Method and apparatus for water edge exposure and backside cleaning

Patent metadata

Field	Value
Publication number	US-9821348-B2
Application number	US-201314060393-A
Country	US
Kind code	B2
Filing date	Oct 22, 2013
Priority date	Oct 22, 2013
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

A method for cleaning an edge of a semiconductor wafer in a wafer edge exposure (WEE) apparatus includes positioning the semiconductor wafer having a resist thereon in a wafer positioning device. A brush bar is positioned adjacent a backside of the semiconductor wafer in the wafer positioning device. The brush bar engages and cleans a backside of the semiconductor wafer while the semiconductor wafer is disposed in the wafer positioning device. A height of an edge of the semiconductor wafer is detected. The focusing position of exposure light radiated toward the edge is controlled on the basis of a height of the edge. Exposure light is radiated towards an edge after the cleaning step.

First claim

What is claimed is:

1. A method for cleaning a semiconductor wafer in a wafer edge exposure (WEE) apparatus, the method comprising:
cleaning a back surface of a semiconductor wafer with a cleaning apparatus by contacting a centrally disposed back surface portion of the semiconductor wafer with a brush, and after contacting the centrally disposed back surface portion, laterally moving the brush on the semiconductor wafer toward an edge of the semiconductor wafer, wherein the brush is moved with a motor, and the brush is interposed between the motor and the semiconductor wafer;
detecting a height of the edge of the semiconductor wafer with a focus sensor located on an opposite side of the semiconductor wafer from the cleaning apparatus, the semiconductor wafer having a resist thereon;
controlling a focusing position of exposure light radiated toward the edge, based on the height of the edge; and
radiating exposure light towards the edge after cleaning.

2. The method of claim 1 , wherein cleaning the back surface of the semiconductor wafer includes contacting the back surface of the semiconductor wafer with a cleaning fluid.

3. The method of claim 1 , wherein contacting the back surface of the semiconductor wafer with a cleaning fluid comprises dispensing a chemical spray on the back surface of the semiconductor wafer.

4. The method of claim 1 , wherein cleaning the back surface of the semiconductor wafer includes controlling and adjusting a distance between the cleaning apparatus and the back surface of the semiconductor wafer.

5. The method of claim 1 , wherein:
detecting includes sensing a distance between an optical section for outputting exposure light and the edge; and
controlling includes controlling a focusing position of the exposure light originating from the optical section such that a focus of the exposure light matches the height of an edge surface.

6. The method of claim 1 , wherein only an annular portion of the edge is irradiated during radiating exposure.

7. The method of claim 1 , wherein contacting the centrally disposed back surface portion of the semiconductor wafer with the brush occurs before contacting the edge of the semiconductor wafer with the brush.

8. The method of claim 1 , wherein contacting the centrally disposed back surface portion of the semiconductor wafer with the brush occurs without contacting the edge of the semiconductor wafer with the brush.

9. A method for cleaning an edge of a semiconductor wafer in a wafer edge exposure (WEE) apparatus, the method comprising:
positioning the semiconductor wafer having a resist thereon in a wafer positioning device;
positioning a brush bar adjacent a backside of the semiconductor wafer in the wafer positioning device, wherein the brush bar is positioned with a motor, and the brush bar interposes the motor and a portion of the semiconductor wafer;
using the brush bar to clean the backside of the semiconductor wafer while the semiconductor wafer is disposed in the wafer positioning device, wherein the brush bar is moved from a central portion of the semiconductor wafer to an edge of the semiconductor wafer;
detecting a height of the edge of the semiconductor wafer;
controlling a focusing position of exposure light radiated toward the edge of the semiconductor wafer based on the height of the edge; and
irradiating exposure light towards the edge of the semiconductor wafer after cleaning and while the semiconductor wafer is positioned within the wafer positioning device.

10. The method of claim 9 , wherein cleaning the backside using the brush bar includes contacting the backside of the semiconductor wafer with a brush disposed on the brush bar.

11. The method of claim 9 , wherein positioning the semiconductor wafer in the wafer positioning device includes rotating the semiconductor wafer using the wafer holding device during the cleaning of the backside of the semiconductor wafer.

12. The method of claim 11 , wherein cleaning the backside of the semiconductor wafer with the brush bar includes moving the brush bar from the central portion of the semiconductor wafer to the edge of the semiconductor wafer while the semiconductor wafer is rotating.

13. The method of claim 11 , further comprising dispensing a chemical spray on the backside of the semiconductor wafer.

14. The method of claim 13 , wherein dispensing a chemical spray on the backside of the semiconductor wafer and cleaning the backside of the semiconductor wafer are performed substantially concurrently.

15. A method for cleaning a semiconductor wafer, the method comprising:
cleaning a surface of an edge portion of a semiconductor wafer with a cleaning apparatus, the semiconductor wafer comprising a major surface, the major surface comprising the surface of the edge portion of the semiconductor wafer, wherein cleaning the surface of the edge portion of the semiconductor wafer comprises engaging a brush bar with a central portion of the semiconductor wafer, and moving the brush bar from the central portion of the semiconductor wafer to the edge portion of the semiconductor wafer, wherein movement of the brush bar is driven with a motor, and the brush bar, the motor, and a portion of the semiconductor wafer are substantially aligned along a common axis;
detecting a height of the edge portion of the semiconductor wafer, the semiconductor wafer having a resist thereon;
controlling a focusing position of exposure light radiated toward the edge portion; and
radiating exposure light towards the edge portion after cleaning, wherein the semiconductor wafer is interposed between the cleaning apparatus and exposure light, wherein the semiconductor wafer is located on a first chuck during both the cleaning the surface and the radiating the exposure light.

16. The method of claim 15 , wherein controlling the focusing position of exposure light radiated toward the edge portion is based on the height of the edge portion.

17. The method of claim 16 , wherein cleaning the surface of the edge portion of the semiconductor wafer includes contacting the surface of the edge portion of the semiconductor wafer with a brush of the brush bar.

18. The method of claim 17 , wherein the brush of the brush bar is moved from the central portion of the semiconductor wafer to the edge portion of the semiconductor wafer during cleaning.

19. The method of claim 17 , wherein the brush of the brush bar is moved while the semiconductor wafer is rotated.

20. The method of claim 15 , further comprising dispensing a chemical spray on the semiconductor wafer, and wherein dispensing the chemical spray on the semiconductor wafer and cleaning the surface of the edge portion of the semiconductor wafer are performed substantially simultaneously.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Wu Ming-Chang
• Hsu Jia-Hung

Classifications

• H10P70/56

  Cleaning of wafer backside · CPC title

• H10P70/54

  Cleaning of wafer edges · CPC title

• B08B1/36

  rotating about an axis orthogonal to the surface · CPC title

• B08B1/143

  Wipes · CPC title

• B08B1/14

  Wipes; Absorbent members, e.g. swabs or sponges (with integrated means for dispensing fluids B08B1/40) · CPC title