Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US9759449B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9759449-B2 |
| Application number | US-201214387522-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 6, 2012 |
| Priority date | Mar 30, 2012 |
| Publication date | Sep 12, 2017 |
| Grant date | Sep 12, 2017 |
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Feedwater to be supplied to a feedwater tank via a feedwater path is passed through a waste heat recovery heat exchanger, a supercooler, and a condenser in sequence. A heat source fluid such as heat source water is passed through an evaporator and the waste heat recovery heat exchanger in sequence. The waste heat recovery heat exchanger is an indirect heat exchanger between the feedwater supplied to the feedwater tank via the feedwater path and the heat source fluid having passed through the evaporator. The supercooler is an indirect heat exchanger between the feedwater supplied to the feedwater tank via the feedwater path and a refrigerant supplied from the condenser to an expansion valve.
Opening claim text (preview).
The invention claimed is: 1. A feedwater heating system comprising: a heat pump in which a compressor, a condenser, an expansion valve, and an evaporator are connected in sequence in an annular manner to allow a refrigerant to circulate, the heat pump drawing heat from a heat source fluid that passes through the evaporator, the heat pump heating feedwater that passes through the condenser; and a feedwater tank that can be supplied with the feedwater from a feedwater path through which the feedwater passes through a waste heat recovery heat exchanger, a supercooler, and the condenser in sequence, wherein the waste heat recovery heat exchanger is an indirect heat exchanger between the feedwater supplied to the feedwater tank via the feedwater path and the heat source fluid, the waste heat recovery heat exchanger being configured to perform indirect heat exchange between the feedwater which is in a state prior to being supplied to the supercooler and the heat source fluid which has passed through the evaporator of the heat pump, wherein the supercooler is an indirect heat exchanger between the feedwater supplied to the feedwater tank via the feedwater path and the refrigerant, the supercooler being configured to perform indirect heat exchange between the feedwater which is in a state subsequent to passing through the waste heat recovery heat exchanger and prior to being supplied to the condenser and the refrigerant which is supplied from the condenser to the expansion valve, and wherein the condenser of the heat pump is an indirect heat exchanger between the feedwater supplied to the feedwater tank via the feedwater path and the refrigerant, the condenser being configured to perform indirect heat exchange between the feedwater which has passed through the supercooler and the refrigerant which is supplied to the supercooler from the compressor. 2. The feedwater heating system according to claim 1 , wherein while the feedwater tank is supplied with the feedwater via the feedwater path, the heat pump is driven and an amount of the feedwater being passed through the condenser is adjusted such that a temperature of the feedwater on an exit side of the condenser of the heat pump is maintained at a set temperature. 3. The feedwater heating system according to claim 1 , wherein the condenser condenses the refrigerant of the heat pump, such that the feedwater to be supplied to the feedwater tank is heated by latent heat and sensible heat of the refrigerant of the heat pump, and wherein the supercooler cools a liquid refrigerant from the condenser, such that the feedwater to be supplied to the feedwater tank is heated by the sensible heat of the refrigerant of the heat pump. 4. The feedwater heating system according to claim 1 , wherein whether or not the heat source fluid having passed through the evaporator is passed through the waste heat recovery heat exchanger is switchable, and wherein the heat source fluid having passed through the evaporator is not passed through the waste heat recovery heat exchanger when a temperature of the feedwater on an entrance side of the waste heat recovery heat exchanger is higher than a temperature of the heat source fluid on an exit side of the evaporator. 5. The feedwater heating system according to claim 1 , wherein an output of the heat pump is adjusted based on a temperature of the heat source fluid that is passed through the evaporator of the heat pump. 6. The feedwater heating system according to claim 1 , wherein the heat pump is stopped from driving and supply of the heat source fluid to the evaporator is stopped when an amount of the heat source fluid that is passed through the evaporator of the heat pump becomes lower than a set value or when an amount of the feedwater that passes through the feedwater path becomes lower than a set value. 7. The feedwater heating system according to claim 2 , wherein the condenser condenses the refrigerant of the heat pump, such that the feedwater to be supplied to the feedwater tank is heated by latent heat and sensible heat of the refrigerant of the heat pump, and wherein the supercooler cools a liquid refrigerant from the condenser, such that the feedwater to be supplied to the feedwater tank is heated by the sensible heat of the refrigerant of the heat pump. 8. The feedwater heating system according to claim 2 , wherein whether or not the heat source fluid having passed through the evaporator is passed through the waste heat recovery heat exchanger is switchable, and wherein the heat source fluid having passed through the evaporator is not passed through the waste heat recovery heat exchanger when a temperature of the feedwater on an entrance side of the waste heat recovery heat exchanger is higher than a temperature of the heat source fluid on an exit side of the evaporator. 9. The feedwater heating system according to claim 3 , wherein whether or not the heat source fluid having passed through the evaporator is passed through the waste heat recovery heat exchanger is switchable, and wherein the heat source fluid having passed through the evaporator is not passed through the waste heat recovery heat exchanger when a temperature of the feedwater on an entrance side of the waste heat recovery heat exchanger is higher than a temperature of the heat source fluid on an exit side of the evaporator. 10. The feedwater heating system according to claim 4 , wherein whether or not the heat source fluid having passed through the evaporator is passed through the waste heat recovery heat exchanger is switchable, and wherein the heat source fluid having passed through the evaporator is not passed through the waste heat recovery heat exchanger when a temperature of the feedwater on an entrance side of the waste heat recovery heat exchanger is higher than a temperature of the heat source fluid on an exit side of the evaporator. 11. The feedwater heating system according to claim 2 , wherein an output of the heat pump is adjusted based on a temperature of the heat source fluid that is passed through the evaporator of the heat pump. 12. The feedwater heating system according to claim 3 , wherein an output of the heat pump is adjusted based on a temperature of the heat source fluid that is passed through the evaporator of the heat pump. 13. The feedwater heating system according to claim 4 , wherein an output of the heat pump is adjusted based on a temperature of the heat source fluid that is passed through the evaporator of the heat pump. 14. The feedwater heating system according to claim 2 , wherein the heat pump is stopped from driving and supply of the heat source fluid to the evaporator is stopped when an amount of the heat source fluid that is passed through the evaporator of the heat pump becomes lower than a set value or when an amount of the feedwater that passes through the feedwater path becomes lower than a set value. 15. The feedwater heating system according to claim 3 , wherein the heat pump is stopped from driving and supply of the heat source fluid to the evaporator is stopped when an amount of the heat source fluid that is passed through the evaporator of the heat pump becomes lower than a set value or when an amount of the feedwater that passes through the feedwater path becomes lower than a set value. 16. The feedwater heating system according to claim 4 , wherein the heat pump is stopped from driving and supply of the heat source fluid to the evaporator is stopped when an amount of the heat source fluid that is passed through the evaporator of the heat pump becomes lower than a set value or when an amount of the feedwater t
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