Substrate storing container

Patent metadata

Field	Value
Publication number	US-9768045-B2
Application number	US-201214443972-A
Country	US
Kind code	B2
Filing date	Nov 20, 2012
Priority date	Nov 20, 2012
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

The lid body side wafer support parts allow flexibility to be exhibited and supports the wafers. If a closed state substrate is defined as being a wafer which is stored in the substrate storing space in a container main body in a state wherein the container main body opening portion is closed by the lid body, and a closed time center is defined as being the center of a closed state substrate, the back side substrate support portion, when a closed state substrate is viewed in the thickness direction, are disposed in a pair about a depth direction reference line and support the wafer. A center angle which the back side substrate support portion form toward the depth direction with respect to a left/right direction reference line when a closed state substrate is viewed in the thickness direction is 20-55°.

First claim

The invention claimed is:

1. A substrate storing container comprising:
a container main body having formed inside thereof a substrate storing space that can store a plurality of substrates, and having formed at a first end portion thereof a container main body opening portion that is in communication with the substrate storing space;
a lid body that is removably attached to the container main body opening portion and can close the container main body opening portion;
a lid body side substrate support portion which is arranged at a portion of the lid body that is a part opposing the substrate storing space when the container main body opening portion is closed by the lid body, and supports only two edge portions of each of the plurality of substrates when the container main body opening portion is closed by the lid body; and
a back side substrate support portion that is arranged so as to form a pair with the lid body side substrate support portion inside the substrate storing space, that can support the edge portions of the plurality of substrates, and that supports the plurality of substrates in cooperation with the lid body side substrate support portion when the container main body opening portion is closed by the lid body,
wherein the lid body side substrate support portion allows flexibility to be exhibited and supports a substrate,
wherein, in a case in which a direction from the first end portion of the container main body toward a second end portion opposite from the first end portion refers to a depth direction, a direction from the second end portion toward the first end portion of the container main body is defined as a forward direction, a substrate being stored in the substrate storing space of the container main body in a state in which the container main body opening portion is closed by the lid body refers to a closed state substrate, a center of the closed state substrate refers to a closed time center, a virtual straight line passing though the closed time center and in parallel to the depth direction refers to a depth direction reference line, and a virtual straight line passing through the closed time center and perpendicular to the depth direction refers to a left/right direction reference line, when viewing the closed state substrate in a thickness direction, the back side substrate support portion includes paired sections, and
wherein a first center angle formed by a line connecting an end of the back side substrate support portion on a side of an other end portion of the container main body and the closed time center and the left/right direction reference line, when viewing the closed state substrate in the thickness direction, is at least 20° and no more than 55°, and
a second center angle formed by a line connecting one of the lid body side substrate support portions and the closed time center and the left/right direction reference line, when viewing the closed state substrate in the thickness direction, is at least 60° and no more than 85°.

2. The substrate storing container according to claim 1 , wherein the first center angle is at least 35° and no more than 50°.

3. The substrate storing container according to claim 1 , wherein a diameter of a substrate to be stored in the substrate storing container is at least 450 mm.

4. The substrate storing container according to claim 2 , wherein a diameter of a substrate to be stored in the substrate storing container is at least 450 mm.

Assignees

• Miraial Co Ltd
• Shinetsu Polymer Co

Inventors

• Matsutori Chiaki
• Nagashima Tsuyoshi
• Oyama Takaharu
• Inoue Shuichi
• Shida Hiroyuki
• Yamagishi Hiroki
• Ohnuki Kazumasa

Classifications

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1916

  characterised by sealing arrangements · CPC title

• H10P72/1912 Primary

  characterised by shock absorbing elements, e.g. retainers or cushions · CPC title

• H10P72/14 Primary

  Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title

• B65D85/30

  for articles particularly sensitive to damage by shock or pressure · CPC title