Gas heater

Patent metadata

Field	Value
Publication number	US-9766022-B2
Application number	US-201213667314-A
Country	US
Kind code	B2
Filing date	Nov 2, 2012
Priority date	May 16, 2008
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

A method and apparatus for heating or cooling a fluid is provided. In one embodiment, a heat exchanger is provided. The heat exchanger includes a first subassembly comprising an insert. The insert comprises a body having a blind passage formed axially in the body, a plurality of nozzles formed therein, and a first plurality of heat exchange elements disposed within the body. The heat exchanger also comprises a second subassembly comprising a sleeve and a second plurality of heat exchange elements disposed within the sleeve, wherein the insert is sealably engaged inside the sleeve and the insert and the sleeve cooperatively define a thin gap, and wherein each of the plurality of nozzles are disposed radially between the blind passage and the thin gap.

First claim

What is claimed is:

1. A heat exchanger, comprising:
a first subassembly comprising an insert, the insert comprising a body having:
an inlet conduit coupled to the body;
a blind passage formed axially in the body;
a plurality of nozzles formed therein;
an outlet conduit coupled to the body; and
a first plurality of heat exchange elements disposed within the body; and

a second subassembly comprising a sleeve and a second plurality of heat exchange elements disposed within the sleeve, wherein the insert is sealably engaged inside the sleeve and the insert and the sleeve cooperatively define a thin gap, and wherein each of the plurality of nozzles extend radially between the blind passage and the thin gap and the outlet conduit is in fluid communication with the thin gap.

2. The heat exchanger of claim 1 , wherein the inlet conduit connects the thin gap with an external gas source.

3. The heat exchanger of claim 2 , further comprising a distribution channel in fluid communication with the thin gap and the inlet conduit.

4. The heat exchanger of claim 1 , wherein the heat exchange elements comprise resistive heaters.

5. The heat exchanger of claim 1 , wherein the heat exchange elements are spaced equally through the first and second subassemblies.

6. A heat exchanger, comprising:
an inlet conduit coupled to a body, the body comprising:
a first portion having a central blind passage;
a plurality of nozzles extending radially from the central blind passage;
a first plurality of thermal elements disposed therein, wherein the plurality of nozzles are in fluid communication with the inlet conduit and the central blind passage; and
a second portion configured as a sleeve to at least partially surround and mate sealably with the first portion, wherein the first portion and the second portion cooperatively defines a distribution channel and a thin gap, the second portion having a second plurality of thermal elements disposed therein, wherein the distribution channel and the thin gap are in fluid communication with the plurality of nozzles; and
an outlet conduit coupled to the body and in fluid communication with the thin gap.

7. The heat exchanger of claim 6 , wherein each of the first plurality of thermal elements is disposed between two of the plurality of nozzles.

8. The heat exchanger of claim 7 , wherein each of the second plurality of thermal elements is disposed along a line drawn parallel to one of the plurality of nozzles.

9. The heat exchanger of claim 6 , wherein the first portion and the second portion are cylindrical, and the distribution channel and thin gap are annular.

10. The heat exchanger of claim 6 , further comprising a seal disposed within a recess formed in sealing surfaces of the first and second portions.

11. The heat exchanger of claim 6 , further comprising a temperature sensor.

12. The heat exchanger of claim 6 , further comprising a controller.

13. The heat exchanger of claim 12 , wherein the controller is an over-temperature controller.

14. The heat exchanger of claim 6 , wherein the plurality of nozzles comprises three passages connecting the inlet conduit with the distribution channel.

15. The heat exchanger of claim 6 , wherein the first portion and the second portion are metal.

16. The heat exchanger of claim 15 , wherein the metal is stainless steel.

17. The heat exchanger of claim 15 , wherein the metal is inconel.

18. A heat exchanger, comprising:
an inlet conduit coupled to a body, the body comprising:
a first cylindrical portion having a central blind passage;
a plurality of nozzles extending radially from the central blind passage;
a first plurality of thermal elements disposed therein, wherein the plurality of nozzles are in fluid communication with the inlet conduit and the central blind passage; and
a second cylindrical portion configured as a sleeve to at least partially surround and mate sealably with the first cylindrical portion, wherein the first cylindrical portion and the second cylindrical portion cooperatively defines a distribution channel and a thin gap, the second cylindrical portion having a second plurality of thermal elements disposed therein, wherein the distribution channel and the thin gap are in fluid communication with the plurality of nozzles; and
an outlet conduit coupled to the body and in fluid communication with the thin gap.

19. The heat exchanger of claim 18 , wherein the distribution channel and thin gap comprise an annular shape.

20. The heat exchanger of claim 18 , further comprising a seal disposed within a recess formed in sealing surfaces of the first cylindrical portion and the second cylindrical portion.

Assignees

• Hou Tao
• Nguyen Son T
• Choi Kenric T
• Nguyen Anh N
• Applied Materials Inc

Inventors

• Hou Tao
• Nguyen Son T
• Choi Kenric T
• Nguyen Anh N

Classifications

• F28F7/02 Primary

  Blocks traversed by passages for heat-exchange media {(F28D7/0008 takes precedence)} · CPC title