Mems module
US-2024059554-A1 · Feb 22, 2024 · US
US9835512B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9835512-B2 |
| Application number | US-201715399806-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 6, 2017 |
| Priority date | Oct 11, 2013 |
| Publication date | Dec 5, 2017 |
| Grant date | Dec 5, 2017 |
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A header assembly for a pressure sensor and methods for manufacturing and using the same are provided. In one example embodiment, a header insert may include a base; a hollow protusion coupled to the base and having a metalized inner surface and a metalized outer surface, wherein the metalized outer surface of the hollow protrusion is used to couple to a header and the metalized inner surface of the hollow protrusion is used to couple to a header pin; and wherein a seal is formed between the header, the header insert and the header pin.
Opening claim text (preview).
What is claimed is: 1. A system, comprising: a header; a single-piece ceramic header insert coupled to the header, the header insert comprising: a hollow protrusion having a metalized inner surface; and a base having a metalized outer surface; and a header pin disposed in the hollow protrusion; wherein the metalized inner surface of the hollow protrusion is sealed to header pin, and wherein at least a portion of the metalized outer surface of the base is sealed to the header. 2. The system of claim 1 , wherein the header insert is composed of one contiguous material. 3. The system of claim 1 , wherein the header insert includes an aperture configured for accepting a pressure sensor, and wherein the header pin is configured for electrically coupling with the pressure sensor. 4. The system of claim 3 , wherein the base includes an aperture configured to allow a pressure to be received by the pressure sensor. 5. The system of claim 1 , wherein the header comprises a metallic material. 6. The system of claim 1 , wherein the header insert includes a groove for a ball bond wire used to couple a contact of a pressure sensor to the header pin. 7. The system of claim 1 , wherein the seal comprises a braze. 8. The system of claim 1 , wherein an area of the seal formed between the header and the base is at least a surface area of an outer surface of the hollow protrusion of the header insert. 9. The header insert of claim 1 , wherein a shape of the hollow protrusion is a cylinder. 10. A method, comprising: metalizing an inner surface of a hollow protrusion of a single-piece ceramic header insert to form a metalized inner surface; metalizing a base of the header insert to form a metalized outer surface; placing the header insert in a header; placing a header pin in the hollow protrusion; forming a first seal between the header pin and the metalized inner surface of the hollow protrusion; and forming a second seal between the metalized outer surface of the base and the header. 11. The method of claim 10 , wherein the header insert is composed of one contiguous material. 12. The method of claim 10 , wherein the header is composed of a metallic material. 13. The method of claim 10 , further comprising placing a pressure sensor in an aperture of the header insert. 14. The method of claim 13 , further comprising electrically coupling the pressure sensor to the header pin. 15. The method of claim 14 , further comprising placing a ball bond wire in a groove of the header insert. 16. The method of claim 15 , further comprising coupling a contact of the pressure sensor to the ball bond. 17. The method of claim 15 , further comprising coupling the header pin to the ball bond wire. 18. The method of claim 10 , wherein an area of the seal formed between the header and the base is at least a surface area of an outer surface of the hollow protrusion of the header insert. 19. The method of claim 10 , wherein forming the seal comprises a single process step. 20. An apparatus, comprising: a single-piece ceramic header insert configured to couple to a header, the header insert having a base with a metalized outer surface configured to seal with the header, the header insert further having one or more a hollow protrusions, each of the one or more hollow protrusions having a metalized inner surface configured to receive and seal with a corresponding header pin.
from the sensor to its support · CPC title
Soldering of electronic components · CPC title
Conductors · CPC title
to the outside of the housing (other details about the housing see G01L19/14) · CPC title
specially adapted for particular articles or work · CPC title
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