Sensor apparatus for analyzing a gas mixture in a process chamber

Patent metadata

Field	Value
Publication number	US-9791426-B2
Application number	US-201514749682-A
Country	US
Kind code	B2
Filing date	Jun 25, 2015
Priority date	Jul 2, 2014
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

A sensor apparatus for analyzing a gas in a process chamber, having a housing, a gas sensor for analyzing at least a part of the gas, the gas sensor being arranged at a determined position in the housing, a gas feed for connecting the housing to the process chamber to feed the part of the gas from the process chamber into the housing and to the determined position, and a gas discharge for discharging the gas from the housing, wherein the gas feed and the gas discharge are configured as tubes lying inside one another, characterized by a closure cap at the combustion chamber-side end of the tubes lying inside one another, the closure cap including an even number of at least four openings with the same area, which are connected alternately as a gas inlet and a gas outlet to the tubes lying inside one another is provided.

First claim

The invention claimed is:

1. A sensor apparatus for analyzing a gas in a process chamber, comprising:
a housing;
a gas sensor for analyzing at least a part of the gas, the gas sensor being arranged at a determined position in the housing;
a gas feed for connecting the housing to the process chamber to feed the part of the gas from the process chamber into the housing and to the determined position;
a gas discharge for discharging the gas from the housing, wherein the gas feed and the gas discharge are configured as tubes lying inside one another; and
a closure cap at a combustion chamber-side end of the tubes lying inside one another, the closure cap comprising an even number of at least four openings with a same area, which are connected alternately as a gas inlet and a gas outlet to the tubes lying inside one another.

2. The sensor apparatus as claimed claim 1 , wherein the at least four openings are circular.

3. The sensor apparatus as claimed in claim 1 , wherein the at least four openings are arranged in a circle.

4. The sensor apparatus as claimed in claim 1 , wherein the least four openings amounts to precisely twelve openings.

5. The sensor apparatus as claimed in claim 1 , wherein a cylindrical sleeve is arranged between the closure cap and the tubes lying inside one another, the cylindrical sleeve alternatingly has external slits and bores for alternate connection of the at least four openings to the tubes lying inside one another.

6. The sensor apparatus as claimed in claim 1 , wherein the tubes lying inside one another are arranged coaxially.

7. The sensor apparatus as claimed in claim 1 , wherein the gas sensor is a semiconductor-based gas sensor.

8. A combustion chamber of a power station, comprising:
a combustion chamber wall delimiting the combustion chamber; and
a sensor apparatus as claimed in claim 1 , wherein the gas feed and the gas discharge are arranged passing through the combustion chamber wall.

9. The sensor apparatus as claimed in claim 1 , further comprising a device for generating a gas flow through the housing.

10. The sensor apparatus as claimed in claim 9 , wherein the device for generating a gas flow is a heating device.

11. The sensor apparatus as claimed in claim 9 , wherein the device for generating a gas flow is an acoustic transducer.

12. The sensor apparatus as claimed in claim 9 , wherein the device for generating a gas flow is a piezoelectric sonotrode.

Assignees

• Siemens Ag

Inventors

• Ebelsberger Gerit
• Hackstein Holger
• Magori Erhard

Classifications

• G01N33/004 Primary

  CO or CO2 · CPC title

• G01N1/2226

  Sampling from a closed space, e.g. food package, head space · CPC title

• G01N1/2247

  Sampling from a flowing stream of gas · CPC title

• F23R3/002

  Wall structures (F23R3/02 and F23R3/007 take precedence) · CPC title