Embedded dielectric as a barrier in an acoustic device and method of manufacture
US-9374643-B2 · Jun 21, 2016 · US
US9781505B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9781505-B2 |
| Application number | US-201514974637-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 18, 2015 |
| Priority date | Jan 9, 2015 |
| Publication date | Oct 3, 2017 |
| Grant date | Oct 3, 2017 |
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Official abstract text for this publication.
A microphone includes a microphone base that has a first surface and a second surface. The microphone also includes a microelectromechanical system (MEMS) device coupled to the first surface of the microphone base. The microphone also includes a cover coupled to the first surface of the microphone base, such that the cover divides the first surface into a covered portion where the cover encloses the MEMS device, and a non-covered portion extending away from the cover. The microphone also includes one or more pads on the uncovered portion of the first surface of the base. The microphone also includes a port extending through the base from the first surface to the second surface.
Opening claim text (preview).
What is claimed is: 1. A microphone, comprising: a microphone base, the microphone base having a first surface and a second surface, wherein a first sound port extends through the microphone base from the first surface to the second surface; a microelectromechanical system (MEMS) device coupled to the first surface of the microphone base and comprising a second sound port disposed under the first sound port; a barrier disposed within the microphone base and preventing debris from passing through the first sound port, wherein a portion of the first sound port between the second surface and the barrier has a larger diameter than the second sound port; a cover coupled to the first surface of the microphone base, such that the cover divides the first surface into a covered portion where the cover encloses the MEMS device, and a non-covered portion extending away from the cover; and one or more pads on the uncovered portion of the first surface of the base; wherein the cover is structured to fit into a recess in a board of a customer device when the one or more pads couple to corresponding pads on the board. 2. The microphone of claim 1 , further comprising an integrated circuit disposed on the covered portion of the first surface. 3. The microphone of claim 1 , wherein the first surface and the second surface are parallel and do not intersect. 4. The microphone of claim 1 , wherein the second surface remains uncoupled to the board of the customer device. 5. The microphone of claim 1 , wherein the first sound port has a diameter greater than 1 mm. 6. The microphone of claim 1 , wherein the microphone is disposed as a top port device within the customer device. 7. The microphone of claim 1 , wherein the barrier includes a membrane with pores, and wherein a size of the pores is configured to tune an acoustic resistance of an audio path to the MEMS device. 8. The microphone of claim 1 , wherein the first sound port comprises a second portion disposed between the barrier and the first surface, the second portion having a smaller diameter than the portion of the first sound port between the second surface and the barrier. 9. A device, comprising: a microphone including: a microphone base, the microphone base having a first surface and a second surface, wherein a first sound port extends through the microphone base from the first surface to the second surface; a microelectromechanical system (MEMS) device coupled to the first surface of the microphone base and comprising a second sound port disposed under the first sound port; a barrier disposed within the microphone base and preventing debris from passing through the first sound port, wherein a portion of the first sound port between the second surface and the barrier has a larger diameter than the second sound port; a cover coupled to the first surface of the microphone base, such that the cover divides the first surface into a covered portion where the cover encloses the MEMS device, and a non-covered portion extending away from the cover; one or more pads on the uncovered portion of the first surface of the base; and a board including a recess and one or more pads, wherein the one or more pads of the microphone couple to the one or more pads of the board, and wherein the cover fits into the recess in the board. 10. The device of claim 9 , further comprising an integrated circuit disposed on the covered portion of the first surface. 11. The device of claim 9 , wherein the first surface and the second surface are parallel and do not intersect. 12. The device of claim 9 , wherein the second surface remains uncoupled to the board. 13. The device of claim 9 , wherein the first sound port has a diameter greater than 1 mm. 14. The device of claim 13 , wherein the barrier includes a membrane with pores, and wherein a size of the pores is configured to tune an acoustic resistance of an audio path to the MEMS device. 15. The device of claim 9 , wherein the microphone is disposed as a top port device within the device. 16. The device of claim 9 , wherein the first sound port comprises a second portion disposed between the barrier and the first surface, the second portion having a smaller diameter than the portion of the first sound port between the second surface and the barrier.
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