Storage container

Patent metadata

Field	Value
Publication number	US-9841671-B2
Application number	US-201414901956-A
Country	US
Kind code	B2
Filing date	Jun 5, 2014
Priority date	Jul 3, 2013
Publication date	Dec 12, 2017
Grant date	Dec 12, 2017

Abstract

A storage container in which a uniform flow velocity of the purge gas can be achieved is provided with a plurality of stages of storage units each having an accommodating region to accommodate an article. A supply portion supplies a purge gas; a duct portion communicates with other duct portions of other storage units and serves as a flow path for the purge gas supplied from the supply portion; and an introducing portion communicably connects the duct portion with the accommodating region and introduces the purge gas to the accommodating region. In the flow path for the purge gas in the duct portion, a diffusion member is arranged.

First claim

The invention claimed is:

1. A storage container comprising a plurality of stages of storage units each having an accommodating region to accommodate an article, the storage container comprising:
a supply portion configured to supply a purge gas;
a duct portion configured to communicate with other duct portions of other storage units throughout the plurality of stages of storage units and serve as a flow path for the purge gas supplied from the supply portion when the plurality of storage units are stacked; and
an introducing portion configured to communicably connect the duct portion with the accommodating region and introduce the purge gas to the accommodating region, wherein
in the flow path for the purge gas in the duct portion, a diffusion member is arranged such that a uniform flow velocity of the purge gas can be achieved,
the duct portion is formed by each of the plurality of stages of storage units in a stacked state so that the duct portion passes through all of the plurality of stages of storage units, and
the diffusion member protrudes from an inner wall of the duct portion.

2. The storage container according to claim 1 , wherein the diffusion member is a plate-like member protruding from an inner wall of the duct portion.

3. The storage container according to claim 1 , wherein the diffusion member is arranged on an extended line in an inflow direction of the purge gas supplied from the supply portion.

4. The storage container according to claim 1 , wherein the diffusion member is provided in at least one of the storage units arranged near the supply portion.

5. The storage container according to claim 2 , wherein the diffusion member has an area that is changed depending on a distance from the supply portion.

Assignees

• Murata Machinery Ltd

Inventors

• Gambe Masahiko

Classifications

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1906

  specially adapted for containing masks, reticles or pellicles · CPC title

• H10P72/18

  characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports · CPC title

• G03F1/66 Primary

  Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof · CPC title

• H01L21/67393

  Electricity · mapped topic