Reagent for enhancing generation of chemical species

Patent metadata

Field	Value
Publication number	US-9790241-B2
Application number	US-201414392316-A
Country	US
Kind code	B2
Filing date	Jun 27, 2014
Priority date	Jun 27, 2013
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.

First claim

The invention claimed is:

1. A composition comprising:
a reagent and
a precursor,
wherein the reagent enhances the generation of a chemical species from the Precursor;
wherein the reagent generates an intermediate by a first exposure using a light the wavelength of which is shorter than or equal to 15 nm;
wherein a product is formed from the intermediate by a first elimination and a second elimination;
wherein the product is excited by a second exposure using a light of which wavelength is longer than or equal to 300 nm;
wherein the reagent transmutes into the product acting as a photosensitizer or acts as an acid generation enhancer; and
wherein the reagent has a moiety represented by chemical Formula (I):

where:
each of M1 and M2 in chemical Formula (I) is a carbon atom;
at least one of A, B, and C in chemical Formula (I) is hydrogen and the rest of A, B, and C in chemical Formula (I) is aryl;
at least one of D and E in chemical Formula (I) is hydrogen and the rest of D and E in chemical Formula (I) is an aryl group; and
F is selected from the group consisting of an organosilyl group, an organogermyl group, and an organotin group.

2. The composition of claim 1 , wherein at least one of the aryl groups has at least one electron-donating group.

3. A method for manufacturing a device, the method comprising:
applying a solution of the composition of claim 1 to a substrate such that a coating film containing the composition is formed on the substrate;
exposing the coating film to at least one of a film electromagnetic ray and a first particle ray such that a first portion of the coating film is irradiated with the at least one of the first electromagnetic ray and the first particle ray while a second portion of the coating film is not irradiated with the at least one of the first electromagnetic ray and the first particle ray; and
exposing the coating film to at least one of a second electromagnetic ray and a second particle ray.

Assignees

• Toyo Gosei Co Ltd
• Toyo Goesi Co Ltd
• Univ Osaka

Inventors

• Miyazawa Takashi

Classifications

• C07F7/30

  Germanium compounds · CPC title

• G03F7/0397

  the macromolecular compound having an alicyclic moiety in a side chain · CPC title

• C07F7/22

  Tin compounds · CPC title

• G03F7/0045 Primary

  with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors · CPC title

• G03F7/0046

  with perfluoro compounds, e.g. for dry lithography (G03F7/0048 takes precedence) · CPC title