Imprint apparatus and article manufacturing method

Patent metadata

Field	Value
Publication number	US-9778565-B2
Application number	US-201715400081-A
Country	US
Kind code	B2
Filing date	Jan 6, 2017
Priority date	Dec 2, 2010
Publication date	Oct 3, 2017
Grant date	Oct 3, 2017

Abstract

The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply an uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller. The movable unit is capable of moving the imprint area to each of an inspection position by means of the inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit. Also, the controller causes the inspection unit to perform inspection of the imprint area in association with the movement of the imprint area by means of the movable unit.

First claim

What is claimed is:

1. An imprint apparatus that forms a pattern of an imprint material on a substrate by using a mold, the imprint apparatus comprising:
a holding unit configured to hold the substrate on which a first area and a second area different from the first area are provided;
a dispenser configured to apply the imprint material to the substrate; and
a particle inspection unit configured to inspect whether or not a particle is present on the second area where the imprint material is not applied while an imprinting step for the first area is performed.

2. The imprint apparatus according to claim 1 , wherein the particle inspection unit determines there is the particle present on the second area, in a case where the particle inspection unit detects scattered light of light illuminated to the second area, the scattered light being scattered by the particle on the second area.

3. The imprint apparatus according to claim 1 , wherein the particle inspection unit includes a CCD sensor and determines whether or not the particle is present on the second area based on the result of photographing.

4. The imprint apparatus according to claim 1 , wherein the second area is an area on which the pattern of the imprint material is to be formed after forming the pattern of the imprint material on the first area.

5. The imprint apparatus according to claim 1 , wherein the imprint apparatus is configured to avoid forming the pattern of the imprint material on the second area, in the case where the particle inspection unit determines there is the particle on the second area.

6. The imprint apparatus according to claim 1 , wherein the imprint step includes:
contacting the mold and the imprint material applied to the first area;
curing the imprint material; and
releasing the mold from the cured imprint material.

7. The imprint apparatus according to claim 1 , wherein the pattern of the imprint material is a pattern of a resin and the dispenser applies an uncured resin as the imprint material onto the substrate.

Assignees

• Canon Kk

Inventors

• Sato Hiroshi

Classifications

• B05D3/12

  by mechanical means · CPC title

• B05D3/067

  Curing or cross-linking the coating · CPC title

• B05C9/12

  the auxiliary operation being performed after the application (B05C9/14 takes precedence) · CPC title

• B29C59/002

  Component parts, details or accessories; Auxiliary operations · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title