System, method and computer program product for defect detection based on multiple references

Patent metadata

Field	Value
Publication number	US-9767356-B2
Application number	US-201514738354-A
Country	US
Kind code	B2
Filing date	Jun 12, 2015
Priority date	Feb 21, 2013
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

A system including an interface for receiving inspection image data of an inspection image of an inspection object. The inspection image data includes information of an analyzed pixel of the inspected image and of reference pixels of the inspected image. The system further includes a memory and a processor device operatively coupled to the interface and the memory to obtain an inspected value representative of the analyzed pixel of the inspected image, and a reference value for each of the reference pixels of the inspected image. For each reference pixel, the processor devices calculates a difference between the reference value of a respective reference pixel and the inspected value of the analyzed pixel, computes a representative difference value based on the differences and determines a presence of a defect in the analyzed pixel based on the representative difference value.

First claim

What is claimed is:

1. A system comprising:
a memory; and
a processor device, operatively coupled with the memory, to:
receive inspection image data of an inspection image of an inspection object, the inspection image data comprising information of an analyzed pixel of the inspected image and of a plurality of reference pixels of the inspected image;
obtain an inspected value representative of the analyzed pixel of the inspected image, and a reference value for each of the plurality of reference pixels of the inspected image;
for each reference pixel, calculate a difference between the reference value of a respective reference pixel and the inspected value of the analyzed pixel;
compute a representative difference value based on the differences between the reference values for each of the respective reference pixels and the inspected value of the analyzed pixel; and
determine a presence of a defect in the analyzed pixel based on the representative difference value.

2. The system of claim 1 , wherein the inspected value and the plurality of reference values are gray-level values.

3. The system of claim 1 , wherein the plurality of reference pixels are selected by:
defining a plurality of reference cells; and
identifying pixels in locations in the plurality of reference cells that are equivalent to a location of the analyzed pixel within a respective cell.

4. The system of claim 1 , wherein the inspected object is selected from a group consisting of an electronic circuit, a wafer, a photomask, and a reticle.

5. The system of claim 1 , wherein the processor is to compute the representative difference value by:
selecting a subset of the plurality of differences based on a size order between the plurality of differences; and
defining the representative difference value as the largest difference in the plurality of differences.

6. The system of claim 1 , wherein the processor is to compute the representative difference value by selecting one of the plurality of differences as the representative difference value.

7. The system of claim 1 , wherein the processor is to determine the presence of the defect in the analyzed pixel based on a comparison of the representative difference value to a threshold value.

8. A method comprising:
receiving inspection image data of an inspection image of an inspection object, the inspection image data comprising information of an analyzed pixel of the inspected image and of a plurality of reference pixels of the inspected image;
obtaining, by a processor device, an inspected value representative of the analyzed pixel of the inspected image, and a reference value for each of the plurality of reference pixels of the inspected image;
for each reference pixel, calculating a difference between the reference value of a respective reference pixel and the inspected value of the analyzed pixel;
computing a representative difference value based on the differences between the reference values for each of the respective reference pixels and the inspected value of the analyzed pixel; and
determining a presence of a defect in the analyzed pixel based on the representative difference value.

9. The method of claim 8 , wherein the inspected value and the plurality of reference values are gray-level values.

10. The method of claim 8 , further comprising:
defining a plurality of reference cells; and
identifying pixels in locations in the plurality of reference cells that are equivalent to a location of the analyzed pixel within a respective cell as the plurality of reference pixels.

11. The method of claim 8 , wherein the inspected object is selected from a group consisting of an electronic circuit, a wafer, a photomask, and a reticle.

12. The method of claim 8 , wherein computing the representative difference value comprises:
selecting a subset of the plurality of differences based on a size order between the plurality of differences; and
defining the representative difference value as the largest difference in the plurality of differences.

13. The method of claim 8 , wherein computing the representative difference value comprises:
selecting one of the plurality of differences as the representative difference value.

14. The method of claim 8 , wherein determining the presence of the defect in the analyzed pixel comprises:
comparing the representative difference value to a threshold value.

15. A non-transitory computer-readable storage medium, including instructions that, when executed by a processor device, cause the processing device to perform operations comprising:
receiving inspection image data of an inspection image of an inspection object, the inspection image data comprising information of an analyzed pixel of the inspected image and of a plurality of reference pixels of the inspected image;
obtaining, by the processor device, an inspected value representative of the analyzed pixel of the inspected image, and a reference value for each of the plurality of reference pixels of the inspected image;
for each reference pixel, calculating a difference between the reference value of a respective reference pixel and the inspected value of the analyzed pixel;
computing a representative difference value based on the differences between the reference values for each of the respective reference pixels and the inspected value of the analyzed pixel; and
determining a presence of a defect in the analyzed pixel based on the representative difference value.

16. The non-transitory computer-readable storage medium of claim 15 , wherein the inspected value and the plurality of reference values are gray-level values.

17. The non-transitory computer-readable storage medium of claim 15 , the operations further comprising:
defining a plurality of reference cells; and
identifying pixels in locations in the plurality of reference cells that are equivalent to a location of the analyzed pixel within a respective cell as the plurality of reference pixels.

18. The non-transitory computer-readable storage medium of claim 15 , wherein computing the representative difference value comprises:
selecting a subset of the plurality of differences based on a size order between the plurality of differences; and
defining the representative difference value as the largest difference in the plurality of differences.

19. The non-transitory computer-readable storage medium of claim 15 , wherein computing the representative difference value comprises:
selecting one of the plurality of differences as the representative difference value.

20. The non-transitory computer-readable storage medium of claim 15 , wherein determining the presence of the defect in the analyzed pixel comprises:
comparing the representative difference value to a threshold value.

Assignees

• Applied Materials Israel Ltd
• Applied Materials Israel Ltd

Inventors

• Amzaleg Moshe
• Cohen Yehuda
• Dodzen Nir Ben-David
• Rozenman Efrat

Classifications

• G06T7/001 Primary

  using an image reference approach · CPC title

• G06F2218/12

  Classification; Matching · CPC title

• G06T2207/30148

  Semiconductor; IC; Wafer · CPC title

• G06T2207/10061

  from scanning electron microscope · CPC title

• G06K9/00536 Primary

  Physics · mapped topic