Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US9753431B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9753431-B2 |
| Application number | US-201214131676-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 25, 2012 |
| Priority date | Jul 29, 2011 |
| Publication date | Sep 5, 2017 |
| Grant date | Sep 5, 2017 |
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The present invention provides a visible light photoinitiating system for preparing a holographic photopolymer material with high-diffraction efficiency. The photoinitiating system comprises a photosensitizer and a co-initiator, and its mechanism is that the photosensitizer transforms from ground state to excited state after absorbing photons, and then interacts with the co-initiator through transfer of electrons and protons, which produces an alkyl (or aryl) free radical R and a ketyl radical K; wherein the free radical R initiates the addition polymerization of monomers that are capable of free radical polymerization, whereas the radical K inhibits the chain propagation of the macromolecular free radicals to a certain degree due to the steric hindrance effect, and thus delays the gelation time of the photopolymerization, which helps to increase the phase separation between the polymer and the functional components. A holographic photopolymer material with high-diffraction efficiency can be obtained by employing this visible light photoinitiating system.
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The invention claimed is: 1. A visible light photoinitiating system, comprising a photosensitizer and a co-initiator, within which system an alkyl or aryl free radical for initiating photopolymerization and a ketyl radical for inhibiting photopolymerization are generated upon exposure to a single laser beam, wherein said photosensitizer comprises one or more selected from the group consisting of C1, C2, C3, C4, and C5, said C1, C2, C3, C4, and C5 having the following structures, respectively: wherein substitutes R 1 , R 2 , R 3 , R 4 , R 5 , and R6 may be same or different, and may be jointly, respectively or independent, and of —SH, —CN, —NO 2 , —C n H 2n+1 (n≦0 to 8), —C n H 2n+1 O (n=0 to 8), N(C n H 2n+1 ) 2 (n=0 to 8), phenyl, thienyl, and thiazolyl. 2. The photoinitiating system according to claim 1 , wherein a ratio by mass of the photosensitizer to the co-initiator is between 20:1 and 1:20. 3. The visible light photoinitiating system according to claim 1 , wherein said co-initiator comprises one or more selected from the group consisting of N,N,N-triethylamine, N-Methyl maleimide, N-ethyl maleimide, triethanolamine N-phenyl glycine, acetyl phenyl glycine, p-chlorophenyl glycine, 3-bromine phenyl glycine, 3-nitrile phenyl glycine, N-phenyl glycine ethyl ester, 2,4,6-tri(trichloromethyl)-1,3,5-triazine, and 2-(4′-methoxy phenyl)-4,6-bi(trichloromethyl)-1,3,5-triazine. 4. The visible light photoinitiating system according to claim 1 , wherein C2 is other than 3-acetylcoumarin. 5. The visible light photoinitiating system according to claim 1 , wherein said photosensitizer comprises at least one photosensitizer or photosensitizer combination selected from the group consisting of: C1 and C2 in the proportion of 1:2, wherein R 1 ═R 4 ═N(C 2 H 5 ) 2 and R 2 ═R 3 ═H); C2 and C4 in the proportion of 2:3, wherein R 1 ═C 8 H 17 , R 2 =thiazolyl, and R 3 ═OH; C3, wherein R 1 ═C 8 H 17 O, R 2 ═NH 2 , and R 3 =thienyl; C4, wherein R 1 ═N(C 8 H 17 ) 2 , R 2 ═NO 2 , and R 3 ═H; and C1 and C5 in the proportion of 1:1, wherein R 1 =phenyl, R 2 ═R 3 ═R 5 ═H, R 4 ═CN, and R 6 ═SH. 6. The visible light photoinitiating system according to claim 1 , in combination with a non-epoxy polymerizable material. 7. The visible light photoinitiating system according to claim 5 , wherein the non-epoxy polymerizable material comprises one or more selected from the group consisting of methyl methacrylate, methyl acrylamide, N-vinyl pyrrolidone, butyl acrylate, 2-ethylhexyl acrylate, N-isopropyl acrylamide, ethylene dimethacrylate, trimethylolpropane trimethacrylate, N-vinyl carbazole, pentaerythritol tetraacrylate, and methylene diacrylamide. 8. The visible light photoinitiating system according to claim 1 , wherein the laser beam has a wavelength of 441.6 nm.
containing a polymeric component · CPC title
Organic compounds not covered by group G03F7/029 · CPC title
Phase modulating patterns, e.g. refractive index patterns · CPC title
Pre-exposure processing, e.g. hypersensitisation · CPC title
Photopolymer · CPC title
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