Semiconductor device manufacturing method and semiconductor device manufactured using the same
US-2024395745-A1 · Nov 28, 2024 · US
US9831281B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9831281-B2 |
| Application number | US-201514702174-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 1, 2015 |
| Priority date | May 1, 2015 |
| Publication date | Nov 28, 2017 |
| Grant date | Nov 28, 2017 |
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A focal plane array assembly includes a readout integrated circuit with a contact array surface, a photodiode array with a contact array surface facing the readout integrated circuit contact array surface, and an anisotropic conductive film disposed between contact array surfaces. The anisotropic conductive film includes conductive bodies that interconnect the photodiode array with the readout integrated circuit and an adhesive that couples the photodiode array to the readout integrated circuit.
Opening claim text (preview).
What is claimed is: 1. A focal plane array assembly, comprising: a readout integrated circuit (ROIC) having a contact array surface; a photodiode array (PDA) having a contact array surface facing the ROIC contact array surface; an anisotropic conductive film (ACF) directly contacting the PDA contact array surface and the ROIC contact array surface, wherein the ACF includes conductive bodies that interconnect the PDA with the ROIC and adhesive that mechanically couples the PDA to the ROIC. 2. The focal plane array assembly as recited in claim 1 , wherein the film encapsulates the interconnects extending between the PDA and the ROIC. 3. The focal plane array assembly as recited in claim 1 , wherein a topside of the PDA opposite the PDA contact array surface includes pixel circuitry. 4. The focal plane array assembly as recited in claim 1 , wherein a topside of the PDA opposite the PDA contact array surface is free from wire bond connections. 5. The focal plane array assembly as recited in claim 1 , further including a window facing the PDA contact array surface. 6. The focal plane array assembly as recited in claim 5 , wherein the window directly abuts the PDA contact array surface. 7. The focal plane array assembly as recited in claim 5 , wherein the window is separated from the PDA contact array surface by a gap. 8. A package assembly, comprising: a printed circuit board (PCB) defining an aperture and having a thickness; a focal plane array assembly as recited in claim 1 coupled to the PCB, wherein the PDA is arranged within the aperture and is contained within the thickness of the PCB, and wherein the ROIC spans the aperture and couples the PDA to the PCB. 9. The package assembly as recited in claim 8 , wherein the film encapsulates the interconnects extending between the PDA and the ROIC. 10. The package assembly as recited in claim 8 , further including a wire bond fanout connecting the ROIC with the PCB. 11. The package assembly as recited in claim 10 , wherein the ACF interconnects the ROIC with the wire bond fanout. 12. The package assembly as recited in claim 10 , wherein the ACF interconnects the PCB with the wire bond fanout. 13. The package assembly as recited in claim 8 , further including a window facing the PDA contact array surface. 14. The package assembly as recited in claim 13 , wherein the window is disposed within the aperture and directly abuts the PDA contact array surface. 15. The package assembly as recited in claim 13 , wherein the window spans the aperture and is separated from the PDA contact array surface by a gap. 16. A method of making a focal plane array assembly, comprising: applying an anisotropic conductive film (ACF) to a readout interface circuit (ROIC); adhering an anisotropic contact film (ACF) directly to a contact array surface of the ROIC; and adhering a contact array surface of photodiode array (PDA) to the ROIC such that the ACF directly contacts the contact array surface of the ROIC and the contact array surface of the PDA.
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