Encapsulated magnetron

Patent metadata

Field	Value
Publication number	US-9754771-B2
Application number	US-201414338779-A
Country	US
Kind code	B2
Filing date	Jul 23, 2014
Priority date	Aug 14, 2013
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

Embodiments of the present invention generally provide a magnetron that is encapsulated by a material that is tolerant of heat and water. In one embodiment, the entire magnetron is encapsulated. In another embodiment, the magnetron includes magnetic pole pieces, and the magnetic pole pieces are not covered by the encapsulating material.

First claim

The invention claimed is:

1. A magnetron, comprising:
a plurality of magnets, wherein each magnet of the plurality of magnets has a first end and a second end;
a first magnetic pole piece, wherein the first magnetic pole piece is coupled to each first end of each magnet;
a second magnetic pole piece, wherein the second magnetic pole piece is coupled to each second end of each magnet;
a first encapsulating material covering the plurality of magnets;
a second encapsulating material disposed in a gap between the first magnetic pole piece and the second magnetic pole piece; and
a plurality of ridges disposed on the second encapsulating material.

2. The magnetron of claim 1 , wherein the first encapsulating material is coupled to the first magnetic pole piece.

3. The magnetron of claim 1 , wherein the first encapsulating material is selected from at least one of epoxies, urethanes, and rubber.

4. The magnetron of claim 1 , wherein the second magnetic pole piece is surrounded by the first magnetic pole piece.

5. The magnetron of claim 1 , wherein the second encapsulating material comprises a same material as the first encapsulating material.

6. The magnetron of claim 1 , wherein the plurality of ridges are made of a same material as the first encapsulating material.

7. A magnetron, comprising:
a plurality of magnets, wherein each magnet of the plurality of magnets has a first end and a second end;
a backing plate, wherein the backing plate is coupled to each first end of each magnet;
a first magnetic pole piece, wherein the first magnetic pole piece is coupled to each second end of each magnet;
a first encapsulating material covering the plurality of magnets;
a second encapsulating material disposed in a gap between the first magnetic pole piece and a second magnetic pole piece; and
a plurality of ridges disposed on the second encapsulating material.

8. The magnetron of claim 7 , wherein the first encapsulating material is selected from at least one of epoxies, urethanes, and rubber.

9. The magnetron of claim 7 , further comprising a second magnetic pole piece, wherein the second magnetic pole piece is surrounded by the first magnetic pole piece.

10. The magnetron of claim 9 , wherein the first magnetic pole piece and the second magnetic pole piece are coplanar.

11. The magnetron of claim 7 , wherein the second encapsulating material comprises a same material as the first encapsulating material.

12. The magnetron of claim 7 , wherein the plurality of ridges comprises a same material as the first encapsulation material.

13. A magnetron, comprising:
a backing plate;
a first magnetic pole piece;
a second magnetic pole piece;
a plurality of magnets disposed between the backing plate and the first magnetic pole piece;
a first encapsulating material covering the plurality of magnets;
a second encapsulating material disposed in a gap between the first magnetic pole piece and the second magnetic pole piece; and
a plurality of ridges disposed on the second encapsulating material.

14. The magnetron of claim 13 , wherein the second magnetic pole piece is surrounded by the first magnetic pole piece, and the first and second magnetic pole pieces are coplanar.

Assignees

• Applied Materials Inc

Inventors

• West Brian T
• Johnson Roger M
• Cox Michael S

Classifications

• H01J23/05

  having a cylindrical emissive surface, e.g. cathodes for magnetrons · CPC title

• H01J25/587

  Multi-cavity magnetrons · CPC title

• H01J37/3405 Primary

  Magnetron sputtering · CPC title

• H03B9/10

  using a magnetron · CPC title

• H03C5/04

  the tube being a magnetron · CPC title