Electron microscope

Patent metadata

Field	Value
Publication number	US-9818576-B2
Application number	US-201415022436-A
Country	US
Kind code	B2
Filing date	Oct 31, 2014
Priority date	Nov 7, 2013
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

To improve the workability of the task of adjusting the position of a limit field diaphragm. An electron microscope provided with an image-capturing means for capturing an image of an observation visual field prior to insertion of a limit field diaphragm as a map image, a recording means for recording the map image, an extraction means for capturing an image of the observation visual field after insertion of the limit field diaphragm and extracting the outline of the diaphragm, a drawing means for drawing the outline on the map image, and a display means for displaying the image drawn by the drawing means.

First claim

The invention claimed is:

1. An electron microscope having:
an irradiation lens system configured to irradiate an electron beam to an observation target;
an objective lens system configured to focus on the observation target;
a detection device configured to detect a response from the observation target;
an image forming lens system configured to adjust a size of the observation target to a specified size when the observation target is projected on the detection device;
a selection mechanism configured to select an area of the observation target projected on the detection device;
and
a display device configured to display an image produced by an operation device or an image detected by the detection device,
the electron microscope comprising:
a first detection means configured to detect, by the detection device, an image in which an observation range of the observation target is not selected by the selection mechanism;
a storage means configured to store an image detected by the first detection means;
a second detection means configured to detect, by the detection device, an image in which an observation range of the observation target is selected by the selection mechanism;
an extraction means configured to extract an outline of the selection mechanism from the image detected by the second detection means;
the operation device configured to draw the outline, which is extracted by the extraction means, on an image shot by the first detection means; and
a display configured to display the image drawn by the operation device.

2. The electron microscope according to claim 1 , wherein an image in an inside of the outline of the image detected by the second detection means is located on the image detected by the first detection means.

3. The electron microscope according to claim 1 , wherein the image detected by the second detection means and the image drawn by the operation device are displayed on a different display.

4. The electron microscope according to claim 1 , wherein a magnification of the image displayed on the display means can be optionally set.

5. An electron microscope having:
an irradiation lens system configured to irradiate an electron beam to an observation target;
an objective lens system configured to focus on the observation target;
a detection device configured to detect a response from the observation target;
an image forming lens system configured to adjust a size of the observation target to a specified size when the observation target is projected on the detection device;
a selection mechanism configured to select an area of the observation target projected on the detection device;
an input device configured to input a plurality of types of numerical values;
and
a display device configured to display an image produced by an operation device or an image detected by the detection device,
the electron microscope comprising:
a first detection means configured to detect, by the detection device, an image in which an observation range of the observation target is not selected by the selection mechanism;
a storage means configured to store the image detected by the first detection means;
a second detection means configured to detect, by the detection device, an image in which the observation range of the observation target is selected by the selection mechanism;
an extraction means configured to extract an outline of the selection mechanism from the image detected by the second detection means;
the operation device configured to compute, using the numerical value input by the input device, an analysis area addressing an electro-optical error;
the operation device configured to draw a new outline that reflects a result of computation by the operation device based on the outline extracted by the extraction means;
the operation device configured to draw the new outline on an image shot by the first detection means; and
a display configured to display the image drawn by the operation device.

6. The electron microscope according to claim 5 , wherein an image in an inside of the outline of the image detected by the second detection means is located on the image detected by the first detection means.

7. The electron microscope according to claim 5 , wherein the image detected by the second detection means and the image drawn by the operation device are displayed on a different display.

8. The electron microscope according to claim 5 , wherein a magnification of the image displayed on the display can be optionally set.

9. The electron microscope according to claim 5 , wherein a plurality of the analysis areas, which are computed by the operation device, are computed under different conditions, and a plurality of lines are drawn by the operation device.

10. The electron microscope according to claim 6 , wherein the numerical values are set based on a condition of the electron microscope.

Assignees

• Hitachi High Tech Corp

Inventors

• Kubo Takashi
• Kobayashi Hiroyuki

Classifications

• H01J37/10

  Lenses · CPC title

• H01J37/22

  Optical {, image processing} or photographic arrangements associated with the tube · CPC title

• H01J37/263

  Contrast, resolution or power of penetration · CPC title

• H01J2237/248

  Components associated with the control of the tube · CPC title

• H01J2237/2602

  Details · CPC title