Substrate processing system and substrate transferring method
US-9252034-B2 · Feb 2, 2016 · US
US9781870B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9781870-B2 |
| Application number | US-201214438525-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 29, 2012 |
| Priority date | Oct 29, 2012 |
| Publication date | Oct 3, 2017 |
| Grant date | Oct 3, 2017 |
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Official abstract text for this publication.
A component supply device which includes a moving slider for moving between a position near a wafer sheet replenishment section and a position near a mounter, a table supported on the moving slider, and a rotating mechanism for rotating the table around a specific rotation axis. The table is supported on the moving slider by a number one support point, a number two support point, and a number three support point which are provided on a circumference with the rotation axis at the center. The rotating mechanism includes a number one guide for moving number one support point in an arc with respect to the rotation axis, and driven guides for moving number two support point and number three support point in an arc with respect to the rotation axis.
Opening claim text (preview).
The invention claimed is: 1. A component supply device arranged adjacent to a mounter that mounts components on a board, the component supply device supplying the components to the mounter, comprising: a wafer sheet replenishment section which replenishes a wafer sheet on which multiple components are arranged in a specified pattern on the wafer sheet; and a wafer sheet conveyance section which conveys a wafer sheet supplied from the wafer sheet replenishment section to the mounter, the wafer sheet conveyance section including a moving slider which moves between a position near the wafer sheet replenishment section and a position near the mounter, a table which includes a loading surface on which a wafer sheet is loaded and which is supported on the moving slider, and a rotating mechanism which rotates the table around a specific rotation axis perpendicular with respect to the loading surface; wherein the table is supported on the moving slider by a first support point, a second support point, and a third support point which are provided on a circumference with the rotation axis at the center; wherein the rotating mechanism includes: a first guide that moves the first support point in an arc with respect to the rotation axis, an actuator directly connected to the first support point to move the first support point along the first guide, a first driven-guide which moves the second support point in an arc with respect to the rotation axis when the first support point is moved along the first guide, and a second driven-guide which moves the third support point in an arc with respect to the rotation axis when the first support point is moved along the first guide. 2. The component supply device according to claim 1 , wherein the first guide is provided on the moving slider, and the first support point is a slider which moves along the first guide and is attached to the table, and wherein the first guide is positioned at the end edge of the mounter side of the table. 3. The component supply device according to claim 1 , wherein the first driven-guide and the second driven-guide are each cross guides. 4. The component supply device according to claim 1 , wherein the actuator includes a ball screw engaged with a nut member, and the nut member is directly connected to the first support point, and wherein rotation of the ball screw moves the first support point via the nut member along the first guide.
Feeding one by one by other means than belts · CPC title
Loading or unloading of containers (H05K13/028 takes precedence) · CPC title
from a single group of articles arranged in orderly pattern, e.g. workpieces in magazines (de-stacking devices B65G59/00) · CPC title
Means for moving chips, wafers or other parts, e.g. conveyor belts · CPC title
Docking arrangements · CPC title
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