Actuators and microlithography projection exposure systems and methods using the same

Patent metadata

Field	Value
Publication number	US-9766550-B2
Application number	US-201514840394-A
Country	US
Kind code	B2
Filing date	Aug 31, 2015
Priority date	Jul 22, 2008
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a deformation unit and a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation. The movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit and the deformation unit is disposed along the effective direction of the actuator upon the removal of the vector component on the deformation unit.

First claim

What is claimed is:

1. An actuator, comprising:
a housing;
a movable part; and
an advancing unit that is at least temporarily connected to the movable part, the advancing unit comprising:
a deformation unit; and
a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation,

wherein:
the movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit;
the housing comprises two housing parts configured to be interconnected via the deformation unit; and
the two housing parts are moveable with respect to each other along the effective direction of the actuator.

2. The actuator of claim 1 , wherein the deformer comprises a piezoelectric element.

3. The actuator of claim 1 , wherein each housing part comprises a locking unit configured to lock the moveable part to the housing part.

4. The actuator of claim 3 , wherein the deformation unit comprises a leaf spring.

5. The actuator of claim 3 , wherein the deformation unit comprises a pair of springs comprising two opposing leaf springs, and two deformers are arranged on the pair of springs and configured to bend the leaf springs toward one another from outside.

6. The actuator of claim 1 , wherein the movable part comprises first and second partial movable parts connected via the deformation unit.

7. The actuator of claim 6 , further comprising two locking units, wherein each locking unit is configured to lock a corresponding partial movable part relative to the housing.

8. The actuator of claim 1 , further comprising damping elements configured to inhibit movement of the movable part in the effective direction of the actuator.

9. The actuator of claim 1 , wherein the deformation unit comprises at least one element selected from the group consisting of a pressurizable tube, a temperature-controllable bimetal, a magnetic spiral spring, and a wire spring.

10. The actuator of claim 1 , wherein the deformation unit comprises a combination of different spiral springs of different cross section and/or different length.

11. The actuator of claim 1 , wherein the deformation unit comprises two sections with different elastic properties in the effective direction of the actuator.

12. The actuator of claim 1 , wherein the deformer comprises at least one element selected from the group consisting of an electromagnetic coil, a hydraulic cylinder, a pneumatic cylinder, and a pneumatic bellows.

13. The actuator of claim 1 , wherein the deformer comprises a capacitor comprising capacitor plates, which, during use, generate electric field that lead to a deformation of bending elements arranged between the capacitor plates.

14. A system, comprising:
an optical element; and
an actuator as claimed in claim 1 ,
wherein the actuator is configured to move the optical element in a direction of an optical axis of the system, and the system is a semiconductor lithography projection exposure system.

15. The system of claim 14 , wherein the optical element is connected to further components of the projection exposure system via the actuator.

16. A method of operating an actuator, the actuator comprising a housing, a movable part, a deformation unit and a deformer, the method comprising:
fixing the movable part via a first locking unit of a first part of the housing, the first locking unit being located upstream of the deformation unit with respect to a direction of movement of the movable part;
releasing a second locking unit of the second part of the housing, the second locking unit being located downstream of the deformation unit with respect to the direction of movement of the movable part;
deforming the deformation unit via the deformer so that the deformation unit is deformed with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation;
fixing the movable part via the second locking unit;
releasing the first locking unit; and
releasing the deformer from the deformation unit so that the moveable part moves in the effective direction of the actuator, the deformation unit is disposed along the effective direction of the actuator upon releasing of the deformer from the deformation unit,
wherein the method includes moving the first and second housing parts with respect to each other along the effective direction of the actuator.

17. An actuator, comprising:
a housing comprising two parts;
a movable part;
a deformation unit; and
a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation,
wherein the deformation unit is connected to the two parts of the housing and not to the movable part so that the movable part can move in relation to the two parts of the housing over an unrestricted distance.

18. The actuator of claim 17 , wherein each of the two parts of the housing comprises a locking unit configured to lock the moveable part to the respective part of the housing.

19. The actuator of claim 17 , wherein the deformation unit comprises a leaf spring.

20. The actuator of claim 17 , wherein the deformation unit comprises a pair of springs comprising two opposing leaf springs, and-two deformers are arranged on the pair of springs and configured to bend the leaf springs toward one another from outside.

21. A system, comprising:
an optical element; and
an actuator as claimed in claim 17 ,
wherein the actuator is configured to move the optical element in a direction of an optical axis of the system, and the system is a semiconductor lithography projection exposure system.

22. The system of claim 21 , wherein the optical element is connected to further components of the projection exposure system via the actuator.

23. A method of operating an actuator, the actuator comprising a housing, a movable part, a deformation unit and a deformer, the housing comprising two parts connected via the deformation unit, the method comprising:
fixing the movable part via a first locking unit, the first locking unit being located upstream of the deformation unit with respect to a direction of movement of the movable part;
releasing a second locking unit of the movable part, the second locking unit being located downstream of the deformation unit with respect to the direction of movement of the movable part;
deforming the deformation unit via a deformer so that the deformation unit is deformed with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation;
fixing the movable part via the second locking unit;
releasing the first locking unit; and
releasing the deformer from the deformation unit so that the moveable part is movable in the effective direction of the actuator over an unrestricted distance.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Weber Ulrich
• Hembacher Stefan
• Schoeppach Armin

Classifications

• G03F7/70141 Primary

  Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system · CPC title

• H02N1/002

  Electrostatic motors · CPC title

• Y10T74/18992

  Reciprocating to reciprocating · CPC title

• F16H21/44

  for conveying or interconverting oscillating or reciprocating motions · CPC title

• G03F7/70258 Primary

  Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system · CPC title