Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same
US-2024019311-A1 · Jan 18, 2024 · US
US9810587B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9810587-B2 |
| Application number | US-201214382633-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 2, 2012 |
| Priority date | Mar 5, 2012 |
| Publication date | Nov 7, 2017 |
| Grant date | Nov 7, 2017 |
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A composite sensor fiber comprising a filamentary core ( 12 ) and an outer layer ( 30 ) encapsulating an intermediate sensor layer ( 20 ) of a detectably thermoresponsive material. Also disclosed are a method of making composite sensor fibers, a dressing comprising a fabric having a matrix of the fibers, and a method of monitoring a wound that utilizes the dressing.
Opening claim text (preview).
The invention claimed is: 1. A composite sensor fibre comprising a filamentary core and an outer layer encapsulating an intermediate sensor layer of a flowable and detectably thermochromic liquid crystalline material between the filamentary core and the outer layer, the thermochromic liquid crystalline material comprising at least one selected from cholesteryl oleyl carbonate, cholesteryl nonanoate, cholesteryl 2, 4-dichlorobenzoate, cholesteryl benzoate, cholesteryl propionate, cholesteryl oleate, and cholesteryl chloride, wherein the outer layer is transparent and the filamentary core is configured to provide a contrast for facilitating the observation of temperature or temperature gradient changes in the thermochromic liquid crystalline material, and wherein the temperature or temperature gradient changes comprise changes in color or color gradient. 2. A composite sensor fibre according to claim 1 wherein the thermochromic liquid crystalline material is a mixture of liquid crystalline compounds selected to achieve a predetermined temperature indication accuracy over a predetermined temperature range. 3. A composite sensor fibre according to claim 1 wherein the filamentary core is of a cross-section selected from generally circular and generally trilobal sections. 4. A composite sensor fibre according to claim 1 , wherein the outer layer has a melting temperature below that of the filamentary core. 5. A composite sensor fibre according to claim 1 wherein the filamentary core is a monofilament or multifilament fibre. 6. A composite sensor fibre according to claim 1 , wherein the filamentary core is polyester ether ketone (PEEK). 7. A fibrous material formed from or incorporating composite sensor fibres according to claim 1 . 8. A fibrous material according to claim 7 comprising a fabric. 9. A clothing item that includes fibrous material according to claim 8 . 10. A method of making a composite sensor fibre according to claim 1 , comprising continuously delivering the filamentary core from a supply thereof and co-extruding the thermochromic liquid crystalline material about the core and the outer layer about the thermochromic liquid crystalline material at a temperature that facilitates the coextrusion but at which the core remains substantially solid and the outer layer does not inhibit delivery of the thermochromic liquid crystalline material. 11. A method according to claim 10 , wherein the thermochromic liquid crystalline material is a mixture of liquid crystalline compounds selected to achieve a predetermined temperature indication accuracy over a predetermined temperature range. 12. A method according to claim 11 , wherein the mixture of liquid crystalline compounds is fed by a pump at an elevated temperature selected to enable the mixture to flow at the elevated temperature. 13. A dressing that includes a fabric having a matrix of thermochromic composite sensor fibres according to claim 1 , which fibres indicate localised body temperature changes adjacent the dressing by visibly exhibiting a change in colour or colour gradient. 14. A dressing according to claim 13 wherein the composite sensor fibres are selected whereby localised body temperature changes adjacent to the dressing within the range 25° C. to 45° C. are visibly exhibited by a change in colour or colour gradient. 15. A dressing according to claim 14 , wherein the thermochromic liquid crystalline material of the composite sensor fibres is a mixture of liquid crystalline compounds selected to achieve a predetermined temperature indication accuracy within the temperature range 25° C. to 45° C. 16. A method of monitoring a wound comprising applying to the wound a dressing that includes a fabric having a matrix of thermochromic composite sensor fibres according to claim 1 , which fibres indicate localised body temperature changes adjacent the dressing by visibly exhibiting a change in colour or colour gradient. 17. A method according to claim 16 wherein the composite sensor fibres of the fabric are selected whereby localised body temperature changes adjacent to the dressing within the range 25° C. to 45° C. are visibly exhibited by a change in colour or colour gradient. 18. A method according to claim 17 , wherein the thermochromic liquid crystalline material of the composite sensor fibres is a mixture of liquid crystalline compounds selected to achieve a predetermined temperature indication accuracy within the temperature range 25° C. to 45° C. 19. A method according to claim 18 wherein said mixture of liquid crystalline compounds is a mixture of cholesterol based compounds.
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