Processing assembly for semiconductor workpiece and methods of processing same

Patent metadata

Field	Value
Publication number	US-9799537-B2
Application number	US-96037810-A
Country	US
Kind code	B2
Filing date	Dec 3, 2010
Priority date	Dec 3, 2010
Publication date	Oct 24, 2017
Grant date	Oct 24, 2017

Abstract

A processing assembly for a semiconductor workpiece generally includes a rotor assembly capable of spinning a workpiece, a chemistry delivery assembly for delivering chemistry to the workpiece, and a chemistry collection assembly for collecting spent chemistry from the workpiece. The chemistry collection assembly may include a weir that is configured to spin with the rotor assembly. A method of processing a semiconductor workpiece is also provided.

First claim

The embodiments of the disclosure in which an exclusive property or privilege is claimed are defined as follows:

1. A processing assembly for a semiconductor workpiece, the processing assembly comprising:
(a) a processing chamber;
(b) a rotor assembly configured for spinning a workpiece within a spinning wall of a processing chamber;
(c) a chemistry delivering assembly for delivering chemistry to the workpiece;
(d) a chemistry collection assembly for collecting spent chemistry and exhaust from the workpiece in first and second axial positions, wherein the chemistry collection assembly includes a weir and the spinning wall, both configured to spin with the rotor assembly; and
(e) wherein the rotor assembly comprises a first rotor comprising a first workpiece receiving portion in the first axial position within the spinning wall of the processing chamber to receive and hold the workpiece during rotation of the first rotor for processing the workpiece, the first workpiece receiving portion including a first set of fixed standoffs for receiving the workpiece, and a second rotor comprising a second workpiece receiving portion in the second axial position within the spinning wall of the processing chamber different from the first axial position to receive and hold the workpiece during rotation of the second rotor for processing the workpiece, the second workpiece receiving portion including a second set of fixed standoffs for receiving the workpiece, and wherein the rotor assembly is adjustable to change the axial spacing between the first and the second workpiece receiving portions to selectively shift the workpiece from the first workpiece receiving portion to the second workpiece receiving portion, and wherein the workpiece does not contact the second workpiece receiving portion when in the first axial position and the workpiece does not contact the first workpiece receiving portion when in the second axial position, wherein the first axial position is for cleaning and/or etching the back surface of the workpiece and wherein the second axial position is for cleaning and/or etching the bevel and top surface of the workpiece, wherein the chemistry collection assembly weir is a single weir for collecting chemistry from the workpiece when the workpiece is in the first axial position and the second axial position, and wherein the rotor assembly includes a single vortex cavity configured for maintaining the workpiece on the first and the second workpiece receiving portions.

2. The processing assembly of claim 1 , wherein the first rotor is a chuck rotor and the second rotor is a centering rotor.

3. The processing assembly of claim 1 , wherein the first and the second rotors are capable of nesting with each other.

4. The processing assembly of claim 1 , wherein the rotor assembly includes a transmission assembly including a polymer coupling for transmitting torque, said coupling expandable in length to accommodate the change in axial spacing between the first and the second workpiece receiving portions of the first and the second rotors.

5. The processing assembly of claim 4 , wherein the polymer coupling includes a foldable bellows construction.

6. The processing assembly of claim 1 , wherein the rotor assembly is capable of adjusting to at least first and second positions.

7. The processing assembly of claim 6 , wherein the rotor assembly is capable of adjusting to a third position.

8. The processing assembly of claim 1 , wherein the weir is fixedly attached to the second rotor.

9. The processing assembly of claim 1 , further comprising an actuating assembly operably coupled to one or both of the first and the second rotors for axial movement of one or both of the first and the second rotors.

10. A processing assembly for a semiconductor workpiece in a processing chamber, the processing assembly comprising:
(a) a rotor assembly capable of spinning a workpiece within a spinning wall of the processing chamber, the rotor assembly including first and second rotors, each for receiving and holding the workpiece during rotation of the first and the second rotors, respectively, in the processing chamber, the first rotor having a first workpiece receiving portion positioned in a first axial position within the spinning wall of the processing chamber to receive and hold the workpiece during rotation of the first rotor for processing the workpiece, the first workpiece receiving portion including a first set of fixed standoffs for receiving the workpiece, and a second rotor having a second workpiece receiving portion positioned in a second axial position within the spinning wall of the processing chamber different from the first axial position to receive and hold the workpiece during rotation of the second rotor for processing the workpiece, the second workpiece receiving portion including a second set of fixed standoffs for receiving the workpiece, wherein the workpiece does not contact the second workpiece receiving portion when in the first axial position and the workpiece does not contact the first workpiece receiving portion when in the second axial position, wherein the first rotor is movable to adjust the axial spacing between a first workpiece receiving portion on the first rotor and a second workpiece receiving portion on the second rotor, and wherein the first rotor includes a vortex cavity that creates a pressure differential for forcing the workpiece on the first and the second workpiece receiving portions, and wherein the first axial position is for cleaning and/or etching the back surface of the workpiece and wherein the second axial position is for cleaning and/or etching the bevel and top surface of the workpiece;
(b) a chemistry delivering assembly for delivery chemistry to the workpiece in the first and second axial positions; and
(c) a chemistry collection assembly for collecting spent chemistry from the workpiece, including a weir and the spinning wall, both configured to spin with the rotor assembly, wherein the chemistry collection assembly weir is a single weir for collecting chemistry from the workpiece when the workpiece is in the first axial position and the second axial position.

11. A processing assembly for a semiconductor workpiece, the processing assembly comprising:
(a) a rotor assembly configured for spinning a workpiece within a spinning wall of a processing chamber;
(b) a chemistry delivery assembly for delivering chemistry to the workpiece;
(c) a chemistry collection assembly for collecting spent chemistry and exhaust from the workpiece, wherein the chemistry collection assembly includes a weir and the spinning wall fixedly attached to the second rotor and configured to spin with the second rotor; and
(d) wherein the rotor assembly comprises a first rotor having a first workpiece receiving portion in a first axial position within the spinning wall of the processing chamber configured to receive and hold the workpiece during rotation of the first rotor and delivery of chemistry to the workpiece for processing the workpiece, the first workpiece receiving portion including a first set of fixed standoffs for receiving the workpiece, and a second rotor having a second workpiece receiving portion in a second axial position within the spinning wall of the processing chamber different from the first axial position configured to receive and hold the workpiece during rotation of the second rotor and delivery of chemistry to the workpiece for processing the workpiece, the second workpiece receiving portion including a second set of fixed standoffs for receiving the workpiece, and wherein the rotor assembly is adjustable to change the axial spacing between the first and the second rotors to selectively

Assignees

• Rye Jason
• Hanson Kyle M
• Applied Materials Inc

Inventors

• Rye Jason
• Hanson Kyle M

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P50/242 Primary

  of Group IV materials · CPC title