Charged particle beam device, image generation method, observation system

Patent metadata

Field	Value
Publication number	US-9824854-B2
Application number	US-201415109481-A
Country	US
Kind code	B2
Filing date	Dec 24, 2014
Priority date	Feb 6, 2014
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal ( 512 ) associated with light emitted from a light-emitting member ( 500 ) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample ( 6 ). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal ( 518 ) caused by reflected charged particles or secondary charged particles ( 517 ) from the sample ( 6 ).

First claim

The invention claimed is:

1. A charged particle beam device comprising:
a charged particle optical barrel adapted to irradiate a sample with a primary charged particle beam;
a sample stage adapted to allow a light-emitting member or a sample table including the light-emitting member adapted to attach and detach therefrom, the light-emitting member emitting light by being irradiated with a transmitted charged particle having been transmitted through an interior of the sample;
a detector adapted to detect a signal from the sample; and
a control unit adapted to control the detector in a transmitted charged particle image mode to generate a transmitted charged particle image based on a detection signal of light from the light-emitting member, and in a secondary charged particle image mode to generate a secondary charged particle image based on a detection signal caused by a secondary charged particle or a reflection charged particle from the sample.

2. The charged particle beam device according to claim 1 , wherein
the light from the light-emitting member and the detection signal caused by the secondary charged particle or the reflection charged particle from the sample are detected by the same detector.

3. The charged particle beam device according to claim 1 , wherein
the transmitted charged particle image mode and the secondary charged particle image mode are switchable without moving the sample stage.

4. The charged particle beam device according to claim 2 , further comprising:
an electrode adapted to cause an electric field between the detector and the sample,
wherein the transmitted charged particle image mode and the secondary charged particle image mode are switched by switching a magnitude of the electric field.

5. The charged particle beam device according to claim 1 , wherein
the detector acquires the detection signal caused by the secondary charged particle from the sample by detecting light generated by a collision of the secondary charged particle with a gas existing near the sample.

6. The charged particle beam device according to claim 1 , wherein
a degree of vacuum of a space where the sample is placed is changeable.

7. The charged particle beam device according to claim 1 , wherein
the detector includes a light-receiving surface that detects the light from the light-emitting member and a light-receiving surface that detects the reflection charged particle from the sample.

8. The charged particle beam device according to claim 7 , wherein,
at least one of the light-receiving surfaces of the detector includes a transparent film disposed thereon that does not transmit the reflection charged particle and transmits the light.

9. The charged particle beam device according to claim 7 , wherein,
at least one of the light-receiving surfaces of the detector includes an opaque film disposed thereon that does not transmit the light and transmits the reflection charged particle.

10. An image generation method comprising:
irradiating a sample with a primary charged particle beam;
converting a transmitted charged particle into light, the transmitted charged particle having been transmitted through an interior of the sample and a light-emitting member of a sample table where the sample is placed having being irradiated with the transmitted charged particle;
detecting the light and generating a transmitted charged particle image based on a detection signal of the light; and
detecting a signal caused by a secondary charged particle or a reflection charged particle from the sample and generating a secondary charged particle image,
wherein the light from the light-emitting member, and the detection signal caused by the secondary charged particle or the reflection charged particle from the sample are detected by the same detector.

11. The image generation method according to claim 10 , wherein,
the transmitted charged particle image and the secondary charged particle image are generated without moving the sample.

12. The image generation method according to claim 10 , further comprising:
switching the light from the light-emitting member and the detection signal caused by the secondary charged particle or the reflection charged particle from the sample by switching a magnitude of an electric field between the detector and the sample.

13. The image generation method according to claim 10 , further comprising:
acquiring the detection signal caused by the secondary charged particle from the sample by detecting light generated by a collision of the secondary charged particle with a gas existing near the sample.

14. The image generation method according to claim 10 comprising:
changing a degree of vacuum of a space where the sample is placed.

15. The image generation method according to claim 10 , comprising:
detecting the light from the light-emitting member and the secondary charged particle or the reflection charged particle from the sample at a same time.

16. The image generation method according to claim 10 , comprising:
irradiating the sample held in the sample table with light from a side of the sample table; and
irradiating the sample with light having been transmitted through the sample table.

17. The image generation method according to claim 10 , comprising:
irradiating the sample held in the sample table with light from a side of the sample;
causing the light having been transmitted through the sample to be transmitted through a first light-emitting member on which the sample is placed; and
causing the light having been transmitted through the first light-emitting member to enter a second light-emitting member arranged in a direction to cancel an influence of double refraction caused in the first light-emitting member.

18. An observation system comprising:
a charged particle optical barrel adapted to irradiate a sample with a primary charged particle beam;
a sample table including a light-emitting member, or a sample table including the light-emitting member adapted to attach and detach therefrom, the light-emitting member emitting light by being irradiated with a transmitted charged particle having been transmitted through an interior of the sample;
a sample stage adapted to attach and detach with the sample table;
a detector adapted to detect a signal from the sample; and
a control unit adapted to control the detector in a transmitted charged particle image mode to generate a transmitted charged particle image based on a detection signal of light from the light-emitting member, and in a secondary charged particle image mode to generate a secondary charged particle image based on a detection signal caused by a secondary charged particle or a reflection charged particle from the sample.

Assignees

• Hitachi High Tech Corp

Inventors

• Ominami Yusuke
• Katane Junichi
• Kawanishi Shinsuke
• Ito Sukehiro

Classifications

• H01J37/18

  Vacuum locks {; Means for obtaining or maintaining the desired pressure within the vessel} · CPC title

• H01J2237/2608

  with environmental specimen chamber · CPC title

• H01J37/226

  Optical arrangements for illuminating the object; optical arrangements for collecting light from the object · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/24455

  Transmitted particle detectors · CPC title