Plasma processing apparatus

Patent metadata

Field	Value
Publication number	US-9805916-B2
Application number	US-201414531014-A
Country	US
Kind code	B2
Filing date	Nov 3, 2014
Priority date	Nov 5, 2013
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

In a plasma processing apparatus, target values for feedback control to be applied to a progressive wave power PF as control parameters, i.e., control instruction values C on and C off are switched during a pulse-on period T on and a pulse-off period T off in each cycle of a modulation pulse, respectively. That is, a first feedback control for making the progressive wave power PF approximate to a first control instruction value C on is performed during the pulse-on period T on , whereas a second feedback control for making the progressive wave power PF approximate to a second control instruction value C off is performed during the pulse-off period T off .

First claim

We claim:

1. A plasma processing apparatus of generating plasma by high frequency discharge of a processing gas within a decompression processing vessel that accommodates therein a processing target object, which is loaded into and unloaded from the processing vessel, and performing a process on the processing target object within the processing vessel under the plasma, the plasma processing apparatus comprising:
a first high frequency power supply configured to output a first high frequency power;
a first high frequency transmission line configured to transmit the first high frequency power outputted from the first high frequency power supply to a first electrode provided within or in the vicinity of the processing vessel;
a second high frequency power supply configured to output a second high frequency power;
a second high frequency transmission line configured to transmit the second high frequency power outputted from the second high frequency power supply to the first electrode or a second electrode provided within or in the vicinity of the processing vessel; and
a power modulation unit configured to pulse-modulate an output of the second high frequency power supply with a pulse such that a first period during which the second high frequency power is turned on or has a first level and a second period during which the second high frequency power is turned off or has a second level lower than the first level are repeated alternately at a regular frequency,
wherein the first high frequency power supply comprises:
a RF power monitor configured to detect a progressive wave power propagating on the first high frequency transmission line from the first high frequency power supply toward the first electrode in a forward direction and a reflection wave power propagating on the first high frequency transmission line from the first electrode toward the first high frequency power supply in a backward direction, and configured to generate a progressive wave power detection signal indicating the progressive wave power and a reflection wave power detection signal indicating the reflection wave power;
a load power measurement unit configured to calculate a measurement value of a load power applied to a load including the plasma from the progressive wave power detection signal and the reflection wave power detection signal obtained from the RF monitor; and
a high frequency power output control unit configured to perform feedback controls on the progressive wave power during the first period and the second period, independently and respectively, in each cycle of the pulse such that the measurement value of the load power obtained from the load power measurement unit is equal to or approximate to a preset load power set value.

2. The plasma processing apparatus of claim 1 ,
wherein the high frequency power output control unit comprises:
a first control-instruction-value generating unit configured to generate a first control instruction value for the feedback control to be applied to the progressive wave power during the first period based on the load power measurement value obtained from the load power measurement unit and the load power set value;
a second control-instruction-value generating unit configured to generate a second control instruction value for the feedback control to be applied to the progressive wave power during the second period based on the load power measurement value obtained from the load power measurement unit and the load power set value; and
a comparator configured to generate, in each cycle of the pulse, a first comparison error during the first period by comparing the progressive wave power detection signal from the RF power monitor with the first control instruction value from the first control-instruction-value generating unit, and configured to generate a second comparison error during the second period by comparing the progressive wave power detection signal from the RF power monitor with the second control instruction value from the second control-instruction-value generating unit,
wherein, in each cycle of the pulse, an output of the first high frequency power supply is controlled such that the first comparison error approximates to zero (0) during the first period and the second comparison error approximates to zero (0) during the second period.

3. The plasma processing apparatus of claim 2 ,
wherein the first control-instruction-value generating unit is configured to receive the load power measurement value, which is obtained from the load power measurement unit, during a first monitoring time set within the first period in each cycle of the pulse, and configured to generate the first control instruction value based on a deviation between the load power measurement value and the load power set value.

4. The plasma processing apparatus of claim 2 ,
wherein the first control-instruction-value generating unit comprises:
a first cycle-average-value calculating circuit configured to sample load power measurement values, which are obtained from the load power measurement unit, with a preset sampling frequency during a first monitoring time set within the first period in each cycle of the pulse, and configured to calculate an average value of the load power measurement values;
a first moving-average-value calculating circuit configured to calculate a moving average value of the load power measurement values during the first period based on the average value of the load power measurement values for each cycle of the pulse obtained from the first cycle-average-value calculating circuit; and
a first control-instruction-value calculating circuit configured to generate the first control instruction value based on a comparison error between the moving average value of the load power measurement values during the first period, which is obtained from the first moving-average-value calculating circuit, and the load power set value.

5. The plasma processing apparatus of claim 2 ,
wherein the second control-instruction-value generating unit is configured to receive the load power measurement value, which is obtained from the load power measurement unit, during a second monitoring time set within the second period in each cycle of the pulse, and configured to generate the second control instruction value based on a deviation between the load power measurement value and the load power set value.

6. The plasma processing apparatus of claim 2 ,
wherein the second control-instruction-value generating unit comprises:
a second cycle-average-value calculating circuit configured to sample load power measurement values, which are obtained from the load power measurement unit, with a preset sampling frequency during a second monitoring time set within the second period in each cycle of the pulse, and configured to calculate an average value of the load power measurement values;
a second moving-average-value calculating circuit configured to calculate a moving average value of the load power measurement values during the second period based on the average value of the load power measurement values for each cycle of the pulse obtained from second cycle-average-value calculating circuit; and
a second control-instruction-value calculating circuit configured to generate the second control instruction value based on a comparison error between the moving average value of the load power measurement values during the second period, which is obtained from the second moving-average-value calculating circuit, and the load power set value.

7. The plasma processing apparatus of claim 2 ,
wherein the first high frequency power supply comprises:
a high frequency oscillator configured to generate a fundamental wave of the first high frequency power; and
a power amplifier config

Assignees

• Tokyo Electron Ltd
• Daihen Corp

Inventors

• Konno Hiroo
• Kadooka Shunsuke

Classifications

• H01J37/32165

  Plural frequencies · CPC title

• H01J37/32146 Primary

  Amplitude modulation, includes pulsing · CPC title

• H01J37/32926

  Software, data control or modelling · CPC title

• H01J37/32091

  the radio frequency energy being capacitively coupled to the plasma · CPC title

• H01J37/32183

  Matching circuits · CPC title