Sample base, charged particle beam device and sample observation method

Patent metadata

Field	Value
Publication number	US-9508527-B2
Application number	US-201314646159-A
Country	US
Kind code	B2
Filing date	Nov 26, 2013
Priority date	Nov 26, 2012
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform.

First claim

The invention claimed is:

1. A sample base, which is mounted with a sample to be observed by irradiating a charged particle beam, comprising
a light-emitting member that converts electrical energy to visible light and which forms at least a portion of the sample base, and emits light by charged particles transmitted through or scattered inside the sample,
wherein the sample is placed directly or via a predetermined member on the light-emitting member, and
wherein infrared light, ultraviolet light, or visible light of a specific or all wavelength ranges can pass through at least between a portion on which the sample is placed and a surface opposite to the portion on which the sample is placed in the sample base.

2. The sample base according to claim 1 ,
wherein the sample base can be used as a sample base for a transmission optical microscope.

3. The sample base according to claim 2 ,
wherein the sample can be observed by the transmission optical microscope while being placed on the sample base.

4. The sample base according to claim 1 ,
wherein the sample base is provided with a base for supporting the light-emitting member, and
wherein infrared light, ultraviolet light, or visible light of a specific or all wavelength ranges can pass through the base.

5. The sample base according to claim 4 ,
wherein the sample base has a side wall on a peripheral edge portion of the base.

6. The sample base according to claim 4 ,
wherein the portion on which the sample is placed and a surface of the base on which the sample is mounted are at the same height.

7. The sample base according to claim 4 ,
wherein all of a surface of the base on which the sample is mounted is the light-emitting member.

8. The sample base according to claim 4 ,
wherein a plurality of light-emitting members are arranged on the base.

9. The sample base according to claim 4 ,
wherein a distance between a surface of the light-emitting member on which the sample is placed and a surface of the base on which the sample is mounted is equal to several hundred micrometers or less.

10. The sample base according to claim 4 ,
wherein the light-emitting member has the same thickness as that of the base.

11. The sample base according to claim 4 ,
wherein there is a portion on which information of the sample can be written on the base or the light-emitting member.

12. The sample base according to claim 1 ,
wherein the predetermined member is provided between the sample and the light-emitting member, and has a thickness through which at least a part of the charged particle beam can be transmitted.

13. The sample base according to claim 1 , further comprising:
two cylindrical vessels having openings on upper and lower sides thereof, the two cylindrical vessels being in direct contact with the sample base, wherein
a thickness of the sample base in a region closest to the light-emitting element is one half of a thickness at distal ends of the sample base in regions farthest from the light-emitting element.

14. A charged particle beam device comprising:
a charged particle optical column for irradiating a sample with a primary charged particle beam;
a vacuum pump for vacuum-evacuating an inside of the charged particle optical column;
a sample base that is in direct contact with the light-emitting member, the light-emitting member being detachable from the sample base; and
a light conversion detector for converting emitted light, which passes through at least between a portion on which the sample is placed and a surface opposite to the portion on which the sample is placed in the sample base, from the light-emitting member to an electrical signal.

15. The charged particle beam device according to claim 14 , further comprising
a detachable diaphragm which is disposed such that a space where the sample is mounted and the charged particle optical column are spaced from each other, and allows the primary charged particle beam to be transmitted or pass therethrough,
wherein the sample and the sample base including the light-emitting member are maintained in an atmosphere of pressure condition different from inside the charged particle optical column, and
wherein the light-emitting member is mounted on an opposite side of the diaphragm with respect to the sample.

16. The charged particle beam device according to claim 14 , further comprising
an optical microscope which is arranged coaxially with the charged particle optical column, and forms an optical microscope image by infrared light, ultraviolet light, or visible light of a specific wavelength or all wavelength ranges passing through at least between the portion on which the sample is placed and the surface opposite to the portion on which the sample is placed in the sample base.

17. A sample observation method for observing a sample by irradiating a charged particle beam in a charged particle microscope, comprising following steps:
a step of irradiating the charged particle beam to the sample placed directly on a light-emitting member that is in direct contact with and that forms at least a part of a sample base and emits light by charged particles passed through or scattered inside the sample;
a step of obtaining a charged particle microscope image by detecting emitted light of the light-emitting member; and
a step of obtaining an optical microscope image by an optical microscope while the sample is placed on the sample base.

Assignees

• Hitachi High Tech Corp

Inventors

• Ominami Yusuke
• Ohshima Takashi
• Ito Sukehiro

Classifications

• H01J2237/24475

  Scattered electron detectors · CPC title

• H01J37/16 Primary

  Vessels; Containers · CPC title

• H01J37/228

  whereby illumination or light collection take place in the same area of the discharge · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J2237/2003

  Environmental cells · CPC title