Encapsulated bulk acoustic wave (BAW) resonator device

Patent metadata

Field	Value
Publication number	US-9793877-B2
Application number	US-201314108668-A
Country	US
Kind code	B2
Filing date	Dec 17, 2013
Priority date	Dec 17, 2013
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

An electronic package includes a die mounted on a first substrate; a second substrate disposed over the first substrate; a pillar wall extending between a surface of the die and an opposing surface of the second substrate to provide separation between the die and the second substrate, the pillar wall extending about a perimeter bounding the die and enclosing a cavity between the first and second substrates; and an encapsulating layer disposed over the first and second substrates and around the pillar wall. Substantially none of the encapsulating layer ingresses into the cavity.

First claim

We claim:

1. An electronic package, comprising:
a first substrate comprising a die;
a second substrate disposed beneath the first substrate;
a pillar wall comprising a plurality of pillars, each of the pillars extending between a surface of the die and an opposing surface of the second substrate to provide separation between the die and the second substrate, the pillar wall extending around a perimeter bounding the die and enclosing a cavity between the first and second substrates;
an encapsulating layer disposed over the first and second substrates and around the pillar wall, wherein substantially none of the encapsulating layer ingresses into the cavity; and
a sealing layer disposed over a surface of the first substrate and die and between the first substrate and the cavity, the sealing layer not being disposed between the surface of the first substrate and each one of the plurality of pillars.

2. The electronic package of claim 1 , wherein the second substrate comprises a printed circuit board.

3. The electronic package of claim 1 , wherein the pillar wall comprises a metal or a metal alloy.

4. The electronic package of claim 1 , further comprising a pillar in electrical contact with a device on the die and with a contact on the second substrate.

5. The electronic package as claimed in claim 2 , wherein the die comprises a bulk acoustic wave (BAW) resonator.

6. The electronic package as claimed in claim 5 , wherein the BAW resonator comprises a film bulk acoustic wave resonator (FBAR).

7. The electronic package as claimed in claim 5 , wherein the BAW resonator comprises a solidly mounted acoustic wave resonator (SMR).

8. The electronic package of claim 1 , further comprising a mold compound disposed over the second substrate and adjacent to an outer portion of the pillar wall and over a portion of the first substrate.

9. The electronic package of claim 8 , wherein the mold compound is either an epoxy or a polyimide.

10. A micro-electromechanical system (MEMS) package, comprising: a first substrate comprising a die; a second substrate disposed beneath the first substrate; a pillar wall comprising a plurality of pillars, each of the pillars extending from a surface of the first substrate near but not contacting an opposing surface of the second substrate leaving a separation between an end of the pillar wall and the second substrate, the pillar wall extending about a perimeter bounding the die and enclosing a cavity between the first and second substrates; a mold compound disposed over the second substrate and adjacent to an outer portion of the pillar wall, over a portion of the first substrate, and substantially filling the separation between an end of the pillar wall and the first substrate; and a sealing layer disposed over a surface of the first substrate and die, and between the first substrate and the cavity, the sealing layer not being disposed between the surface of the first substrate and each of the plurality of pillars.

11. The MEMS package of claim 10 , wherein the second substrate comprises a printed circuit board.

12. The MEMS package of claim 10 , wherein the pillar wall comprises a metal or a metal alloy.

13. The MEMS package of claim 10 , further comprising a pillar in electrical contact with a device on the die and with a contact on the second substrate.

14. The MEMS package as claimed in claim 10 , wherein the die comprises a bulk acoustic wave (BAW) resonator.

15. An electronic package, comprising:
a first substrate comprising a die;
a second substrate disposed beneath the first substrate; and
a plurality of pillars extending between a surface of the first substrate and an opposing surface of the second substrate to provide separation between the die and the second substrate;
a polymer layer disposed adjacent to each of the plurality of pillars such that a cavity is created between the first and second substrates by the polymer layer and the plurality of pillars;
an encapsulating layer disposed over the first and second substrates and around the plurality of pillars and polymer layer, wherein substantially none of the encapsulating layer ingresses into the cavity; and
a sealing layer disposed over a surface of the first substrate and die and between the first substrate and the cavity, the sealing layer not being disposed between the surface of the first substrate and each of the plurality of pillars.

16. The electronic package of claim 15 , wherein the second substrate comprises a printed circuit board.

17. The electronic package of claim 15 , wherein each of the plurality of pillars comprises a metal or a metal alloy.

18. The electronic package of claim 15 , wherein the die comprises a bulk acoustic wave (BAW) resonator.

19. The electronic package of claim 15 , wherein the polymer layer is not disposed over an upper surface of the first substrate.

Assignees

• Avago Technologies General Ip

Inventors

• Martin Steve
• Buccafusca Osvaldo

Classifications

• H03H2009/241

  Bulk-mode MEMS resonators · CPC title

• H03H9/2405 Primary

  of microelectro-mechanical resonators · CPC title

• H03H9/17

  having a single resonator (crystal tuning forks H03H9/21) · CPC title

• H03H9/1007 Primary

  for bulk acoustic wave [BAW] devices · CPC title