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Method for modifying a TCO coating
US9771650B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9771650-B2 |
| Application number | US-201615247403-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 25, 2016 |
| Priority date | Sep 8, 2015 |
| Publication date | Sep 26, 2017 |
| Grant date | Sep 26, 2017 |
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Abstract
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Methods are provided for modifying a transparent and electrically conductive metal-oxide coating deposited on a plastic substrate. At least one surface region of the metal oxide coating is impinged by a pulse-driven electron beam. The impingement of the surface region of the metal oxide coating by the pulse-driven electron beam occurs inside a vacuum chamber into which hydrogen, argon, nitrogen, or oxygen, or a gas mixture of at least two of the above-mentioned gasses has been introduced.
First claim
Opening claim text (preview).
The invention claimed is: 1. A method for modifying a transparent and electrically conductive metal oxide coating deposited on a plastic substrate, the method comprising: impinging a surface region of the metal oxide coating by an electron beam, wherein the impingement on the surface region of the metal oxide coating by the electron beam occurs inside a vacuum chamber, wherein hydrogen, nitrogen, argon, or oxygen, or a gas mixture of at least two of the above-mentioned gases is introduced in the vacuum chamber while the surface region is impinged by the electron beam, and wherein the electron beam is operated with a spot irradiation time of 100 ns to 1 s. 2. The method of claim 1 , wherein the electrical conductivity of the metal oxide coating is modified. 3. The method of claim 2 , wherein the light transparency of the metal-oxide coating is modified. 4. The method of claim 1 , wherein the light transparency of the metal-oxide coating is modified.
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Classifications
Reactive treatment · CPC title
Reactive sputtering · CPC title
of zinc, germanium, cadmium, indium, tin, thallium or bismuth · CPC title
Removal of material · CPC title
- C23C14/582Primary
using electron bombardment · CPC title
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- What does patent US9771650B2 cover?
- Methods are provided for modifying a transparent and electrically conductive metal-oxide coating deposited on a plastic substrate. At least one surface region of the metal oxide coating is impinged by a pulse-driven electron beam. The impingement of the surface region of the metal oxide coating by the pulse-driven electron beam occurs inside a vacuum chamber into which hydrogen, argon, nitrogen…
- Who is the assignee on this patent?
- Fraunhofer Ges Forschung
- What technology area does this patent fall under?
- Primary CPC classification C23C14/582. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Sep 26 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).