Bolometric detector with MIM structures of different dimensions

Patent metadata

Field	Value
Publication number	US-9784623-B2
Application number	US-201514865564-A
Country	US
Kind code	B2
Filing date	Sep 25, 2015
Priority date	Sep 26, 2014
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

A bolometric detector of LWIR wavelengths, including:
a substrate; a membrane suspended above the substrate by supporting elements; an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each MIM structure and with a dielectric element positioned between the lower and upper metal elements; a thermometric element comprising at least one thermometric material; wherein: the membrane includes the upper metal element, the thermometric material and one portion of the dielectric element of each MIM structure, the upper metal elements of at least two MIM structure have different dimensions relatively to each other in the main plane of the membrane, and the dielectric element of each of the MIM structures includes at least one of the following materials having vibrational modes in the LWIR range: Al 2 O 3 , AlN, TiO 2 .

First claim

The invention claimed is:

1. A bolometric detector able to detect wavelengths in the long wavelength infrared (LWIR) range, including at least:
a substrate;
a membrane suspended above the substrate by supporting elements;
an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each of the MIM structures and with a dielectric element positioned between the lower metal element and the upper metal element;
a thermometric element positioned between the lower metal element and the upper metal element in at least one of the MIM structures and comprising at least one thermometric material;
wherein:
the membrane includes at least the upper metal element, the thermometric material and at least one portion of the dielectric element of each of the MIM structures,
the upper metal elements of at least two of the MIM structures have different dimensions relative to each other in a main plane of the membrane,
the dielectric element of each of the MIM structures includes at least one of the following materials having vibrational modes in the LWIR range: Al 2 O 3 , AlN, TiO 2 , SiO 2 , SiN, and
the at least one thermometric material is different from the material of the dielectric element of the MIM structures.

2. The bolometric detector according to claim 1 , wherein the MIM structures are regularly spaced apart from each other and positioned in order to form an array of MIM structures.

3. The bolometric detector according to claim 2 , including four MIM structures positioned so as to form a 2×2 array, and wherein:
the four MIM structures include, in the main plane of the membrane, pairwise similar dimensions, or
each of the four MIM structures includes, in the main plane of the membrane, different dimensions relative to those of the other MIM structures, or
two first ones of the four MIM structures include, in the main plane of the membrane, similar dimensions relative to each other, and two second ones of the four MIM structures include different dimensions relative to each other and different from those of the two first ones of the four MIM structures.

4. The bolometric detector according to claim 1 , wherein the dimensions of the MIM structures in the main plane of the membrane are comprised between about 1,000 nm and 2,000 nm.

5. The bolometric detector according to claim 1 , wherein the MIM structures are positioned side by side with a pitch comprised between about 2,000 nm and 3,000 nm.

6. A bolometric detector able to detect wavelengths in the long wavelength infrared (LWIR) range, including at least:
a substrate;
a membrane suspended above the substrate by supporting elements;
an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each of the MIM structures and with a dielectric element positioned between the lower metal element and the upper metal element;
a thermometric element comprising at least one thermometric material;
wherein:
the membrane includes at least the upper metal element, the thermometric material and at least one portion of the dielectric element of each of the MIM structures,
the upper metal elements of at least two of the MIM structures have different dimensions relative to each other in a main plane of the membrane,
the dielectric element of each of the MIM structures includes at least one of the following materials having vibrational modes in the LWIR range: Al 2 O 3 , AlN, TiO 2 , SiO 2 , SiN, and
wherein the thermometric element is positioned above the MIM structures.

7. The bolometric detector according to claim 1 , wherein the membrane further includes, in each of the MIM structures, a first dielectric layer electrically insulating the upper metal element from the thermometric material, and a second dielectric layer electrically insulating the lower metal element from the thermometric material, and wherein the first and second dielectric layers are part of the dielectric element of each of the MIM structures.

8. The bolometric detector according to claim 7 , wherein the first and second dielectric layers are common to all the MIM structures and the thermometric material is formed with a layer common to all the MIM structures.

9. The bolometric detector according to claim 1 , wherein the membrane includes the lower metal element of each of the MIM structures.

10. The bolometric detector according to claim 1 , wherein the lower metal element of each of the MIM structures is positioned on the substrate such that an empty space which is part of the dielectric element of each of the MIM structures is positioned between the membrane and the lower metal element of each of the MIM structures.

11. The bolometric detector according to claim 1 , wherein the lower metal elements are formed with at least one metal layer common to all the MIM structures, or the lower metal elements are distinct for each of the MIM structures.

12. The bolometric detector according to claim 1 , wherein the thermometric material is electrically connected to an electronic circuit of the substrate through at least one electrically conductive layer of the membrane and through the supporting elements.

13. The bolometric detector according to claim 1 , wherein the membrane is mechanically and electrically connected to the supporting elements through thermal insulation arms.

14. A heat detection device including several bolometric detectors according to claim 1 , said bolometric detectors being positioned so as to form an array of pixels such that each bolometric detector forms a single pixel of the array.

15. The heat detection device according to claim 14 , wherein the bolometric detectors are laid out while forming several sub-arrays, the bolometric detectors of each of said sub-arrays being able to achieve detection of a range of wavelengths different from those intended to be detected by the bolometric detectors of the other sub-array(s).

16. The heat detection device according to claim 14 , wherein the array includes at least one baselining bolometric detector including a membrane suspended above the substrate and thermally connected to the substrate.

17. The heat detection device according to claim 14 , wherein the array includes at least one reference bolometric detector not including any MIM structure.

18. A bolometric detector able to detect wavelengths in the long wavelength infrared (LWIR) range, including at least:
a substrate;
a membrane suspended above the substrate by supporting elements;
an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each of the MIM structures and with a dielectric element positioned between the lower metal element and the upper metal element;
a thermometric element comprising at least one thermometric material;
wherein:
the membrane includes at least the upper metal element, the at least one thermometric material and at least one portion of the dielectric element of each of the MIM structures,
the upper metal elements of at least two of the MIM structures have different dimensions relative to each other in a main plane of the membrane,
the dielectric element of each of the MIM structures includes at least one of the following materials having vibrational modes in the LWIR range: Al 2 O 3 , AlN, TiO 2 , SiO 2 , SiN,
the thermometric element directly contacts the dielectric of the MIM structures, and
the at least one thermometric material is different from the material of the dielect

Assignees

• Commissariat Energie Atomique
• Commissariat L Energie Atomique Et Aux Energies Alternatives

Inventors

• Palanchoke Ujwol
• Boutami Salim
• Pocas Stephane
• Rabaud Wilfried

Classifications

• G01J5/20 Primary

  using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices · CPC title

• G01J5/22 Primary

  Electrical features thereof · CPC title

• G01J2005/202

  Arrays · CPC title

• G01J5/0853

  having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid · CPC title