Substrate treatment method and substrate treatment apparatus

Patent metadata

Field	Value
Publication number	US-9786522-B2
Application number	US-201514659701-A
Country	US
Kind code	B2
Filing date	Mar 17, 2015
Priority date	Mar 17, 2014
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

A substrate treatment method is performed by a substrate treatment apparatus including a substrate holding unit which holds a substrate, and a hot plate which heats the substrate from below. The method includes: a treatment liquid supplying step of locating the hot plate at a retracted position at which the hot plate is retracted below the substrate holding unit and, in this state, supplying a treatment liquid to an upper surface of the substrate held by the substrate holding unit; a protection liquid film forming step of forming a liquid film of a protection liquid to cover an upper surface of the hot plate in the treatment liquid supplying step; and a substrate heating step of heating the substrate by the hot plate with the hot plate being located adjacent to a lower surface of the substrate or in contact with the lower surface of the substrate.

First claim

What is claimed is:

1. A substrate treatment method to be performed by a substrate treatment apparatus including a substrate holding unit which holds a substrate, and a hot plate which heats the substrate from below, the substrate treatment method comprising:
a treatment liquid supplying step of locating the hot plate at a retracted position at which the hot plate is retracted below the substrate holding unit and, in this state, supplying a treatment liquid to an upper surface of the substrate held by the substrate holding unit;
a protection liquid film forming step of forming a liquid film of a protection liquid on an upper surface of the hot plate to cover the upper surface of the hot plate during the treatment liquid supplying step;
a substrate heating step of heating the substrate by the hot plate with the hot plate being located adjacent to a lower surface of the substrate or in contact with the lower surface of the substrate,
wherein the treatment liquid is a liquid containing at least one of sulfuric acid, acetic acid, nitric acid, hydrochloric acid, hydrofluoric acid, ammonia water, hydrogen peroxide water, organic acids, organic alkalis, a surfactant and an anti-corrosion agent, and
wherein the protection liquid is one of pure water, carbonated water, electrolytic ion water, hydrogen water, ozone water, and a hydrochloric acid aqueous solution.

2. The substrate treatment method according to claim 1 , wherein the protection liquid film forming step includes the step of continuously supplying the protection liquid to the upper surface of the hot plate.

3. The substrate treatment method according to claim 1 , wherein the protection liquid film forming step includes the step of spouting the protection liquid from a protection liquid outlet port provided in the upper surface of the hot plate.

4. The substrate treatment method according to claim 1 , wherein the protection liquid film forming step includes the step of spouting the protection liquid to the upper surface of the hot plate from a protection liquid nozzle.

5. The substrate treatment method according to claim 1 ,
wherein the treatment liquid supplying step includes the steps of supplying a chemical liquid or a rinse liquid to the upper surface of the substrate, and supplying an organic solvent to the upper surface of the substrate to replace the chemical liquid or the rinse liquid with a liquid film of the organic solvent on the upper surface of the substrate,
wherein the organic solvent liquid film formed on the upper surface of the substrate in the organic solvent supplying step is heated on the upper surface of the substrate in the substrate heating step.

Assignees

• Screen Holdings Co Ltd

Inventors

• Kobayashi Kenji
• Okutani Manabu

Classifications

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/0434

  mainly by convection · CPC title