is under and off-center from the writer structure.

8. A method as recited in claim 6 , wherein removing the sacrificial portion of the substrate causes another portion of the substrate to form a cantilever supporting the writer structure, wherein a local stress operatively causes the cantilever to bend, thereby causing the writer structure to tilt at the angle relative to the plane of the substrate.

9. A method as recited in claim 6 , wherein removing the portion of the substrate allows built-in stresses to cause the writer structure to tilt at the angle relative to the plane of the substrate.

10. A method as recited in claim 1 , wherein portions of two poles are formed at an angle of greater than 0° relative to the plane of the substrate.

11. A method, comprising:
forming a first portion of a thin film writer structure on a substantially planar portion of a substrate such that an upper surface of the first portion of the writer structure is substantially parallel to a plane of the substrate;
forming a sloped portion towards one side of the first portion of the writer structure, an upper surface of the sloped portion having an angle of greater than 0° relative to the substantially planar portion of the substrate;
forming a portion of a first pole of the writer structure on the sloped portion whereby upper and lower surfaces of the first pole are parallel to the upper surface of the sloped portion;
forming a write gap on the portion of the first pole;
forming a portion of a second pole of the writer structure on the write gap;
causing the writer structure to tilt at an angle relative to the plane of the substrate such that a plane of deposition of the write gap is substantially perpendicular to a final media-facing surface of the writer structure and tilted at the angle from the plane of the substrate; and
after causing the writer structure to tilt, fixing the writer structure in place on the substrate at the angle using a material that fixes the writer structure to the substrate.

12. A method as recited in claim 11 , further comprising planarizing the writer structure along a plane substantially parallel to the plane of the substrate.

13. A method as recited in claim 11 , further comprising forming a magnetic sensor, wherein the sensor and the writer structure tilt together.

14. A method as recited in claim 11 , wherein causing the writer structure to tilt includes removing a sacrificial portion of the substrate for creating a pivot point about which the writer structure pivots.

15. A method as recited in claim 5 , wherein plane of deposition of the magnetic sensor is at an angle of greater than 0° from the plane of deposition of the portion of the write gap.

16. A method as recited in claim 1 , comprising defining the media-facing surface through the planarizing removing part of the writer structure.

17. A method as recited in claim 1 , wherein orienting the writer structure includes removing a sacrificial portion of the substrate for creating a pivot point about which the writer structure pivots.

18. A method as recited in claim 1 , wherein the portion of a write gap of the writer structure is formed at an angle of between 15° and 65° relative to the substantially planar portion of the substrate.

19. A method as recited in claim 6 , wherein the portion of a write gap of the writer structure at an angle is between 15° and 65° relative to the substantially planar portion of the substrate.

20. A method as recited in claim 11 , wherein the upper surface of the sloped portion having an angle between 15° and 65° relative to the substantially planar portion of the substrate.

Assignees

• IBM

Inventors

• Herget Philipp
• Jubert Pierre-Olivier

Classifications

• G11B5/3906

  Details related to the use of magnetic thin film layers or to their effects · CPC title

• G11B5/00821 Primary

  using stationary heads · CPC title

• G11B5/3163

  Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers · CPC title