Composite substrate with alternating pattern of diamond and metal or metal alloy

Patent metadata

Field	Value
Publication number	US-9812375-B2
Application number	US-201615011805-A
Country	US
Kind code	B2
Filing date	Feb 1, 2016
Priority date	Feb 5, 2015
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

A composite substrate includes a submount substrate of an alternating pattern of electrically insulative portions, pieces, layers or segments and electrically conductive portions, pieces, layers or segments, and a shaft, back or plate for supporting the alternating pattern of electrically insulative portions and electrically conductive portions. An active device having a P-N junction can be mounted on the submount substrate. The electrically insulative portions, pieces, layers or segments can be formed from diamond while the electrically conductive portions, pieces, layers or segments can be formed from a metal or metal alloy.

First claim

The invention claimed is:

1. A composite substrate comprising:
a set of spaced electrical conductors;
means for supporting the spaced electrical conductors; and
a set of electrical insulators, wherein between each pair of spaced electrical conductors is positioned one of the electrical insulators in contact with said pair of electrical conductors, wherein:
each electrical insulator positioned between one pair of spaced electrical conductors has the form of a strip with at least one lateral end exposed, and
a planar surface of the composite substrate is defined by the set of electrical insulators positioned between the set of spaced electrical conductors.

2. The composite substrate of claim 1 , further including at least one active device positioned over one or both of the following:
a portion of one of the electrical insulators that is not in contact with one of the spaced electrical conductors; and
a portion of one of the electrical conductors that is not in contact with at least one of the electrical insulators.

3. The composite substrate of claim 2 , wherein the means for supporting the spaced electrical conductors is positioned between the active device and said one electrical insulator.

4. The composite substrate of claim 2 , wherein the active device is a semiconductor device having at least one P-N junction.

5. The composite substrate of claim 2 , wherein a ratio between a Coefficient of Thermal Expansion (CTE) of the composite substrate and a CTE of the active device is between 0.4 and 2, or between 0.5 and 1.8, or between 0.6 and 1.6, or between 0.7 and 1.4, or between 0.8 and 1.2.

6. The composite substrate of claim 2 , further including a dielectric material between the active device and one or both of said portion of the one electrical insulator and said portion of the one electrical conductor.

7. The composite substrate of claim 6 , further including on said dielectric at least one conductor configured to convey electrical signals to and/or from contacts of the active device.

8. The composite substrate of claim 1 , wherein each electrical insulator is comprised of diamond.

9. The composite substrate of claim 1 , wherein each electrical conductor is comprised of a metal or a metal alloy.

10. The composite substrate of claim 9 , wherein each electrical conductor is comprised of a copper-tungsten (Cu—W) alloy.

11. The composite substrate of claim 1 , wherein the means for supporting the spaced electrical conductors includes one of the following:
a shaft or back to which one end of each electrical conductor is coupled; or
a plate to which one side of each electrical conductor is coupled.

12. The composite substrate of claim 11 , wherein the spaced electrical conductors and the means for supporting the spaced electrical conductors are a unitary piece formed of the same material.

13. The composite substrate of claim 1 , wherein each electrical insulator is directly grown on said pair the electrical conductors in contact with said electrical insulator; or is bonded to said pair the electrical conductors in contact with said electrical insulator; or is in direct contact said pair the electrical conductors.

14. The composite substrate of claim 13 , wherein each electrical insulator directly grown on said pair the electrical conductors in contact with said electrical insulator is grown via chemical vapor deposition (CVD).

15. The composite substrate of claim 13 , wherein each electrical insulator bonded to said pair the electrical conductors in contact with said electrical insulation is bonded via an adhesive.

16. The composite substrate of claim 1 , wherein each electrical insulator in the form of a strip has a length greater a width of the electrical insulator, and the length greater that a height of the electrical insulator.

17. A composite substrate comprising an alternating pattern of diamond strips and metal or metallic strips, wherein each metal or metallic strip has a coefficient of thermal expansion (CTE)<12×10 −6 meter/meter-degree Kelvin, <11×10 −6 meter/meter-degree Kelvin, <10×10 −6 meter/meter-degree Kelvin, or <9×10 −6 meter/meter-degree Kelvin, wherein each diamond strip has at least one exposed lateral end, and a planar surface of the composite substrate is defined by the alternating pattern of diamond strips and metal or metallic strips.

18. The composite substrate of claim 17 , further comprising means for supporting the alternating pattern of diamond strips and metal or metallic strips including one of the following:
a shaft or back to which one end of each metal or metallic strip is coupled; or
a plate to which one side of each metal or metallic strip is coupled.

19. The composite substrate of claim 17 , further including an active device positioned over one or both of the following:
a portion of one of the diamond strips; and
a portion of one of the metal or metallic strips, wherein the active device includes a P-N junction.

20. The composite substrate of claim 19 , wherein a ratio between a Coefficient of Thermal Expansion (CTE) of the composite substrate and a CTE of the active device is between 0.4 and 2; or between 0.5 and 1.8; or between 0.6 and 1.6; or between 0.7 and 1.4; or between 0.8 and 1.2.

21. The composite substrate of claim 19 , wherein the alternating pattern of diamond strips and metal or metallic strips define a submount and the composite substrate further includes:
a dielectric layer between the active device and at least a portion of the submount; and
a conductor formed on the dielectric layer, said conductor in electrical continuity with a contact of the active device.

22. The composite substrate of claim 17 , wherein each diamond strip has a length greater than a width of the diamond strip, and the length greater than a height of the diamond strip.

Assignees

• Ii Vi Inc

Inventors

• Xu Wen-Qing
• Liu Chao
• Barbarossa Giovanni
• Eissler Elgin E
• Anderson Thomas E
• Kraisinger Charles J
• Lichtenstein Norbert

Classifications

• H10W90/763

  between laterally-adjacent chips · CPC title

• H10W90/761

  of strap connectors · CPC title

• H10W90/734

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W90/00

  Package configurations · CPC title