Sensitivity and selectivity of chemoresistor type gas sensors

Patent metadata

Field	Value
Publication number	US-9753000-B2
Application number	US-201514929550-A
Country	US
Kind code	B2
Filing date	Nov 2, 2015
Priority date	Jun 8, 2011
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

The sensitivity and/or selectivity of a chemoresistor type gas sensor is enhanced by measuring the response of the sensing material to a gas sample while the sensing material is subjected to illumination using specially-tailored pulses of ultraviolet radiation. For a given target gas to be detected there is an optimal duration of the UV pulses to achieve peak sensitivity of the sensing material.

First claim

What is claimed is:

1. A chemoresistor gas sensor comprising:
a gas-sensitive layer;
an ultraviolet light source configured to expose the gas-sensitive layer to pulses of ultraviolet light;
a setting unit that controls a duty ratio or duration of the pulses of the ultraviolet light applied by the ultraviolet light source in dependence on a target gas species to be adsorbed on the gas-sensitive layer; and
a control module that sets, by the setting unit, the duty ratio or duration of the pulses of the ultraviolet applied in the gas sensor to different values for discrimination of respective different target gas species.

2. The gas sensor according to claim 1 , comprising plural gas-sensitive layers, and plural sources of ultraviolet light that applies ultraviolet pulses of different duty ratios to different gas-sensitive layers of the gas sensor.

3. The gas sensor according to claim 1 , wherein the control module applies a measurement protocol adapted to enhance the selectivity of the gas sensor to a selected target gas in a gas sample, said measurement protocol comprising: a measurement phase in which the response of the gas-sensitive layer to the gas sample is measured, and an increased-sensitivity measurement phase in which the gas-sensitive layer is illuminated with ultraviolet pulses from the source and the response of the gas-sensitive layer to said gas sample is measured;
wherein during the increased-sensitivity measurement phase the duty ratio of said ultraviolet pulses is a predetermined value that is set, by the setting unit, in dependence on said selected target gas; and
wherein the control module detects the target gas species by performing a comparative analysis that comprises comparison of the response measured in said measurement phase with the response measured in said increased-sensitivity measurement phase.

4. The gas sensor according to claim 3 , wherein the control module applies a measurement protocol in which, during the increased-sensitivity measurement phase, the duty ratio of said ultraviolet pulses is a predetermined value that is set, by the setting unit, in dependence both on said selected target gas and on other gas species likely present in the gas sample.

5. The gas sensor according to claim 3 , wherein the control module applies a measurement protocol in which during said measurement phase the gas-sensitive layer is not illuminated with ultraviolet light from the source.

6. The gas sensor according to claim 3 , wherein the control module applies a measurement protocol in which during said measurement phase the gas-sensitive layer is illuminated continuously with ultraviolet light from the source.

7. The gas sensor according to claim 3 , wherein the control module measures according to a measurement protocol in which during said measurement phase the gas-sensitive layer is illuminated with further ultraviolet pulses from the source, the duty ratio of said further ultraviolet pulses being different from the predetermined duty ratio of the ultraviolet pulses applied during said increased-sensitivity measurement phase and the duty ratio of said further ultraviolet pulses being set, by the setting unit, in dependence on a further target gas.

8. A method of operating a chemoresistor gas sensor comprising a gas-sensitive layer, the method comprising the step of
applying pulses of ultraviolet light to the gas-sensitive layer, wherein a duty ratio or duration of the pulses of ultraviolet light is set dependent on a target gas species to be adsorbed on the gas-sensitive layer;
wherein the step of applying pulses of ultraviolet light to the gas-sensitive layer comprises setting the duration or duty cycle of applied ultraviolet pulses to different values for discrimination of respective different target gas species.

9. The gas-sensor operating method according to claim 8 , wherein the applying step comprises illuminating the gas-sensitive layer plural times using respective different ultraviolet illumination conditions, the method comprises measuring the response of the gas-sensitive layer to a gas sample during plural measurement phases, each measurement phase corresponds to a time when the gas-sensitive layer is illuminated according to a different one of said illumination conditions, and during respective different measurement phases the gas-sensitive layer is illuminated using pulses of ultraviolet light whose duty ratio or duration is set dependent on different target gas species.

10. The gas-sensor operating method according to claim 8 , wherein the gas sensor comprises plural gas-sensitive layers and plural sources of ultraviolet light, and the applying step comprises applying ultraviolet pulses of different duty ratios to different gas-sensitive layers of the gas sensor.

11. The gas-sensor operating method according to claim 8 , wherein the applying step comprises applying a measurement protocol adapted to enhance the selectivity of the gas sensor to a selected target gas in a gas sample, said measurement protocol comprising measuring the response of the gas-sensitive layer to the gas sample in a measurement phase, and measuring the response of the gas-sensitive layer to the gas sample in an increased-sensitivity measurement phase in which the gas-sensitive layer is illuminated with ultraviolet pulses and the duty ratio of said ultraviolet pulses is a predetermined value that is set in dependence on said selected target gas; and
wherein the gas-sensor operating method further comprises performing a comparative analysis to detect the target gas species, said comparative analysis comprising comparison of the response measured in said measurement phase with the response measured in said increased-sensitivity measurement phase.

12. The gas-sensor operating method according to claim 11 , wherein during the increased-sensitivity measurement phase of the applied measurement protocol the duty ratio of said ultraviolet pulses is a predetermined value that is set in dependence both on said selected target gas and on other gas species likely present in the gas sample.

13. The gas-sensor operating method according to claim 11 , wherein during said measurement phase of the applied measurement protocol the gas-sensitive layer is not illuminated with ultraviolet light from the source.

14. The gas-sensor operating method according to claim 11 , wherein during said measurement phase of the applied measurement protocol the gas-sensitive layer is illuminated continuously with ultraviolet light from the source.

15. The gas-sensor operating method according to claim 11 , wherein during said measurement phase of the applied measurement protocol the gas-sensitive layer is illuminated with further ultraviolet pulses, the duty ratio of said further ultraviolet pulses being different from the predetermined duty ratio of the ultraviolet pulses applied during said increased-sensitivity measurement phase and the duty ratio of said further ultraviolet pulses being set, by the setting unit, in dependence on a further target gas.

16. A chemoresistor gas sensor comprising:
an array of sensing elements, each of the sensing elements comprising a gas-sensing layer and measurement electrodes provided in contact with the gas-sensing layer;
plural sources of ultraviolet light operable to expose selected gas-sensing layers of the array of sensing elements to ultraviolet light; and
a control module that controls the plural sources of ultraviolet light according to a measurement protocol that comprises applying ultraviolet pulses having different duty ratios to different sensing elements of said array at substantiall

Assignees

• Alpha Mos S A
• Centre Nat De La Rech Scient (Cnrs)

Inventors

• Shim Chang Hyun
• Loubet Francois
• Gaudon Alain
• Menini Philippe
• Benhamouda Franck
• Mifsud Jean Christophe

Classifications

• G01N27/122 Primary

  Circuits particularly adapted therefor, e.g. linearising circuits · CPC title

• G01N33/0032

  using two or more different physical functioning modes · CPC title

• G01N27/125

  Composition of the body, e.g. the composition of its sensitive layer · CPC title