Calibration of layer thickness and ink volume in fabrication of encapsulation layer for light emitting device
US-9755186-B2 · Sep 5, 2017 · US
US9831473B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9831473-B2 |
| Application number | US-201615367064-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 1, 2016 |
| Priority date | Dec 12, 2013 |
| Publication date | Nov 28, 2017 |
| Grant date | Nov 28, 2017 |
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An ink jet process is used to deposit a material layer to a desired thickness. Layout data is converted to per-cell grayscale values, each representing ink volume to be locally delivered. The grayscale values are used to generate a halftone pattern to deliver variable ink volume (and thickness) to the substrate. The halftoning provides for a relatively continuous layer (e.g., without unintended gaps or holes) while providing for variable volume and, thus, contributes to variable ink/material buildup to achieve desired thickness. The ink is jetted as liquid or aerosol that suspends material used to form the material layer, for example, an organic material used to form an encapsulation layer for a flat panel device. The deposited layer is then cured or otherwise finished to complete the process.
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What is claimed is: 1. A method of operating a system to form a permanent encapsulation layer of an electronic light emitting device to be formed from a substrate, the method comprising: obtaining at least one value representing a desired thickness of the permanent encapsulation layer, each value of the at least one value corresponding to a respective surface area of the substrate; for each value of the at least one value, using a printer to print droplets of the liquid onto the substrate in a manner so as to deposit a volume per unit area of the liquid onto the respective portion of the substrate, the volume per unit area varying dependent on the value, wherein using the printer is further performed within a chamber that holds a controlled atmosphere; permitting the droplets, once deposited, to coalesce and form a continuous liquid coat; curing the continuous liquid coat to form the permanent encapsulation layer; wherein permitting and curing are also performed within a controlled atmosphere, and the liquid is not exposed to an uncontrolled atmosphere between the using of the printer to print and the curing; and wherein using the printer to print droplets comprises varying at least one of density of the droplets per unit area or volume of the droplets so as to vary the volume per unit area in dependence on the at least one value, so as to produce the desired thickness. 2. The method of claim 1 , wherein the at least one value comprises plural values, and wherein the method further comprises calling a software routine to return a pattern of the droplets in dependence on the plural values, the pattern to distribute the droplets so as to provide a volume per unit area of the liquid coat that varies according to variance in the plural values. 3. The method of claim 1 , wherein: the light emitting device is to provide a display region to electronically display a video; the at least one value comprises exactly one value; the respective surface area of the substrate comprises an area of the substrate encompassing an entirety of the display region; and the method further comprises fabricating the permanent encapsulation layer to provide blanket coverage of the entirety of the display region at a uniform thickness, dependent on the one value. 4. The method of claim 1 , wherein the controlled atmosphere comprises a chemically inert gas. 5. The method of claim 4 , wherein the chemically inert gas comprises nitrogen gas. 6. The method of claim 1 , wherein: the light emitting device is an organic light emitting diode (OLED) display device; the method is embodied as a method of fabricating the OLED display device; the permanent encapsulation layer is an organic encapsulation layer; the liquid comprises an organic monomer; and curing the continuous liquid coat comprises exposing the continuous liquid coat to ultraviolet radiation to form an organic polymer out of the organic monomer. 7. The method of claim 1 , wherein using the printer comprises causing a print head of the printer to eject droplets having a per-droplet volume dependent on a value of the at least one value. 8. The method of claim 7 , wherein causing the print head to eject the droplets comprises using a drive waveform to drive nozzle transducers of the print head and thereby cause ejection of the droplets, the drive waveform being varied so as to vary the per-droplet volume. 9. The method of claim 1 , wherein using the printer comprises causing a print head to eject droplets at a variable density of droplets with respect to the unit area, the variable density dependent on a value of the at least one value. 10. The method of claim 1 , wherein using the printer comprises using a processor to calculate the volume per unit area for each respective surface area of the substrate dependent on a base volume per unit area and the at least one value, and wherein the base volume per unit area is calibrated in advance to produce the continuous liquid coat to provide gapless coverage within the unit area and to produce a reference thickness in the permanent encapsulation layer. 11. In a system having a printer to print a liquid monomer onto a substrate, the liquid monomer to be cured following printing to form an organic polymer from the liquid monomer, the organic polymer forming a permanent encapsulation layer of an electronic display device to be formed from the substrate, an improvement comprising: obtaining at least one value representing a desired thickness of the permanent encapsulation layer, each value of the at least one value corresponding to a respective surface area of the substrate; for each value of the at least one value, using the printer to print droplets of the liquid monomer onto the substrate in a manner so as to deposit a volume per unit area of the liquid monomer onto the respective surface area of the substrate, the volume per unit area varying in dependence on the value, wherein printing is further performed within a chamber that holds a controlled atmosphere; permitting the droplets, once deposited, to coalesce and form a continuous liquid coat; following formation of the continuous liquid coat, curing the continuous liquid coat to form the permanent encapsulation layer; wherein permitting and curing are also performed within a controlled atmosphere, and wherein the liquid monomer is not exposed to an uncontrolled atmosphere between the using of the printer to print and the curing; and wherein using the printer to print droplets comprises varying at least one of density of the droplets per unit area or volume of the droplets so as to vary the volume per unit area in dependence on the at least one value, so as to produce the desired thickness. 12. The improvement of claim 11 , wherein the at least one value comprises plural values, and wherein the improvement further comprises calling a software routine to return a pattern of the droplets in dependence on the plural values, the pattern to distribute the droplets so as to provide volume per unit area of the liquid coat that varies according to variance in the plural values. 13. The improvement of claim 11 , wherein: the light emitting device is to provide a display region to electronically display a video; the at least one value comprises exactly one value; the respective surface area of the substrate comprises an area of the substrate encompassing an entirety of the display region; and the improvement further comprises fabricating the permanent encapsulation layer to provide blanket coverage of the entirety of the display region at a uniform thickness, dependent on the one value. 14. The improvement of claim 11 , wherein the controlled atmosphere comprises a chemically inert gas. 15. The improvement of claim 14 , wherein the chemically inert gas comprises nitrogen gas. 16. The improvement of claim 11 , wherein using the printer comprises causing a print head of the printer to eject droplets having a per-droplet volume dependent on a value of the at least one value. 17. The improvement of claim 16 , wherein causing the print head to eject the droplets comprises using a drive waveform to drive nozzle transducers of the print head and thereby cause ejection of the droplets, the drive waveform being varied so as to vary the per-droplet volume. 18. The improvement of claim 11 , wherein using the printer comprises causing a print head to eject droplets at a variable density of droplets with respect to the unit area, the variable density dependent on a value of the at least one value. 19. The improvement
comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title
Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title
Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title
using printing, e.g. ink-jet printing · CPC title
for multi-colour printing · CPC title
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