Computer-readable storage medium, generating method, generating apparatus, driving apparatus, processing apparatus, lithography apparatus, and method of manufacturing article

Patent metadata

Field	Value
Publication number	US-9762167-B2
Application number	US-201414519878-A
Country	US
Kind code	B2
Filing date	Oct 21, 2014
Priority date	Oct 31, 2013
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

The present invention provides a computer-readable storage medium which stores a program for causing a computer to generate time-series data of an electric current to be supplied to a motor in order to cause, a control system, including the motor configured to drive an object, to transit from a first state to a second state, the program causing the computer to generate the time-series data so as to satisfy a constraint including a condition to constrain an upper limit value of dispersion of a plurality of state quantities respectively obtained from a plurality of models each of which estimates, from the time-series data, a state quantity of a specific mode of a vibration mode and motion mode of the object, and so that a value of an evaluation function for evaluating the time-series data falls within a tolerance.

First claim

What is claimed is:

1. A computer-readable storage medium which stores a program for causing a computer to generate time-series data of an electric current to be supplied to a motor in order to cause, a control system, including the motor configured to drive an object, to transit from a first state to a second state, the program causing the computer to generate the time-series data so as to satisfy a constraint including a condition to constrain an upper limit value of dispersion of a plurality of state quantities respectively obtained from a plurality of models each of which estimates, from the time-series data, a state quantity of a specific mode of a vibration mode and motion mode of the object, and so that a value of an evaluation function for evaluating the time-series data falls within a tolerance,
wherein the plurality of models correspond to respective different operating environments of the control system and estimate respective ones of the state quantity of the specific mode.

2. The medium according to claim 1 , wherein the control system is configured to control a state quantity of a first mode of the vibration mode and the motion mode, and the state quantity of the specific mode is a state quantity of a second mode, different from the first mode, of the vibration mode and the motion mode.

3. The medium according to claim 2 , wherein the state quantity of the first mode is a rotation angle of the object which rotates with a driving shaft of the motor, and the state quantity of the second mode is an inclination angle of the object.

4. The medium according to claim 2 , wherein the state quantity of the first mode is a position, in a first direction, of the object which is driven by the motor in the first direction, and the state quantity of the second mode is a position of the object in a second direction orthogonal to the first direction.

5. The medium according to claim 1 , wherein the respective operating environments are different from each other in a temperature of a space in which the control system is arranged.

6. The medium according to claim 1 , wherein the evaluation function includes a sum of squares each of which is a square of a derivative value of the time-series data.

7. The medium according to claim 1 , wherein the evaluation function includes a magnitude of a specific frequency component of the time-series data.

8. The medium according to claim 1 , wherein the evaluation function includes a sum of squares each of which is a square of one of the time-series data.

9. The medium according to claim 1 , wherein the evaluation function includes electric power consumption of an electric current amplifier configured to supply an electric current to the motor.

10. The medium according to claim 1 , wherein the evaluation function includes a maximum value of absolute values of the time-series data.

11. The medium according to claim 1 , wherein the evaluation function includes a maximum value of absolute values of voltages to be applied to the motor in accordance with the time-series data.

12. A generating method of generating time-series data of an electric current to be supplied to a motor in order to cause a control system, including the motor configured to drive an object, to transit from a first state to a second state, the method comprising:
obtaining the time-series data so as to satisfy a constraint including a condition to constrain an upper limit value of dispersion of a plurality of state quantities respectively obtained from a plurality of models each of which estimates, from the time-series data, a state quantity of a specific mode of a vibration mode and motion mode of the object, and so that a value of an evaluation function for evaluating the time-series data falls within a tolerance,
wherein the plurality of models correspond to respective different operating environments of the control system and estimate respective ones of the state quantity of the specific mode.

13. A generating apparatus which generates time-series data of an electric current to be supplied to a motor in order to cause a control system, including the motor configured to drive an object, to transit from a first state to a second state, the apparatus comprising:
a processor configured to obtain the time-series data so as to satisfy a constraint including a condition to constrain an upper limit value of dispersion of a plurality of state quantities respectively obtained from a plurality of models each of which estimates, from the time-series data, a state quantity of a specific mode of a vibration mode and motion mode of the object, and so that a value of an evaluation function for evaluating the time-series data falls within a tolerance, wherein the plurality of models correspond to respective different operating environments of the control system and estimate respective ones of the state quantity of the specific mode.

14. A driving apparatus which includes a control system including a motor configured to drive an object, the apparatus comprising:
a processor configured to obtain time-series data of an electric current to be supplied to the motor in order to cause the control system to transit from a first state to a second state,
the processor obtaining the time-series data so as to satisfy a constraint including a condition to constrain an upper limit value of dispersion of a plurality of state quantities respectively obtained from a plurality of models each of which estimates, from the time-series data, a state quantity of a specific mode of a vibration mode and motion mode of the object, and so that a value of an evaluation function for evaluating the time-series data falls within a tolerance, wherein the plurality of models correspond to respective different operating environments of the control system and estimate respective ones of the state quantity of the specific mode.

15. A processing apparatus which includes a mirror, and processes an object by irradiating the object with light via the mirror, the apparatus comprising:
a driving apparatus in which the motor is configured to drive the mirror, wherein the driving apparatus comprises:
a processor configured to obtain time-series data of an electric current to be supplied to the motor in order to cause a control system, including the motor, to transit from a first state to a second state,
the processor obtaining the time-series data so as to satisfy a constraint including a condition to constrain an upper limit value of dispersion of a plurality of state quantities respectively obtained from a plurality of models each of which estimates, from the time-series data, a state quantity of a specific mode of a vibration mode and motion mode of the object, and so that a value of an evaluation function for evaluating the time-series data falls within a tolerance, wherein the plurality of models correspond to respective different operating environments of the control system and estimate respective ones of the state quantity of the specific mode.

16. A lithography apparatus which includes a stage configured to hold a substrate, and forms a pattern on the substrate held by the stage, the apparatus comprising:
a driving apparatus in which the motor is configured to drive the stage, wherein the driving apparatus comprises:
a processor configured to obtain time-series data of an electric current to be supplied to the motor in order to cause the control system to transit from a first state to a second state,
the processor obtaining the time-series data so as to satisfy a constraint including a condition to constrain an upper limit value of dispersion of a plura

Assignees

• Canon Kk

Inventors

• Ueda Shinji

Classifications

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• B23K26/082

  Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head · CPC title

• G03F7/70783

  Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight · CPC title

• G03F7/70725

  control · CPC title

• H02P23/04 Primary

  specially adapted for damping motor oscillations, e.g. for reducing hunting · CPC title