Methods for fabricating magnetic transducers using post-deposition tilting

Patent metadata

Field	Value
Publication number	US-9230564-B2
Application number	US-201213532716-A
Country	US
Kind code	B2
Filing date	Jun 25, 2012
Priority date	Aug 25, 2009
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

In one general embodiment, a method is provided for fabricating magnetic structures using post-deposition tilting. A thin film magnetic transducer structure is formed on a substantially planar portion of a substrate such that a plane of deposition of the thin film transducer structure is substantially parallel to a plane of the substrate. Additionally, the thin film transducer structure is caused to tilt at an angle relative to the plane of the substrate. The thin film transducer is fixed at the angle after being tilted.

First claim

What is claimed is:

1. A method, comprising:
forming a thin film magnetic transducer structure on a substantially planar portion of a substrate such that a plane of deposition of the thin film magnetic transducer structure is substantially parallel to a plane of the substrate; and
causing the thin film transducer structure to tilt at an angle relative to the plane of the substrate, wherein the thin film magnetic transducer structure is fixed at the angle after being tilted, wherein the angle is in a range from greater than 0 degrees to less than or equal to 90 degrees; and
removing a sacrificial portion of the substrate for causing the thin film magnetic transducer structure to pivot.

2. The method as recited in claim 1 ,
wherein the thin film magnetic transducer structure is tilted such that the plane of deposition thereof is oriented at an angle of greater than about 1 degree from the plane of the substrate.

3. The method as recited in claim 1 , wherein the substrate comprises silicon.

4. The method as recited in claim 1 , further comprising planarizing the thin film magnetic transducer structure along a plane substantially parallel to the plane of the substrate.

5. The method as recited in claim 1 , wherein the thin film magnetic transducer structure is formed on a rigid platform that tilts with the thin film magnetic transducer structure.

6. The method as recited in claim 1 , wherein an axis of the tilting is about parallel to the plane of the substrate.

7. The method as recited in claim 1 , wherein the thin film magnetic transducer structure is a magnetic sensor.

8. The method as recited in claim 1 , wherein the thin film magnetic transducer structure is a magnetic writer.

9. The method as recited in claim 1 , wherein a point of pivoting of the thin film magnetic transducer structure is under and off-center from the thin film magnetic transducer structure.

10. The method as recited in claim 1 , wherein removing the sacrificial portion of the substrate causes another portion of the substrate to form a cantilever supporting the thin film magnetic transducer structure, wherein a local stress operatively causes the cantilever to bend, thereby causing the thin film magnetic transducer structure to tilt at the angle.

11. The method as recited in claim 1 , wherein removing the portion of the substrate allows built-in stresses to cause the thin film magnetic transducer structure to tilt at the angle.

12. A method, comprising:
forming a magnetic transducer structure on a substantially planar potion of a substrate such that a plane of deposition of the magnetic transducer structure is substantially parallel to a plane of the substrate;
causing the magnetic transducer structure to tilt at an angle relative to the plane of the substrate; and
applying an external force for causing the magnetic transducer structure to tilt at the angle,
wherein the thin film magnetic transducer structure is a magnetic writer.

13. The method as recited in claim 12 , wherein the external force is a magnetic field.

14. The method as recited in claim 12 , wherein an axis of the tilting is about parallel to the plane of the substrate and about perpendicular to an expected direction of media travel relative to the magnetic transducer structure.

15. The method as recited in claim 12 , further comprising testing the magnetic transducer structure before causing the magnetic transducer structure to tilt.

16. The method as recited in claim 12 , further comprising, after causing the magnetic transducer structure to tilt, fixing the magnetic transducer structure in place at the angle.

17. A method, comprising:
forming a magnetic transducer on a substantially planar potion of a substrate such that a plane of deposition of the magnetic transducer is substantially parallel to a plane of the substrate;
causing the magnetic transducer to tilt at an angle relative to the plane of the substrate, wherein capillary action operatively causes the thin film magnetic transducer structure to tilt at the angle; and
after causing the magnetic transducer to tilt at the angle, depositing a filling material on at least a portion of the magnet transducer and at least a portion of the substrate, the filling material being configured to fix the magnetic transducer in place on the substrate at the angle.

Assignees

• Biskeborn Robert Glenn
• Dellmann Laurent
• Despont Michel
• Herget Philipp
• Jubert Pierre-Olivier
• Globalfoundries Inc

Inventors

• Biskeborn Robert Glenn
• Dellmann Laurent
• Despont Michel
• Herget Philipp
• Jubert Pierre-Olivier

Classifications

• Y10T29/49032

  Fabricating head structure or component thereof · CPC title

• Y10T29/49046

  with etching or machining of magnetic material · CPC title

• G11B5/3163

  Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers · CPC title

• G11B5/3906

  Details related to the use of magnetic thin film layers or to their effects · CPC title

• Y10T29/49021

  Magnetic recording reproducing transducer [e.g., tape head, core, etc.] · CPC title