Manufacturing method for piezoelectric ceramics

Patent metadata

Field	Value
Publication number	US-9842985-B2
Application number	US-201514961382-A
Country	US
Kind code	B2
Filing date	Dec 7, 2015
Priority date	Dec 22, 2010
Publication date	Dec 12, 2017
Grant date	Dec 12, 2017

Abstract

Provided are a barium titanate-based piezoelectric ceramics having satisfactory piezoelectric performance and a satisfactory mechanical quality factor (Q m ), and a piezoelectric element using the same. Specifically provided are a piezoelectric ceramics, including: crystal particles; and a grain boundary between the crystal particles, in which the crystal particles each include barium titanate having a perovskite-type structure and manganese at 0.04% by mass or more and 0.20% by mass or less in terms of a metal with respect to the barium titanate, and the grain boundary includes at least one compound selected from the group consisting of Ba 4 Ti 12 O 27 and Ba 6 Ti 17 O 40 , and a piezoelectric element using the same.

First claim

The invention claimed is:

1. A manufacturing method for a piezoelectric ceramics, comprising at least:
producing granulating powder by adding a binder to barium titanate particles each comprising manganese at 0.04% by mass or more and 0.20% by mass or less in terms of a metal; and
sintering a mixture prepared by adding at least one compound selected from the group consisting of Ba 4 Ti 12 O 27 particles and Ba 6 Ti 17 O 40 particles to the granulating powder.

2. A manufacturing method for a piezoelectric ceramics, comprising at least:
producing granulating powder by adding a binder to barium titanate particles each comprising manganese at 0.04% by mass or more and 0.20% by mass or less in terms of a metal; and
sintering a mixture prepared by adding titanium oxide particles each having an average particle diameter of 100 nm or less to the granulating powder.

Assignees

• Canon Kk

Inventors

• Suzuki Tatsuya
• Tsukamoto Masami
• Shimada Mikio
• Ifuku Toshihiro
• Matsuda Takanori
• Kubota Makoto
• Hayashi Jumpei

Classifications

• H01L41/1871

  Electricity · mapped topic

• C04B2235/3287

  Germanium oxides, germanates or oxide forming salts thereof, e.g. copper germanate · CPC title

• C04B2235/5454

  nanometer sized, i.e. below 100 nm · CPC title

• C04B2235/3267

  MnO2 · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title