In situ plasma clean for removal of residue from pedestal surface without breaking vacuum
US-9818585-B2 · Nov 14, 2017 · US
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Loo David H patents
Loo David H is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Loo David H |
| Total patents | 1 |
| First publication | Nov 14, 2017 |
| Latest publication | Nov 14, 2017 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C14/564 | 1 |
| C23C14/50 | 1 |
| H01J37/3408 | 1 |
| H01J37/32642 | 1 |
| H01J37/32715 | 1 |