Mirror support module, a kit and a scanning electron microscope

Patent metadata

Field	Value
Publication number	US-9805906-B1
Application number	US-201615271100-A
Country	US
Kind code	B1
Filing date	Sep 20, 2016
Priority date	Sep 20, 2016
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

A mirror support module having a body that includes an internal portion surrounding an inner space, an external portion, an aperture formed in the body and an intermediate region that extends between a segment of the internal portion and the aperture. When the intermediate region is subjected to a force directed in a first direction, the intermediate region can be moved in the first direction towards the aperture to reduce an area of the aperture while the external portion remains stable regardless of movement of the intermediate region.

First claim

We claim:

1. A mirror support module for supporting a mirror, the mirror support module comprising:
a body that comprises an internal portion that surrounds an inner space, an external portion, a first aperture formed in the body, and a first intermediate region that extends between a first segment of the internal portion and the first aperture;
wherein the first intermediate region is configured to move at a first direction and towards the first aperture thereby reducing an area of the first aperture, when the first intermediate region is subjected to a force that is directed to the first direction; and
wherein the external portion maintains stable regardless a movement of the first intermediate region.

2. The mirror support module according to claim 1 wherein the body comprises a nickel-cobalt ferrous alloy.

3. The mirror module according to claim 1 wherein a ratio between a magnitude of the movement of the first intermediate region towards the first aperture and a movement of the external portion at the first direction exceeds 100.

4. The mirror support module according to claim 1 wherein the first segment of the internal portion protrudes towards the inner space.

5. The mirror support module according to claim 1 further comprising:
apertures that are positioned at different angles in relation to a center of the inner space; and
intermediate regions that extends between segments of the internal portion and the apertures; and
wherein the external portion maintains stable regardless a movement of any of the intermediate regions.

6. The mirror support module according to claim 5 wherein the apertures are arranged in a radially symmetrical manner about the center of the inner space.

7. The mirror support module according to claim 5 the segments of internal portion protrude towards the inner space.

8. The mirror support module according to claim 1 wherein the body comprises a nickel iron alloy.

9. The mirror support module according to claim 1 further comprising a first interface for attaching the mirror to the mirror support module.

10. The mirror support module according to claim 9 further comprising a second interface for attaching another mirror to the mirror support module; wherein the mirror and the other mirror are oriented to each other.

11. A kit comprising:
a mirror;
a mirror support module having a body that comprises: an internal portion that surrounds an inner space, an external portion, a first aperture that is formed in the body, and a first intermediate region that extends between a first segment of the internal portion and the first aperture; and
an interface for attaching the mirror to the mirror support module;
wherein the first intermediate region is configured to move at a first direction and towards the first aperture thereby reducing an area of the first aperture, when the first intermediate region is subjected to a force that is directed to the first direction; and
wherein the external portion maintains stable regardless a movement of the first intermediate region.

12. The kit according to claim 11 wherein the base comprises a nickel-cobalt ferrous alloy.

13. The kit according to claim 11 wherein a ratio between a magnitude of the movement of the first intermediate region towards the first aperture and a movement of the external portion at the first direction exceeds 100.

14. The kit according to claim 11 wherein the first segment of the internal portion protrudes towards the inner space.

15. A scanning electron microscope, comprising:
a scanning electron microscope column that is configured to generate a primary electron beam;
a mirror support module including a body that comprises: an internal portion that surrounds an inner space in which the scanning electron microscope column is positioned, an external portion, a first aperture that is formed in the body, and a first intermediate region that extends between a first segment of the internal portion and the first aperture; and
an interface for attaching a mirror to the mirror support module;
wherein the first intermediate region is configured to move at a first direction and towards the first aperture thereby reducing an area of the first aperture, when the first intermediate region is subjected to a force that is directed to the first direction due to a heating of the scanning electron microscope column; and
wherein the external portion maintains stable regardless a movement of the first intermediate region.

16. The scanning electron microscope according to claim 15 wherein the base comprises a nickel-cobalt ferrous alloy.

17. The scanning electron microscope according to claim 15 wherein a ratio between a magnitude of the movement of the first intermediate region towards the first aperture and a movement of the external portion at the first direction exceeds 100.

18. The scanning electron microscope according to claim 15 wherein the first segment of the internal portion protrudes towards the inner space.

Assignees

• Applied Materials Israel Ltd
• Applied Materials Israel Ltd

Inventors

• Vinnitsky Efim
• Nackash Samuel Ives
• Mizrahi Shmuel Barak
• Schlimoff Natan

Classifications

• H01J37/147 Primary

  Arrangements for directing or deflecting the discharge along a desired path ({H01J37/045 take precedence;} lenses H01J37/10) · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/20285

  computer-controlled · CPC title

• G01B11/028

  by measuring lateral position of a boundary of the object (G01B11/022, G01B11/024, G01B11/04 take precedence) · CPC title

• G01B11/002

  for measuring two or more coordinates · CPC title