Deep ultraviolet LED and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-9806229-B2
Application number	US-201414426328-A
Country	US
Kind code	B2
Filing date	Oct 24, 2014
Priority date	Mar 6, 2014
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

A deep ultraviolet LED with a design wavelength of λ is provided that includes a reflecting electrode layer, a metal layer, a p-type GaN contact layer, and a p-type AlGaN layer that are sequentially stacked from a side opposite to a substrate, the p-type AlGaN layer being transparent to light with the wavelength of λ; and a photonic crystal periodic structure that penetrates at least the p-type GaN contact layer and the p-type AlGaN layer. The photonic crystal periodic structure has a photonic band gap.

First claim

The invention claimed is:

1. A deep ultraviolet LED with a design wavelength of λ, comprising:
a reflecting electrode layer, a metal layer, a p-type GaN contact layer, and a p-type AlGaN layer that are sequentially stacked from a side opposite to a substrate, the p-type AlGaN layer being transparent to light with the wavelength of λ; and
a reflective-type photonic crystal periodic structure with a plurality of holes having a radius of R provided within the p-type AlGaN layer, and also in a range including at least an interface between the p-type GaN contact layer and the p-type AlGaN layer in a thickness direction to the substrate,
wherein the reflective-type photonic crystal periodic structure has a photonic band gap open to TE polarized components, and satisfies Bragg scattering conditions (m×λ/n av =2a), with m being in a range of 1<m<5, the wavelength λ, a period a, and an average refractive index n av of the reflective-type photonic crystal periodic structure, wherein R/a includes a value with a maximum photonic band gap, and a depth h of the holes is greater than or equal to the period a.

2. The deep ultraviolet LED according to claim 1 , wherein the reflective-type photonic crystal periodic structure is provided in the reflecting electrode layer and the metal layer.

3. The deep ultraviolet LED according to claim 1 , wherein the depth h of the photonic crystal periodic structure is greater than or equal to a thickness of the p-type AlGaN layer, and is less than or equal to a total thickness of the p-type GaN contact layer and the p-type AlGaN layer.

4. The deep ultraviolet LED according to claim 1 , further comprising, in addition to the p-type AlGaN layer, another p-type AlGaN layer on the substrate side, the other p-type AlGaN layer having a higher Al content than the p-type AlGaN layer.

5. The deep ultraviolet LED according to claim 1 , wherein the reflective-type photonic crystal periodic structure is formed using an imprint technology of a nanoimprinting lithography method.

6. The deep ultraviolet LED according to claim 5 , wherein the reflective-type photonic crystal periodic structure is formed by dry etching using a bi-layer resist method that uses resist with high fluidity and resist with high etching selectivity.

7. A method for manufacturing a deep ultraviolet LED, comprising:
preparing a substrate and a stacked structure with a design wavelength of λ, the stacked structure including a reflecting electrode layer, a metal layer, a p-type GaN contact layer, and a p-type AlGaN layer that are sequentially stacked from a side opposite to the substrate towards the substrate, the p-type AlGaN layer being transparent to light with the wavelength of λ;
preparing a mold;
forming a resist layer on the stacked structure and imprinting a structure of the mold to the resist layer; and
forming a reflective-type photonic crystal periodic structure by sequentially etching the stacked structure with the resist layer as a mask to form the reflective-type photonic crystal periodic structure within the p-type AlGaN layer, and also in a range including at least an interface between the p-type GaN contact layer and the p-type AlGaN layer along a thickness direction to the substrate,
wherein the reflective-type photonic crystal periodic structure is formed to have a photonic band gap open to TE polarized components, and to satisfy Bragg scattering conditions (m×λ/n av =2a), with m being in a range of 1<m<5, the wavelength λ, a period a, and an average refractive index n av of the p-type AlGaN layer and air in the holes, wherein R/a includes a value with a maximum photonic band gap, and a depth h of the holes is greater than or equal to the period a.

8. The method for manufacturing a deep ultraviolet LED according to claim 7 ,
wherein the step of forming the resist layer on the stacked structure and imprinting the structure of the mold to the resist layer comprises:
dry etching the stacked structure with a bi-layer resist having a first resist layer with high fluidity and a second resist layer with high etching selectivity with respect to the first resist layer, and
imprinting the structure of the mold to the first resist layer by nanoimprinting lithography, and

wherein the step of forming the reflective-type photonic crystal periodic structure by sequentially etching the stacked structure with the resist layer as a mask comprises:
etching the first resist layer and the second resist layer until the second resist layer is exposed, and also etching a pattern projection portion of the first resist layer, and
sequentially etching the stacked structure with the second resist layer as a mask.

Assignees

• Marubun Co Ltd
• Toshiba Machine Co Ltd
• Riken
• Ulvac Inc
• Tokyo Ohka Kogyo Co Ltd

Inventors

• Kashima Yukio
• Matsuura Eriko
• Kokubo Mitsunori
• Tashiro Takaharu
• Ookawa Takafumi
• Hirayama Hideki
• Kamimura Ryuichiro
• Osada Yamato
• Shimatani Satoshi

Classifications

• H01L33/32

  Electricity · mapped topic

• H01L33/0025

  Electricity · mapped topic

• H01L33/06

  Electricity · mapped topic

• H01L33/10 Primary

  Electricity · mapped topic

• H01L33/405

  Electricity · mapped topic