Nanowire cluster and template and method for nanowire cluster formation

Patent metadata

Field	Value
Publication number	US-9834847-B2
Application number	US-201514814362-A
Country	US
Kind code	B2
Filing date	Jul 30, 2015
Priority date	Jul 31, 2014
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

A cluster of non-collapsed nanowires, a template to produce the same, methods to obtain the template and to obtain the cluster by using the template, and devices having the cluster. The cluster and the template both have an interconnected region and an interconnection-free region.

First claim

The invention claimed is:

1. A cluster of spaced nanowires aligned longitudinally along a direction, the cluster comprising:
at least a first region and a second region positioned substantially along the longitudinal direction,
wherein the nanowires of the first region are interconnected with each other in the first region, and the nanowires of the second region are free of interconnections with each other in the second region.

2. The cluster according to claim 1 , wherein the nanowires are not collapsed.

3. The cluster according to claim 2 , wherein the first region is interconnected with interconnections made of the same material as the nanowires.

4. The cluster according to claim 1 , wherein the nanowires in the second region are a prolongation of the interconnected nanowires of the first region.

5. The cluster according to claim 1 , wherein the first region has a length along the longitudinal direction between 20 nm and 1 μm, and the second region has a length along the longitudinal direction of 1 μm or more.

6. A template for forming a cluster of aligned nanowires, the template comprising:
an assembly of first and second contiguous layers;
wherein the first layer comprises a network of aligned channels that are interconnected with each other in the first layer, and the second layer comprises a cluster of aligned channels that are separated from each other in the second layer.

7. The template according to claim 6 , wherein the aligned separated channels are a prolongation of the aligned interconnected channels.

8. A method for forming a cluster of aligned nanowires, the method comprising:
forming nanowires in a template according to claim 7 .

9. The method according to claim 8 , wherein forming nanowires comprises providing a metal in the template.

10. The method according to claim 9 , wherein providing the metal is performed by electrochemical deposition.

11. The method according to claim 10 , further comprising, after forming the nanowires, dissolving the template.

12. A method for manufacturing a template according to claim 7 , comprising:
anodizing an assembly of first and second contiguous layers, the first layer being made of a material forming a network of interconnected channels upon anodization, and the second layer being made of a material forming a cluster of aligned separated channels upon anodization.

13. The method of claim 12 , wherein the anodizing is performed under potentiostatic control in the presence of an electrolyte, and at a temperature of from 0° C. to 50° C.

14. The method according to claim 11 , wherein the second layer is made of a material comprising:
from 98.0 to 100 at % aluminum, and
less than 0.1 at % copper,
and wherein the first layer is made of a material comprising from 95.0 at % to 99.9 at % aluminum, and from 0.1 at % to 5.0 at % copper.

15. The method according to claim 14 wherein the material from which the second layer is made comprises at least 99 at % aluminium and less than 0.1 at % copper.

16. A device comprising a cluster of nanowires aligned longitudinally along a direction, the cluster of nanowires comprising at least a first region and a second region positioned substantially along the longitudinal direction, wherein the nanowires of the first region are interconnected with each other in the first region, and the nanowires of the second region are free of interconnections with each other in the second region.

17. The device according to claim 16 , wherein the first region has a length along the longitudinal direction between 20 nm and 1 μm, and the second region has a length along the longitudinal direction of 1 μm or more.

18. The template according to claim 6 , wherein the first layer has a thickness between 20 nm and 1 μm, and the second layer has a thickness of 1 μm or more.

19. The template according to claim 6 , wherein channels in the first layer are interconnected to other channels in the first layer by a plurality of pores.

Assignees

• Imec Vzw
• King Abdulaziz City Sci & Tech
• King Abdulaziz City Of Science And Tech

Inventors

• Huyghebaert Cedric
• Abd-Elnaiem Alaa
• Vereecken Philippe

Classifications

• H01B1/023

  Alloys based on aluminium · CPC title

• H01M4/661

  Metal or alloys, e.g. alloy coatings (H01M4/669 take precedence) · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• C25D1/20

  Separation of the formed objects from the electrodes {with no destruction of said electrodes} · CPC title