Cordierite sintered body, method for manufacturing the same, composite substrate, and electronic device

Patent metadata

Field	Value
Publication number	US-9771303-B2
Application number	US-201615160224-A
Country	US
Kind code	B2
Filing date	May 20, 2016
Priority date	Jun 6, 2014
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

In an X-ray diffraction diagram of a cordierite sintered body of the present invention, the ratio of the total of the maximum peak intensities of components other than cordierite components to the peak top intensity of the ( 110 ) plane of cordierite is 0.0025 or less. Since having a significantly small amount of different phases other than the cordierite components, this cordierite sintered body has a high surface flatness when the surface thereof is mirror-polished.

First claim

What is claimed is:

1. A cordierite sintered body wherein in an X-ray diffraction diagram, the ratio of the total of maximum peak intensities of components other than cordierite components to the peak top intensity of the (110) plane of cordierite is 0.0025 or less, an average grain diameter of cordierite sintered grains is 1 μm or less, and a molar ratio of MgO/Al 2 O 3 is 0.96 to 1.04 and a molar ratio of SiO 2 /Al 2 O 3 is 2.46 to 2.54,
wherein a total light transmittance through the cordierite sintered body, with respect to light having a wavelength of 550 nm, is 60% or more.

2. The cordierite sintered body according to claim 1 , wherein the total light transmittance through the cordierite sintered body, with respect to light having a wavelength of 550 nm, is 75% or more.

3. The cordierite sintered body according to claim 1 , wherein the sintered body contains at least 99.9 percent by mass of MgO, Al 2 O 3 and SiO 2 .

4. The cordierite sintered body according to claim 1 , wherein a linear transmittance through the cordierite sintered body, with respect to light having a wavelength of 550 nm, is 50% or more.

5. The cordierite sintered body according to claim 1 , having a mirror surface.

6. The cordierite sintered body according to claim 5 , wherein a center line average roughness Ra of the surface in a 10-μm square measurement region is 1 nm or less.

7. The cordierite sintered body according to claim 5 , wherein a maximum peak height Rp of the surface in a 70-μm square measurement region is 30 nm or less.

8. A composite substrate formed by joining a functional substrate and a support substrate formed of a cordierite sintered body, wherein a rate of an area at which the substrates are actually joined to each other to a joining interface is 80% or more, and the cordierite sintered body is the sintered body according to claim 5 .

9. The composite substrate according to claim 8 , wherein the joining is direct joining.

10. An electronic device using the composite substrate to claim 8 .

11. An electronic device using the composite substrate according to claim 9 .

12. A method for manufacturing the cordierite sintered body according to claim 1 , comprising sintering a cordierite raw material powder containing an MgO component, an Al 2 O 3 component, and a SiO 2 component in an inert gas atmosphere using a hot press method,
wherein in the cordierite raw material powder, the molar ratio of MgO/Al 2 O 3 is 0.96 to 1.04, the molar ratio of SiO 2 /Al 2 O 3 is 2.46 to 2.54, MgO, SiO 2 and Al 2 O 3 are present in an amount of at least 99.9 percent by mass, and an average grain diameter D 50 of the cordierite raw material powder is 1 μm or less, and
as conditions for sintering using the hot press method, a press pressure is 20 to 300 kgf/cm 2 , and a firing temperature is 1,410° C. to 1,450° C.

Assignees

• Ngk Insulators Ltd

Inventors

• Isoda Yoshinori
• Sato Yosuke
• Katsuda Yuji

Classifications

• C04B2235/3481

  Alkaline earth metal alumino-silicates other than clay, e.g. cordierite, beryl, micas such as margarite, plagioclase feldspars such as anorthite, zeolites such as chabazite · CPC title

• C04B2235/662

  Annealing after sintering · CPC title

• C04B2235/76

  Crystal structural characteristics, e.g. symmetry · CPC title

• C30B33/06

  Joining of crystals · CPC title

• C04B2235/5445

  submicron sized, i.e. from 0,1 to 1 micron · CPC title