Inspection device of display device and inspection method of display device

Patent metadata

Field	Value
Publication number	US-9835565-B2
Application number	US-201514746427-A
Country	US
Kind code	B2
Filing date	Jun 22, 2015
Priority date	Dec 29, 2014
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

An inspection device of a display device includes a first illumination unit providing a first incident light to the display device at a first incident angle, a second illumination unit providing a second incident light to the display device at a second incident angle, a third illumination unit providing a third incident light to the display device at a third incident angle, and a defect detector receiving at least one of a first reflection light obtained from the first incident light reflected by the display device at a first reflection angle, a second reflection light obtained from the second incident light reflected by the display device at a second reflection angle, and a third reflection light obtained from the third incident light reflected by the display device at a third reflection angle to detect defects of the display device.

First claim

What is claimed is:

1. An inspection device of a display device, which comprises a display panel and a protective film disposed on the display panel, comprising:
a first illumination unit providing a first incident light to the display device at a first incident angle with respect to a normal to a surface of the display device;
a second illumination unit providing a second incident light to the display device at a second incident angle with respect to the normal to the surface of the display device, the second incident angle being greater than the first incident angle;
a third illumination unit providing a third incident light to the display device at a third incident angle with respect to the normal to the surface of the display device, the third incident angle being greater than the second incident angle; and
a defect detector receiving at least one of a first to a third reflection lights obtained from the first to a third incident lights reflected by the display device at different reflection angles, and a first to a third scattering lights obtained from the first to the third incident lights scattered by the display device to detect defects of the display device,
wherein the defect detector comprises,
a photographing unit taking a picture of the display device using received lights; and
a controller receiving the pictures from the photographing unit to detect the defects of the display device, and
the controller receives the pictures of the display device taken by i) a protective reflection light reflected from the upper surface of the protective film of each of the first to third reflection lights, ii) a protective foreign substance scattering light scattered by the foreign substances of the dust or the waste on the protective film, and iii) a protective scattering light scattered by the defects existing on the protective film of each of the first to third scattering lights, to distinguish defective areas and normal areas of the protective film, and
the controller receives the pictures of the display device taken by i) a display reflection light reflected from the upper surface of the display panel of each of the first to third reflection lights, ii) a display foreign substance scattering light scattered by the foreign substances of the dust or the waste on the display panel, and iii) a display scattering light scattered by the defects existing on the display panel of each of the first to third scattering lights, to distinguish defective areas and normal areas of the display panel.

2. The inspection device of claim 1 , wherein the first illumination unit comprises:
a first light source providing the first incident light to the display device; and
a first polarization plate disposed between the first light source and the display device, and the first polarization plate is a linear polarization plate, a circular polarization plate, or an elliptical polarization plate.

3. The inspection device of claim 2 , wherein the first illumination unit further comprises a band pass filter disposed between the first light source and the display device.

4. The inspection device of claim 1 , wherein the second illumination unit comprises:
a second light source providing the second incident light to the display device; and
a second polarization plate disposed between the second light source and the display device, and the second polarization plate is a linear polarization plate, a circular polarization plate, or an elliptical polarization plate.

5. The inspection device of claim 1 , wherein the third illumination unit comprises:
a third light source providing the third incident light to the display device; and
a third polarization plate disposed between the third light source and the display device, and the third polarization plate is a linear polarization plate, a circular polarization plate, or an elliptical polarization plate.

6. The inspection device of claim 1 , wherein the first illumination unit comprises a first polarization plate, the second illumination unit comprises a second polarization plate, the third illumination unit comprises a third polarization plate, the first polarization plate polarizes the same light components as the second polarization plate, and the first polarization plate polarizes light components different from the third polarization plate.

7. The inspection device of claim 1 , wherein the photographing unit comprises:
a camera taking the picture of the display device; and
a fourth polarization plate disposed between the camera and the display device.

8. The inspection device of claim 7 , wherein the camera comprises at least one of a charge coupled device camera and a complementary metal oxide semiconductor camera.

9. The inspection device of claim 7 , wherein the fourth polarization plate is a linear polarization plate, a circular polarization plate, or an elliptical polarization plate.

10. The inspection device of claim 1 , wherein the first illumination unit comprises a first polarization plate, the second illumination unit comprises a second polarization plate, the third illumination unit comprises a third polarization plate, the photographing unit comprises a fourth polarization plate, the first polarization plate polarizes the same light components as the second polarization plate, the third polarization plate polarizes the same light components as the fourth polarization plate, and the first polarization plate polarizes light components different from the third polarization plate.

11. The inspection device of claim 1 , wherein the first incident angle is in a range from about 0° to about 5°, the second incident angle is in a range from about 10° to about 20°, and the third incident angle is in a range from about 30° to about 50°.

12. An inspection method of a display device that comprises a display panel and a protective film disposed on the display panel, comprising:
providing a first incident light to the display device at a first incident angle with respect to a normal to a surface of the display device;
providing a second incident light to the display device at a second incident angle with respect to the normal to the surface of the display device, the second incident angle being greater than the first incident angle;
providing a third incident light to the display device at a third incident angle with respect to the normal to the surface of the display device, the third incident angle being greater than the second incident angle;
providing an image of the display device using at least one of a first to a third reflection lights obtained from the first to the third incident lights reflected by the display device at different reflection angles, and a first to a third scattering lights obtained from the first to the third incident lights scattered by the display device;
distinguishing defective areas and normal areas of the protective film using i) a protective reflection light reflected from the upper surface of the protective film of each of the first to third reflection lights, ii) a protective foreign substance scattering light scattered by the foreign substances of the dust or the waste on the protective film, and iii) a protective scattering light scattered by the defects existing on the protective film of each of the first to third scattering lights; and
distinguishing defective areas and normal areas of the display panel using i) a display reflection light reflected from the upper surface of the display panel of each of the first to third reflection lights, ii) a display foreign substance scattering light scattered by the foreign substances of the dust or the waste on the display panel, and iii) a display scattering light sc

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Wal Jun
• Ryu Joongyoung
• Baeck Seung-Young
• Ryu Changhyun
• Lim Deok Joo

Classifications

• G01N2021/8848

  Polarisation of light · CPC title

• G01N21/8422

  Investigating thin films, e.g. matrix isolation method · CPC title

• G01N21/95 Primary

  characterised by the material or shape of the object to be examined (G01N21/89 - G01N21/91, G01N21/94 take precedence) · CPC title

• G01N2201/0683

  Brewster plate; polarisation controlling elements · CPC title

• G01N2021/8427

  Coatings · CPC title