Optical measuring probe and method for optically measuring inner diameters

Patent metadata

Field	Value
Publication number	US-9841273-B2
Application number	US-201314415984-A
Country	US
Kind code	B2
Filing date	Jul 16, 2013
Priority date	Jul 20, 2012
Publication date	Dec 12, 2017
Grant date	Dec 12, 2017

Abstract

An optical measuring probe for measuring inner and/or outer diameters of objects, uses a first optical element for focusing or collimating an optical beam onto a surface of an object. A second optical element for splitting the optical beam into a first measuring beam and a second measuring beam is provided in the optical measuring probe in such a way that the second measuring beam is guided out of the measuring probe in a direction opposite the direction of the first measuring beam and that the first measuring beam forms a first scan point and the second measuring beam forms a second scan point. Also described is a corresponding method for measuring diameters using the optical measuring probe. The optical measuring probe and the associated method make it possible to optically measure inner and outer diameters of measuring probes objects in a simple manner.

First claim

What is claimed is:

1. An optical measuring probe for measuring inner diameters of objects, comprising:
an optical measuring probe arrangement, including:
a first optical element for focusing or collimating an optical beam onto a surface of an object; and
a second optical element for splitting the optical beam exclusively into a first measuring beam and a second measuring beam is situated and provided in the optical measuring probe arrangement so that the first measuring beam and the second measuring beam are guided out of the measuring probe in opposite directions on a common straight line and the first measuring beam forms a first scan point and the second measuring beam forms a second scan point;
wherein the measuring probe is positionable for determining the inner diameter in such a way that in a first measuring position the first scan point of the first measuring beam lies on a first measuring point of an object surface forming the inner diameter,
wherein, following a lateral movement of the measuring probe along a propagation direction of the two measuring beams, in a second measuring position, the second scan point of the second measuring beam lies on a second measuring point of the object surface forming the inner diameter,
wherein a distance between the first scan point and second scan point is known;
wherein a distance between the first measuring position and the second measuring position is determined, and
wherein the inner diameter is determined based on the known distance between the first scan point and second scan point and the determined distance between the first measuring position and the second measuring position.

2. The optical measuring probe of claim 1 , wherein the second optical element is configured as a prism pair.

3. The optical measuring probe of claim 1 , wherein the optical measuring probe is coupled to an evaluation unit via an optical fiber.

4. The optical measuring probe of claim 1 , wherein the second optical element is configured as a polarizing optical element and the first measuring beam and the second measuring beam are polarized differently.

5. The optical measuring probe of claim 1 , wherein the optical measuring probe determines the inner diameter of an object based on a calibration distance between the first scan point of the first measuring beam and the second scan point of the second measuring beam stored in an evaluation unit, and wherein a distance between the first measuring position and the second measuring position is determined from the evaluation unit.

6. A method for optically measuring inner diameters of objects using an interferometrically operating measuring system, the method comprising:
focusing an optical beam from an optical measuring probe onto a surface of the object, wherein the optical beam in the optical measuring probe is split exclusively into a first measuring beam having a first scan point and into a second measuring beam having a second scan point, the first measuring beam and the second measuring beam being guided out of the measuring probe in opposite directions on a common straight line;
positioning the optical measuring probe on a first measuring position so that the first scan point lies on a first surface of the object forming the inner diameter;
positioning the optical measuring probe on a second measuring position so that the second scan point lies on a second surface of the object forming the inner diameter;
moving the optical measuring probe along a propagation direction of the two measuring beams; and
determining a distance between the first surface and the second surface from a distance between the first measuring position and the second measuring position and a calibration distance between the first scan point and the second scan point.

7. The method of claim 6 , wherein the first measuring beam and the second measuring beam are guided onto the surfaces perpendicularly to a mechanical axis of the scanning arm having the optical measuring probe.

8. The method of claim 6 , wherein the calibration distance between the first scan point and the second scan point is determined in a calibration task on a calibration object having a known shape, and the calibration distance is stored in an evaluation unit.

9. The method of claim 7 , wherein the calibration distance between the first scan point and the second scan point is determined in a calibration task on a calibration object having a known shape, and the calibration distance is stored in an evaluation unit.

10. The optical measuring probe of claim 1 , wherein the first measuring beam and the second measuring beam are guided on a shared straight line in opposite directions, and wherein the second optical element is configured as a prism pair or the second optical element includes a beam splitter.

11. The optical measuring probe of claim 10 , wherein the first measuring beam and the second measuring beam are polarized differently.

12. The optical measuring probe of claim 10 , wherein the optical measuring probe determines the inner diameter of an object based on a calibration distance between the first scan point of the first measuring beam and the second scan point of the second measuring beam, and wherein a distance between the first measuring position and the second measuring position is determined.

13. An interferometrically operating measuring system for measuring inner diameters of objects, comprising:
an optical measuring probe, the measuring probe including:
a first optical element for focusing or collimating an optical beam onto a surface of an object; and
a second optical element for splitting the optical beam exclusively into a first measuring beam and a second measuring beam is situated and provided in the optical measuring probe arrangement so that the first measuring beam and the second measuring beam are guided out of the measuring probe in opposite directions on a common straight line and the first measuring beam forms a first scan point and the second measuring beam forms a second scan point;
wherein the measuring probe is positionable for determining of the inner diameter in such a way that in a first measuring position the first scan point of the first measuring beam lies on a first measuring point of an object surface forming the inner diameter, and
wherein, following a lateral movement of the measuring probe along a propagation direction of the two measuring beams, in a second measuring position, the second scan point of the second measuring beam lies on a second measuring point of the object surface forming the inner diameter; and

a measuring machine having a scanning arm, the optical measuring probe being part of the scanning arm;
wherein the two measuring beams of the optical measuring probe are guided out of the optical measuring probe perpendicularly to a mechanical axis of the scanning arm, and
wherein the scanning arm is positionable in a first position and a second position by a lateral movement along the propagation direction of the two measuring beams.

14. The system of claim 13 , wherein a distance between the first scan point and second scan point is known, wherein a distance between the first measuring position and the second measuring position is determined, and wherein the inner diameter is determined based on the known distance between the first scan point and second scan point and the determined distance between the first measuring position and the second measuring position.

15. The system of claim 13 , wherein the optical measuring probe is coupled to an evaluation unit via an optical fiber.

16. The system of claim 15 ,

Assignees

• Bosch Gmbh Robert

Inventors

• Riegger Peter
• Franz Gerald
• Drabarek Pawel

Classifications

• G01B9/0207

  Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer · CPC title

• G01B11/08 Primary

  for measuring diameters · CPC title

• G01B11/12

  internal diameters · CPC title

• G01B9/0209

  Low-coherence interferometers · CPC title

• G01B11/2441

  using interferometry · CPC title