Methods for depositing films with organoaminodisilane precursors
US-2016203975-A1 · Jul 14, 2016 · US
US9840523B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9840523-B2 |
| Application number | US-201515300987-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 29, 2015 |
| Priority date | May 30, 2014 |
| Publication date | Dec 12, 2017 |
| Grant date | Dec 12, 2017 |
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Chemical processes comprise selectively synthesizing diisopropylamino-disilanes and reduction of chloride in aminosilanes, and the compositions comprise the diisopropylamino-disilanes and at least one reaction by-product prepared thereby. The diisopropylamino-disilanes are diisopropylamino-pentachlorodisilane and diisopropylamino-disilane.
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What is claimed is: 1. A process of synthesizing diisopropylamino-disilane, which is of formula (I): [(CH 3 ) 2 CH] 2 NSiH 2 SiH 3 (I), the process comprising: contacting in a solvent, a metal aluminum hydride with diisopropylamino-pentachlorodisilane, to give diisopropylamino-disilane, wherein the metal of the metal aluminum hydride is an element of Group I or Group II of the Periodic Table of the Elements; and separating the diisopropylamino-disilane from the solvent and an optional second solvent to give a purified form of the diisopropylamino-disilane, wherein the solvent or the optional second solvent has a boiling point of at least 90° C. and at least 10° C. higher than the boiling point of diisopropylamino-disilane, and wherein the optional second solvent is combined with the solvent before, after, or during the contacting and prior to the separating. 2. The process of claim 1 comprising one of the following limitations e) or f): e) wherein the solvent or the optional second solvent is an alkylene glycol dialkyl ether and the alkylene glycol dialkyl ether is a tetraethylene glycol di(C 1 -C 4 )alkyl ether, propylene glycol di(C 4 -C 8 )alkyl ether, ethylene glycol di(C 4 or C 8 )alkyl ether, or a combination of any two or more thereof f) wherein the solvent is characterizable by a boiling point that is at least 10° C. less than the boiling point of the diisopropylamino-disilane; the second solvent is present and is characterizable by a boiling point that is at least 10° C. higher than the boiling point of the diisopropylamino-disilane; the solvent is first separated from the diisopropylamino-disilane and the second solvent and then the diisopropylamino-disilane is separated from the second solvent to give a purified form of the diisopropylamino-disilane in at least 30% yield and purity of at least 70 area % (GC). 3. A process of synthesizing diisopropylamino-disilane, which is of formula (I): [(CH 3 ) 2 CH] 2 NSiH 2 SiH 3 (I), the process comprising parts A and B: Part A: contacting, in a hydrocarbon vehicle, hexachlorodisilane (SiCl 3 SiCl 3 ) with, relative to the hexachlorodisilane, from 0.50 to 1.19 molar equivalents of a metal diisopropylamide, [(i-Pr) 2 N] m M A , wherein subscript m is 1 or 2, wherein when m is 1, M A is an element of Group I of the Periodic Table of the Elements and when m is 2, M A is an element of Group II of the Periodic Table of the Elements, or with from 1.0 to 2.39 molar equivalents of diisopropylamine, or with a mixture of from 0.50 to 1.19 molar equivalents of diisopropylamine ((i-Pr) 2 NH) and from 0.50 to 1.19 molar equivalents of triethylamine (Et 3 N), to give a higher yield of diisopropylamino-pentachlorodisilane compared to the yield, if any, of a compound of formula (B): [(CH 3 ) 2 CH] 2 NSiCl 2 SiCl 2 N[CH(CH 3 ) 2 ] 2 (B), wherein i-Pr is isopropyl and Et is ethyl; and Part B: Contacting, in an alkylene glycol dialkyl ether characterizable by a boiling point, lithium aluminum hydride (LiAlH 4 ) with the diisopropylamino-pentachlorodisilane from Part A to give diisopropylamino-disilane characterizable by a boiling point, wherein the boiling point of the alkylene glycol dialkyl ether is at least 30 degrees Celsius higher than the boiling point of diisopropylamino-disilane; and Separating the diisopropylamino-disilane from the alkylene glycol dialkyl ether to give a purified form of the diisopropylamino-disilane in at least 30% yield for Part B and a purity greater than or equal to 70 area % (GC). 4. The process of claim 1 further comprising combining i) a metal hydride or ii) a metal amide salt with the diisopropylaminodisilane either before or after the separating. 5. The process of claim 4 , wherein the metal hydride is lithium tris-(tert-butoxy)-aluminum hydride, lithium triethylborohydride, or sodium triethylborohydride and the metal amide is lithium diisopropylamide. 6. A process of synthesizing diisopropylamino-disilane according to claim 1 , wherein the contacting is under vacuum and at a temperature to vaporize the diisopropylamino-disilane after it is formed; and separating the diisopropylamino-disilane after it is formed from unreacted diisopropylamino-pentachlorodisilane and the metal aluminum hydride by distillation, wherein the distillation is conducted concurrently with the formation of the diisopropylamino-disilane. 7. The process of claim 6 , wherein the contacting is at a temperature of at least 90° C.
by reactions involving the formation of Si-Y linkages, where Y is not a carbon or halogen atom · CPC title
containing nitrogen {having a Si-N linkage} · CPC title
comprising at least one atom selected from the elements N, O, halogen, S, Se or Te · CPC title
Organo silicon halides · CPC title
Purification, separation · CPC title
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