Particle and chemical control using tunnel flow

Patent metadata

Field	Value
Publication number	US-9759912-B2
Application number	US-201314034273-A
Country	US
Kind code	B2
Filing date	Sep 23, 2013
Priority date	Sep 26, 2012
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.

First claim

What is claimed is:

1. An apparatus for contaminant control, comprising:
a first optical assembly or a second optical assembly, wherein:
the first optical assembly includes:
a first light homogenizer tunnel with:
a first end arranged for connection to an extreme ultra-violet (EUV) light source;
a second end arranged for communication with a destination chamber; and,
a first enclosed space connecting the first and second ends and arranged to reflect light from the EUV light source; and,

a first gas input;
located between the first and second ends; and,
arranged to introduce a first gas into the first enclosed space such that the first gas flows in a first direction toward the first end to advect a contaminant out the first end and in a second direction toward the second end to advect the contaminant out the second end, such that a ratio of contaminant remaining in the first enclosed space to contaminant advected from the first enclosed space is equal to or less than 10 −6 ; and,

the second optical assembly includes:
a second light homogenizer tunnel with:
a third end arranged for connection to a second extreme ultra-violet (EUV) light source;
a fourth end arranged for communication with a second destination chamber; and,
a second enclosed space connecting the third and fourth ends and arranged to reflect light from the second EUV light source;

a diffusion barrier tube located between the second light homogenizer tunnel and the second destination chamber including:
a fifth end facing the fourth end; and,
a sixth end arranged for communication with the second destination chamber; and,

a second gas input arranged to introduce a second gas between the second light homogenizer tunnel and the diffusion tube to advect the contaminant out the third end and the sixth end, such that a ratio of contaminant remaining in the second enclosed space to contaminant advected from the second enclosed space is equal to or less than 10 −6 .

2. The apparatus of claim 1 , wherein the first and second enclosed spaces have a respective rectangular shape in a cross-section orthogonal to a respective longitudinal axis for the first and second light homogenizer tunnels.

3. The apparatus of claim 1 , wherein the diffusion tube is an elongated conical frustum.

4. The apparatus of claim 1 , wherein:
the fourth end has a first cross-sectional area orthogonal to a longitudinal axis for the second light homogenizer tunnel; and,
the fifth end has a second cross-sectional area, orthogonal to the longitudinal axis, less than the first cross-sectional area.

5. The apparatus of claim 1 , wherein:
the fifth end has a first cross-sectional area orthogonal to a longitudinal axis for the diffusion tube; and,
the sixth end has a second cross-sectional area, orthogonal to the longitudinal axis, greater than the first cross-sectional area.

6. The apparatus of claim 1 , wherein:
the second light homogenizer tunnel includes a first longitudinal axis; and,
the diffusion tube includes a second longitudinal axis co-linear with the first longitudinal axis.

7. The apparatus of claim 1 , wherein the first gas input or the second gas input includes a gas diffuser made of a sintered material.

8. The apparatus of claim 1 , wherein the first gas input or the second gas input is a planar input.

9. The apparatus of claim 1 , wherein the first gas input or the second gas input has an annular shape.

10. The apparatus of claim 1 , further comprising a third enclosed area connecting the fourth and fifth ends.

11. An apparatus for contaminant control, comprising:
a light homogenizing tunnel including:
a longitudinal axis;
a first end arranged for connection to an extreme ultra-violet (EUV) light source;
a second end arranged for communication with a destination chamber; and,
an enclosed space:
connecting the first and second ends; and,
with a rectangular shape in a cross-section orthogonal to the longitudinal axis; and,

a sintered gas diffuser:
located between the first and second ends and arranged to reflect light from the EUV light source; and,
arranged to introduce a gas into the enclosed space such that the gas flows in a first direction toward the first end to advect a contaminant out the first end and in a second direction toward the second end to advect the contaminant out the second end, such that a ratio of contaminant remaining in the enclosed space to contaminant advected from the enclosed space is equal to or less than 10 −6 .

12. An apparatus for contaminant control, comprising:
a light homogenizer tunnel including:
a first end arranged for connection to an extreme ultra-violet (EUV) light source;
a second end having a first cross-sectional area; and,
a first enclosed space:
connecting the first and second ends; and,
with a rectangular shape in a cross-section orthogonal to a longitudinal axis for the light homogenizer tunnel;

a diffusion barrier tube including:
a third end facing the second end and having a second cross-sectional area less than the first cross-sectional area;
a fourth end arranged for communication with a destination chamber and having a third cross-sectional area greater than the second cross-sectional area; and,
a second enclosed space connecting the third and fourth ends; and,

a sintered gas diffuser:
located between the light homogenizer tunnel and the diffusion barrier tube; and,
arranged to introduce a gas between the light homogenizer tunnel and the diffusion barrier tube, wherein the gas advects a contaminant out the first end and the fourth end, such that a ratio of contaminant remaining in the first enclosed space or second enclosed space to contaminant advected from the first enclosed space or second enclosed space, respectively, is equal to or less than 10 −6 .

13. The apparatus of claim 12 , further comprising a third enclosed area connecting the second and third ends.

Assignees

• Kla Tencor Corp
• Sandia Corp

Inventors

• Chilese Frank
• Delgado Gildardo R
• Wack Daniel
• Torczynski John R
• Klebanoff Leonard E

Classifications

• G02B27/0006 Primary

  with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B) · CPC title