Microelectronic device package electromagnetic shield

Patent metadata

Field	Value
Publication number	US-9836095-B1
Application number	US-201615282481-A
Country	US
Kind code	B1
Filing date	Sep 30, 2016
Priority date	Sep 30, 2016
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

Microelectronic devices including an electromagnetic shield over a desired portion of a substrate. The magnetic shield is formed of conductive particles within a selectively curable layer, such as a solder resist material. After application to the substrate, the conductive particles are allowed to settle to form a conductive structure to serve as an electromagnetic shield. The electromagnetic shield can be formed primarily over regions of the substrate containing conductive traces coupled in the package to communicate signals presenting a risk of causing electromagnetic interference with other devices.

First claim

The invention claimed is:

1. A microelectronic device, comprising:
a semiconductor die; and
a substrate having a first surface coupled to the semiconductor die in a first region, the substrate including conductive traces redistributing contacts of the semiconductor die to laterally offset locations relative to the first region,
first selectively hardenable layers extending over the first surface and a second surface of the substrate, and
a second selectively hardenable layer extending over a portion of the first surface or the second surface of the substrate, the second selectively hardenable layer comprising an electromagnetic shield layer comprising conductive particles retained in position in the second selectively hardenable layer, wherein the second selectively hardenable layer extends over a portion of the substrate outside of the first region where the semiconductor die is coupled, and does not extend within the first region.

2. A microelectronic device, comprising:
a semiconductor die; and
a substrate having a first surface coupled to the semiconductor die in a first region, the substrate including conductive traces redistributing contacts of the semiconductor die to laterally offset locations relative to the first region,
first selectively hardenable layers extending over the first surface and a second surface of the substrate, and
a second selectively hardenable layer extending over a portion of the first surface or the second surface of the substrate, the second selectively hardenable layer comprising an electromagnetic shield layer comprising conductive particles retained in position in the second selectively hardenable layer, wherein the conductive particles are arranged proximate an outer surface of the second selectively hardenable layer, and wherein the conductive particles contact one another to form the electromagnetic shield layer.

3. The microelectronic device of claim 2 , wherein the conductive particles comprise metallic particles.

4. The microelectronic device of claim 2 , wherein the conductive particles comprise ferrite.

5. The microelectronic device of claim 1 , wherein the metallic particles comprise at least one of nickel, copper, silver, copper-silver, gold-nickel, and tin-silver.

6. The microelectronic device of claim 1 , wherein the second selectively hardenable layer extends over a portion of the substrate outside of the first region having conductive traces coupled to communicate input/output signals presenting a risk of generating electromagnetic interference.

7. The microelectronic device of claim 1 , wherein the second selectively hardenable layer extends over traces carrying memory input/output signals.

8. The microelectronic device of claim 1 , wherein the second selectively hardenable layer extends over traces carrying memory input/output signals cycling at 2.9 GHz or greater.

9. The microelectronic device of claim 1 , wherein the conductive particles comprise metal spheres.

10. The microelectronic device of claim 1 , further comprising a conductive structure extending between the electromagnetic shield layer and a ground plane.

11. A method of forming a microelectronic device package, comprising:
providing a substrate for the package, the substrate including contacts in a first region of the substrate that are configured to connect to contacts of the semiconductor die, and conductive traces extending from at least some of the substrate contacts to locations laterally offset from the first region;
forming first selectively hardenable layers extending over a first surface and a second surface of the substrate;
forming a second selectively hardenable layer extending over at least a portion of the first surface or the second surface of the substrate, the second selectively hardenable layer comprising conductive particles;
allowing the conductive particles of the second selectively hardenable layer to settle to form an electromagnetic shield; and
connecting a semiconductor die to the contacts in the first region of the substrate.

12. The method of claim 11 , wherein the first region is on the first surface of the substrate, and wherein the second selectively hardenable layer is formed over the first surface of the substrate.

13. The method of claim 11 , wherein allowing the conductive particles of the second selectively hardenable layer to settle to form an electromagnetic shield comprises orienting the substrate with the second selectively hardenable layer extending beneath the substrate allowing gravity to assist settling of the conductive particles.

14. The method of claim 11 , wherein allowing the conductive particles of the second selectively hardenable layer to settle to form an electromagnetic shield comprises establishing a condition of the substrate to promote settling of the conductive particles.

15. The method of claim 14 , wherein establishing a condition of the substrate to promote settling of the conductive particles comprises elevating the temperature of the substrate.

16. The method of claim 14 , wherein establishing a condition of the substrate to promote settling of the conductive particles comprises vibrating the substrate.

17. The method of claim 11 , wherein the conductive particles comprise metal spheres.

18. The method of claim 11 , wherein the conductive particles comprise at least one of ferrite, nickel, copper, silver, and tin-silver.

19. An electronic system, comprising:
a processor;
a substrate having a first surface coupled to the processor, the substrate including,
conductive traces redistributing contacts of the processor to laterally offset locations relative to the first region,
first selectively hardenable layers extending over the first surface and a second surface of the substrate, and
a second selectively hardenable layer extending over a portion of the first surface or the second surface of the substrate, the second selectively hardenable layer comprising an electromagnetic shield layer comprising conductive particles, wherein the second selectively hardenable layer extends over portions of the substrate outside the first region where the semiconductor die is coupled, and does not extend within the first region;
at least one memory device; and
at least one of a mass storage device, a chipset, and a network interface.

20. The electronic system of claim 19 , wherein the second selectively hardenable layer extends over a portion of the substrate containing conductive traces coupled to the semiconductor die to communicate input/output signals presenting a risk of generating electromagnetic interference.

21. The electronic system of claim 19 , wherein the second selectively hardenable layer extends over conductive traces carrying memory input/output signals.

22. The electronic system of claim 19 , wherein the second selectively hardenable layer extends over conductive traces carrying memory input/output signals cycling at 2.9 GHz or greater.

Assignees

• Intel Corp

Inventors

• Lim Min Suet
• Goh Eng Huat
• Yong Khang Choong
• Koh Boon Ping
• Song Wil Choon

Classifications

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W72/30

  Die-attach connectors · CPC title

• H10W42/20 Primary

  protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons · CPC title

• H01L24/33

  Electricity · mapped topic

• H01L23/552

  Electricity · mapped topic