Method of electrically isolating leads of a lead frame strip by laser beam cutting

Patent metadata

Field	Value
Publication number	US-9754834-B2
Application number	US-201615254454-A
Country	US
Kind code	B2
Filing date	Sep 1, 2016
Priority date	Nov 12, 2013
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

A lead frame strip includes a plurality of connected unit lead frames, each unit lead frame having a die paddle and a plurality of leads connected to a periphery of the unit lead frame. A semiconductor die is attached to each of the die paddles, the unit lead frames are covered with a molding compound after the semiconductor dies are attached to the die paddles, and a laser beam is directed at regions of the periphery of each unit lead frame where the leads are located thereby forming spaced apart cuts in the periphery of each unit lead frame. The spaced apart cuts sever the leads from the periphery of each unit lead frame and extend at least partially into the molding compound in the regions of the periphery where the leads are located so that the molding compound remains intact between the spaced apart cuts.

First claim

What is claimed is:

1. A method of processing a lead frame strip including a plurality of connected unit lead frames, each unit lead frame having a die paddle and a plurality of leads connected to a periphery of the unit lead frame, the method comprising:
attaching a semiconductor die to each of the die paddles;
covering the unit lead frames with a molding compound after the semiconductor dies are attached to the die paddles;
directing a laser beam at regions of the periphery of each unit lead frame where the leads are located thereby forming spaced apart cuts in the periphery of each unit lead frame, the spaced apart cuts severing the leads from the periphery of each unit lead frame and extending at least partially into the molding compound in the regions of the periphery where the leads are located so that the molding compound remains intact between the spaced apart cuts; and
processing the lead frame strip after the spaced apart cuts are formed in the periphery of each unit lead frame; and
cutting the entire periphery of each unit lead frame by a saw blade after processing the lead frame strip, to separate the unit lead frames into individual packages,
wherein a width of the spaced apart cuts made in the periphery of each unit lead frame by the laser beam is narrower than the width of the saw blade.

2. The method of claim 1 , wherein the laser beam also cuts through the molding compound in the regions of the periphery of each unit lead frame where the leads are located.

3. The method of claim 1 , wherein the width of the spaced apart cuts made in the periphery of each unit lead frame by the laser beam is 0.25 mm or less and the width of the saw blade is 0.3 mm or greater.

4. The method of claim 3 , wherein the width of the spaced apart cuts made in the periphery of each unit lead frame by the laser beam is 0.12 mm or less.

5. The method of claim 1 , wherein processing the lead frame strip after forming the spaced apart cuts in the periphery of each unit lead frame comprises:
testing the semiconductor dies by probing the leads after the spaced apart cuts are formed in the periphery of each unit lead frame.

6. The method of claim 1 , further comprising:
forming additional spaced apart cuts in the periphery of each unit lead frame using the laser beam, the additional spaced apart cuts severing tie bars which connect adjacent ones of the die paddles to the periphery of each unit lead frame and extending at least partially into the molding compound in regions of the periphery where the tie bars are located so that the molding compound remains intact between the additional spaced apart cuts,
wherein the lead frame strip is processed after forming the additional spaced apart cuts in the periphery of each unit lead frame.

Assignees

• Infineon Technologies Ag

Inventors

• Khoo Nee Wan
• Letcheemana Vigneswaran

Classifications

• H10W72/0198

  batch processes · CPC title

• B23K26/40

  taking account of the properties of the material involved · CPC title

• B23K26/362

  Laser etching · CPC title

• B23K2103/50

  Inorganic materials other than metals or composite materials · CPC title

• B23K26/361

  for deburring or mechanical trimming (B23K26/351 takes precedence) · CPC title