Handler and test apparatus

Patent metadata

Field	Value
Publication number	US-9316686-B2
Application number	US-201213671568-A
Country	US
Kind code	B2
Filing date	Nov 8, 2012
Priority date	Jan 13, 2012
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

A handler for conveying a plurality of devices under test to a socket for a test that can reduce a test time includes: a test section provided with the socket; a heat applying section into which a tray having a plurality of devices under test placed on its surface is conveyed and that controls the temperature of the devices under test to a predetermined test temperature and conveys the tray into the test section; a device image capturing section that in the heat applying section, captures images of the respective devices under test by moving with respect to the surface of the tray in two non-parallel directions of a first direction and a second direction; and a position adjusting section that adjusts the positions of the devices under test with respect to the socket based on the images of the devices under test captured by the device image capturing section.

First claim

What is claimed is:

1. A handler for conveying a plurality of devices under test to a socket for a test, comprising:
a test section in which the socket is provided;
a heat applying section into which a tray on a surface of which the plurality of devices under test are placed is conveyed, and that controls a temperature of the plurality of devices under test to a predetermined test temperature and conveys the tray into the test section;
a device image capturing section that in the heat applying section, captures images of respective ones of the devices under test by moving with respect to the surface of the tray in two non-parallel directions, which are a first direction and a second direction; and
a position adjusting section that adjusts positions of the plurality of devices under test on the tray in the heat applying section with respect to the socket corresponding to the devices under test, based on the images of the plurality of devices under test captured by the device image capturing section, wherein the plurality of devices under test are placed on the tray in a switchable manner between a locked state and a lock-released state.

2. The handler according to claim 1 ,
wherein the device image capturing section moves in the first direction and the second direction that are substantially parallel with a row direction and a column direction of the plurality of devices under test arranged on the tray, respectively.

3. The handler according to claim 2 ,
wherein the device image capturing section sequentially captures images of the devices under test arranged in the row direction, by moving in the first direction while being static with respect to the tray in the second direction.

4. The handler according to claim 3 ,
wherein the device image capturing section reciprocates in the first direction, and moves in the second direction so as to capture images of the devices under test included in different rows between when the device image capturing section moves forward in the first direction and when the device image capturing section moves backward in the first direction.

5. The handler according to claim 2 ,
wherein the position adjusting section includes an actuator that visits two or more of the devices under test and adjusts the position of each of the visited devices under test.

6. The handler according to claim 5 ,
wherein while the device image capturing section is capturing an image of any of the devices under test, the actuator adjusts the position of the device under test, the image of which has already been captured.

7. The handler according to claim 5 ,
wherein the position adjusting section includes a plurality of the actuators that are arranged in the row direction, and moves the plurality of actuators in the column direction.

8. The handler according to claim 7 ,
wherein a number of the actuators arranged in the row direction is equal to a number of the devices under test arranged in the row direction.

9. The handler according to claim 2 ,
wherein the device image capturing section again captures images of the plurality of devices under test, the positions of which have been adjusted by the position adjusting section.

10. The handler according to claim 9 ,
wherein when a test time for the plurality of devices under test that are being tested in the test section is longer than a predetermined reference time, the device image capturing section again captures images of the devices under test, the positions of which have been adjusted by the position adjusting section.

11. The handler according to claim 2 , further comprising a socket image capturing section that captures an image of the socket,
wherein the position adjusting section adjusts the positions of the devices under test based on the images captured by the device image capturing section and the socket image capturing section.

12. The handler according to claim 11 ,
wherein the test section includes a plurality of the sockets that are arranged in the row direction and the column direction, and
the socket image capturing section captures images of respective ones of the sockets by moving in the row direction and the column direction in the test section.

13. The handler according to claim 11 ,
wherein the socket image capturing section newly captures images of the sockets when a setting for a temperature in the test section is changed.

14. A test apparatus for testing a device under test, comprising:
a test head that is electrically connected to the device under test via the socket;
a test module that tests the device under test via the test head; and
the handler according to claim 1 that conveys the device under test to the socket.

15. The handler according to claim 1 , further comprising
an insert on which one of the plurality of devices under test is placed, the insert being fixed on the tray while being allowed to move within a predetermined range.

Assignees

• Advantest Corp

Inventors

• Horino Hiromitsu
• Onozawa Masataka

Classifications

• G01R31/2891 Primary

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title

• G01R31/2893

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title

• G01R31/2874

  related to temperature · CPC title

• G01R31/2867

  Handlers or transport devices, e.g. loaders, carriers, trays · CPC title

• G01R31/26 Primary

  Testing of individual semiconductor devices (testing of photovoltaic devices H02S50/10; testing or measuring during manufacture or treatment {H10P74/00}) · CPC title