Semiconductor device having an oxide semiconductor layer

Patent metadata

Field	Value
Publication number	US-9837544-B2
Application number	US-201614988628-A
Country	US
Kind code	B2
Filing date	Jan 5, 2016
Priority date	Jul 2, 2010
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

A semiconductor device having favorable electric characteristics and a manufacturing method thereof are provided. A transistor includes an oxide semiconductor layer formed over an insulating layer, a source electrode layer and a drain electrode layer which overlap with part of the oxide semiconductor layer, a gate insulating layer in contact with part of the oxide semiconductor layer, and a gate electrode layer over the gate insulating layer. In the transistor, a buffer layer having n-type conductivity is formed between the source electrode layer and the oxide semiconductor layer and between the drain electrode layer and the oxide semiconductor layer. Thus, parasitic resistance is reduced, resulting in improvement of on-state characteristics of the transistor.

First claim

What is claimed is:

1. A semiconductor device comprising:
an oxide semiconductor layer over an insulating layer;
a first metal oxide layer on and in contact with the oxide semiconductor layer;
a second metal oxide layer on and in contact with the oxide semiconductor layer;
a first metal nitride layer on the first metal oxide layer, wherein the first metal oxide layer extends beyond an inner side edge of the first metal nitride layer;
a second metal nitride layer on the second metal oxide layer, wherein the second metal oxide layer extends beyond an inner side edge of the second metal nitride layer;
a gate insulating layer over the first metal nitride layer, the second metal nitride layer and the oxide semiconductor layer; and
a gate electrode layer over the gate insulating layer, the gate electrode layer overlapping with the oxide semiconductor layer,
wherein inner side edges of the first metal oxide layer and the second metal oxide layer are tapered.

2. The semiconductor device according to claim 1 , wherein each of the first metal nitride layer and the second metal nitride layer comprises titanium nitride, molybdenum nitride or tungsten nitride.

3. The semiconductor device according to claim 1 , wherein each of the first metal oxide layer and the second metal oxide layer comprises a material selected from the group consisting of indium oxide, indium tin oxide and indium zinc oxide.

4. The semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises at least one element selected from In, Ga, Sn, Zn, Al, Mg, Hf, and lanthanoid.

5. The semiconductor device according to claim 1 , wherein the gate insulating layer contains oxygen.

6. The semiconductor device according to claim 1 , wherein a taper angle of the inner side edges of the first metal oxide layer and the second metal oxide layer is smaller than a taper angle of the inner side edges of the first metal nitride layer and the second metal nitride layer.

7. The semiconductor device according to claim 1 , wherein the first metal oxide layer and the second metal oxide layer comprise a material selected from titanium oxide, titanium niobium oxide, molybdenum oxide, tungsten oxide, magnesium oxide, calcium oxide, and gallium oxide.

8. The semiconductor device according to claim 1 , wherein the gate electrode layer overlaps with the first metal nitride layer and the second metal nitride layer.

9. A semiconductor device comprising:
an oxide semiconductor layer over an insulating layer;
a first metal oxide layer on and in contact with the oxide semiconductor layer;
a second metal oxide layer on and in contact with the oxide semiconductor layer;
a first metal nitride layer on the first metal oxide layer, wherein the first metal oxide layer extends beyond an inner side edge of the first metal nitride layer;
a second metal nitride layer on the second metal oxide layer, wherein the second metal oxide layer extends beyond an inner side edge of the second metal nitride layer;
a gate insulating layer over the first metal nitride layer, the second metal nitride layer and the oxide semiconductor layer; and
a gate electrode layer over the gate insulating layer, the gate electrode layer overlapping with the oxide semiconductor layer,
wherein inner side edges of the first metal oxide layer and the second metal oxide layer are tapered, and
wherein a surface portion of the oxide semiconductor layer between the first metal oxide layer and the second metal oxide layer is etched.

10. The semiconductor device according to claim 9 , wherein each of the first metal nitride layer and the second metal nitride layer comprises titanium nitride, molybdenum nitride or tungsten nitride.

11. The semiconductor device according to claim 9 , wherein each of the first metal oxide layer and the second metal oxide layer comprises a material selected from the group consisting of indium oxide, indium tin oxide and indium zinc oxide.

12. The semiconductor device according to claim 9 , wherein the oxide semiconductor layer comprises at least one element selected from In, Ga, Sn, Zn, Al, Mg, Hf, and lanthanoid.

13. The semiconductor device according to claim 9 , wherein the gate insulating layer contains oxygen.

14. The semiconductor device according to claim 9 , wherein a taper angle of the inner side edges of the first metal oxide layer and the second metal oxide layer is smaller than a taper angle of the inner side edges of the first metal nitride layer and the second metal nitride layer.

15. The semiconductor device according to claim 9 , wherein the first metal oxide layer and the second metal oxide layer comprise a material selected from titanium oxide, titanium niobium oxide, molybdenum oxide, tungsten oxide, magnesium oxide, calcium oxide, and gallium oxide.

16. The semiconductor device according to claim 9 , wherein the gate electrode layer overlaps with the first metal nitride layer and the second metal nitride layer.

17. A semiconductor device comprising:
an oxide semiconductor layer over an insulating layer;
a first metal oxide layer on and in contact with the oxide semiconductor layer;
a second metal oxide layer on and in contact with the oxide semiconductor layer;
a first metal layer on the first metal oxide layer, wherein the first metal oxide layer extends beyond an inner side edge of the first metal layer;
a second metal layer on the second metal oxide layer, wherein the second metal oxide layer extends beyond an inner side edge of the second metal layer;
a gate insulating layer over the first metal layer, the second metal layer and the oxide semiconductor layer; and
a gate electrode layer over the gate insulating layer, the gate electrode layer overlapping with the oxide semiconductor layer,
wherein a taper angle of inner side edges of the first metal oxide layer and the second metal oxide layer is smaller than a taper angle of the inner side edges of the first metal layer and the second metal layer.

18. The semiconductor device according to claim 17 , wherein each of the first metal layer and the second metal layer comprises copper.

19. The semiconductor device according to claim 17 , wherein each of the first metal oxide layer and the second metal oxide layer comprises a material selected from the group consisting of indium oxide, indium tin oxide and indium zinc oxide.

20. The semiconductor device according to claim 17 , wherein the oxide semiconductor layer comprises at least one element selected from In, Ga, Sn, Zn, Al, Mg, Hf, and lanthanoid.

21. The semiconductor device according to claim 17 , wherein the gate insulating layer contains oxygen.

22. The semiconductor device according to claim 17 , wherein the first metal oxide layer and the second metal oxide layer comprise a material selected from titanium oxide, titanium niobium oxide, molybdenum oxide, tungsten oxide, magnesium oxide, calcium oxide, and gallium oxide.

23. The semiconductor device according to claim 17 , wherein the gate electrode layer overlaps with the first metal layer and the second metal layer.

24. A semiconductor device comprising:
an oxide semiconductor layer over an insulating layer;
a first metal oxide layer on and in contact with the oxide semiconductor layer;
a second metal oxide layer on and in contact with the oxide semiconductor layer;
a first metal layer on the first metal oxide layer, wherein the first metal oxide layer extends beyond an inner side edge of the

Assignees

• Semiconductor Energy Lab

Inventors

• Yamazaki Shunpei

Classifications

• H10P14/3434

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

• H10P14/3426

  Oxides · CPC title

• H10P14/3238

  being insulating materials · CPC title

• H01L29/66969

  Electricity · mapped topic

• H01L21/02488

  Electricity · mapped topic