Specimen preparation device

Patent metadata

Field	Value
Publication number	US-9773638-B2
Application number	US-201514945630-A
Country	US
Kind code	B2
Filing date	Nov 19, 2015
Priority date	Nov 21, 2014
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

A specimen preparation device prepares a cross section of a specimen by applying an ion beam, the specimen preparation device including: an ion beam generator that generates the ion beam; a specimen holder that holds the specimen; a shield plate that shields part of the specimen from the ion beam; and a tilted plate that is placed to intersect a path of the ion beam on a downstream side of the specimen, and has an incidence surface that is tilted relative to a direction in which the ion beam is incident.

First claim

What is claimed is:

1. A specimen preparation device that prepares a cross section of a specimen by applying an ion beam, the specimen preparation device comprising:
an ion beam generator that generates the ion beam;
a specimen holder that holds the specimen;
a shield plate positionable relative to the specimen that shields part of the specimen from the ion beam; and
a tilted plate that is tiltable relative to the shield plate and placed to intersect a path of the ion beam not blocked by the specimen on a downstream side of the specimen, and has an incidence surface that is tilted relative to a direction in which the ion beam is incident.

2. The specimen preparation device as defined in claim 1 ,
wherein the incidence surface and the specimen do not overlap each other when viewed in a direction perpendicular to the incidence surface.

3. The specimen preparation device as defined in claim 2 ,
wherein the incidence surface is formed of diamond.

4. The specimen preparation device as defined in claim 1 ,
wherein the incidence surface and the specimen overlap each other when viewed in a direction perpendicular to the incidence surface.

5. The specimen preparation device as defined in claim 4 ,
wherein the incidence surface is formed of graphite.

6. The specimen preparation device as defined in claim 1 , further comprising:
a vacuum chamber in which the specimen is placed,
wherein the tilted plate is placed between the specimen and an inner bottom surface of the vacuum chamber.

7. The specimen preparation device as defined in claim 1 , further comprising:
a tilted plate support that supports the tilted plate so that a tilt angle of the incidence surface relative to the ion beam can be changed.

8. A specimen preparation device that prepares a cross section of a specimen by applying an ion beam, the specimen preparation device comprising:
an ion beam generator that generates the ion beam;
a specimen holder that holds the specimen;
a shield plate positionable relative to the specimen that shields part of the specimen from the ion beam;
a tilted plate that is tiltable relative to the shield plate and placed to intersect a path of the ion beam not blocked by the specimen on a downstream side of the specimen, and has an incidence surface on which the ion beam is incident; and
a tilted plate support that supports the tilted plate so that a tilt angle of the incidence surface relative to the ion beam can be changed.

9. The specimen preparation device as defined in claim 8 ,
wherein the incidence surface is formed of diamond-like carbon.

Assignees

• Jeol Ltd

Inventors

• Sakuda Yusuke
• Asahina Shunsuke

Classifications

• G01N1/32 Primary

  Polishing; Etching · CPC title

• H01J2237/3146

  Ion beam bombardment sputtering · CPC title

• H01J2237/3151

  Etching · CPC title

• H01J2237/0213

  Avoiding deleterious effects due to interactions between particles and tube elements · CPC title

• H01J37/1478 Primary

  Beam tilting means, i.e. for stereoscopy or for beam channelling · CPC title