High mobility transistors

Patent metadata

Field	Value
Publication number	US-9805986-B2
Application number	US-201615079414-A
Country	US
Kind code	B2
Filing date	Mar 24, 2016
Priority date	Dec 28, 2013
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

An integrated circuit containing an n-channel finFET and a p-channel finFET has a dielectric layer over a silicon substrate. The fins of the finFETs have semiconductor materials with higher mobilities than silicon. A fin of the n-channel finFET is on a first silicon-germanium buffer in a first trench through the dielectric layer on the substrate. A fin of the p-channel finFET is on a second silicon-germanium buffer in a second trench through the dielectric layer on the substrate. The fins extend at least 10 nanometers above the dielectric layer. The fins are formed by epitaxial growth on the silicon-germanium buffers in the trenches in the dielectric layer, followed by CMP planarization down to the dielectric layer. The dielectric layer is recessed to expose the fins. The fins may be formed concurrently or separately.

First claim

What is claimed is:

1. A method of forming an integrated circuit, comprising the steps:
providing a substrate comprising silicon, said substrate having a first region of a first conductivity type in an area for a first polarity finFET and having a second region of a second, opposite, conductivity type in an area for a second, opposite, polarity finFET;
forming a dielectric layer over said substrate;
concurrently forming a first trench in said dielectric layer down to said substrate in said area for said first polarity finFET and a second trench in said dielectric layer down to said substrate in said area for said second polarity finFET;
concurrently forming a first silicon germanium buffer on said substrate in said first trench and a second silicon germanium buffer on said substrate in said second trench;
concurrently forming a first polarity fin of said first polarity finFET on said first silicon germanium buffer and a second polarity fin of said second polarity finFET on said second silicon germanium buffer, so that said first polarity fin and said second polarity fin extend above a top surface of said dielectric layer;
forming a cap layer of dielectric material over said dielectric layer so as to cover said first polarity fin and said second polarity fin;
removing said cap layer by a CMP process so as to planarize said first polarity fin and said second polarity fin down to said dielectric layer; and
recessing said dielectric layer so that said first polarity fin and said second polarity fin extend at least 10 nanometers above said dielectric layer.

2. The method of claim 1 , wherein said first silicon germanium buffer and said second silicon germanium buffer are formed to have germanium atomic fractions at said substrate of less than 20 percent and germanium atomic fractions at top surfaces of said first silicon germanium buffer and said second silicon germanium buffer over 80 percent.

3. The method of claim 1 , wherein said first polarity fin and said second polarity fin comprise germanium.

4. The method of claim 1 , wherein said first polarity fin comprises gallium arsenide.

5. The method of claim 1 , wherein said first polarity fin comprises indium gallium arsenide.

6. The method of claim 5 , wherein said first polarity fin has an indium to gallium ratio of 50:50 to 57:43.

7. The method of claim 1 , wherein said first polarity fin comprises indium phosphide.

8. A method of forming an integrated circuit, comprising the steps:
providing a substrate comprising silicon, said substrate having a first region of a first conductivity type in an area for a n-channel finFET and having a second region of a second, opposite, conductivity type in an area for a p-channel finFET;
forming a dielectric layer over said substrate;
concurrently forming a first trench in said dielectric layer down to said substrate in said area for said n-channel finFET and a second trench in said dielectric layer down to said substrate in said area for said p-channel finFET;
concurrently forming a first silicon germanium buffer on said substrate in said first trench and a second silicon germanium buffer on said substrate in said second trench;
concurrently forming a n-channel fin of said n-channel finFET directly on said first silicon germanium buffer and a p-channel fin of said p-channel finFET directly on said second silicon germanium buffer, so that said n-channel fin and said p-channel fin extend above a top surface of said dielectric layer;
forming a cap layer of dielectric material over said dielectric layer so as to cover said n-channel fin and said p-channel fin;
removing said cap layer by a CMP process so as to planarize said n-channel fin and said p-channel fin down to said dielectric layer; and
recessing said dielectric layer so that said n-channel fin and said p-channel fin extend at least 10 nanometers above said dielectric layer.

9. The method of claim 8 , wherein said first silicon germanium buffer and said second silicon germanium buffer are formed to have germanium atomic fractions at said substrate of less than 20 percent and germanium atomic fractions at top surfaces of said first silicon germanium buffer and said second silicon germanium buffer over 80 percent.

10. The method of claim 8 , wherein said n-channel fin and said p-channel fin comprise germanium.

11. The method of claim 8 , wherein said n-channel fin comprises gallium arsenide.

12. The method of claim 8 , wherein said n-channel fin comprises indium gallium arsenide.

13. The method of claim 12 , wherein said n-channel fin has an indium to gallium ratio of 50:50 to 57:43.

14. The method of claim 8 , wherein said n-channel fin comprises indium phosphide.

Assignees

• Texas Instruments Inc

Inventors

• Niimi Hiroaki
• Mehrotra Manoj
• Wise Rick L

Classifications

• H01L29/161

  Electricity · mapped topic

• H01L21/823878

  Electricity · mapped topic

• H01L21/823821

  Electricity · mapped topic

• H01L21/823807 Primary

  Electricity · mapped topic

• H01L29/1054

  Electricity · mapped topic