Integrated metal oxide chemical sensor

Patent metadata

Field	Value
Publication number	US-9772319-B2
Application number	US-201414338572-A
Country	US
Kind code	B2
Filing date	Jul 23, 2014
Priority date	Jul 30, 2013
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

A chemical sensor ( 10 ) is described with at least one layer of a metal oxide ( 11 ) arranged between two current injecting electrodes ( 16,16 ′) with the length (L) of the layer of a metal oxide between the current injecting electrodes being less than 50 microns and one or a pair of voltage sensing electrodes ( 17 ) connected to the layer of a metal oxide ( 11 ) with the electrodes ( 16,16′,17 ) forming a 3- or 4-terminal arrangement for determining the resistance changes of layer material ( 11 ) excluding series resistances such as contact resistances close to or at at least one of the current injecting electrodes ( 16 ) from the resistance measurement.

First claim

The invention claimed is:

1. A chemical sensor comprising at least one layer of a metal oxide arranged between two current injecting electrodes with the length (L) of the layer of a metal oxide between the current injecting electrodes being less than 50 microns, and one separate voltage sensing electrode or a pair of separate voltage sensing electrodes connected to the layer of a metal oxide with the electrodes forming a 3- or 4-terminal arrangement for determining the resistance changes of layer material excluding contact resistances at the interface between the layer of metal oxide and at least one of the current injecting electrodes from the resistance measurement, the sensor further comprising
a voltmeter (ΔVi) connected to the one separate voltage sensing electrode or to the pair of separate voltage sensing electrodes and arranged to determine a potential or voltage difference between the one separate voltage sensing electrode and one of the current injecting electrodes or between the pair of separate voltage sensing electrodes;
and a current meter (I) or a constant current source within a circuit including the current injecting electrodes and arranged to determine the current flowing between the current injecting electrodes through the layer of metal oxide, thereby forming a resistance meter (R(mo)) for determining the resistance changes of layer material between the one separate voltage sensing electrode and one of the current injecting electrodes or between the pair of separate voltage sensing electrodes.

2. The chemical sensor according to claim 1 , wherein the length (L) is less than 15 microns.

3. The chemical sensor according to claim 1 , wherein the width (W) of the voltage sensing electrodes is less than half of the width (W) of the current injecting electrodes.

4. The chemical sensor according to claim 1 , wherein the voltage sensing electrodes and the current injecting electrodes are arranged on opposite surfaces of the metal oxide layer.

5. The chemical sensor according to claim 1 , wherein one of the current injecting electrodes forms a center electrode with the other of the current injecting electrodes located in the vicinity of the circumference of the metal oxide layer and the voltage sensing electrodes being arranged in the space between the current injecting electrodes.

6. The chemical sensor according to claim 1 , further linked to a unit to determine the excluded series resistances or an equivalent thereof.

7. The chemical sensor according to claim 1 , being integrated with a CMOS circuit onto a common substrate.

8. The chemical sensor according to claim 1 , comprising heating elements to heat the metal oxide layer to an operating temperature, wherein the heating elements are part of a MEMS-type structure.

9. A portable electronic device comprising a chemical sensor in accordance with claim 1 .

10. The portable electronic device according to claim 9 , being selected from a group comprising:
a mobile phone,
a handheld computer,
an electronic reader,
a tablet computer,
a game controller,
a pointing device,
a photo or a video camera,
a digital music player,
a wrist watch,
a key fob,
a head set, and
a computer peripheral.

11. A method of operating a chemical sensor, comprising the steps of arranging at least one layer of a metal oxide between two current injecting electrodes with the length (L) of the layer of a metal oxide between the current injecting electrodes being less than 50 microns and connecting one separate voltage sensing electrode or a pair of separate voltage sensing electrodes to the layer of a metal oxide and using a voltmeter (ΔVi) to determine a potential or voltage difference between the one separate voltage sensing electrode and one of the current injecting electrodes or between the pair of separate voltage sensing electrodes, and a current meter (I) or a constant current source within a circuit including the current injecting electrodes to determine the current flowing between the current injecting electrodes through the layer of metal oxide and using the measured potential or voltage difference and current to determine the resistance changes of layer material between the one separate voltage sensing electrode and one of the current injection electrodes or between the pair of separate voltage sensing electrodes excluding contact resistances at the interface between the layer of metal oxide and at least one of the current injecting electrodes.

12. The method of claim 11 , further including the step of determining the excluded contact resistances.

13. The method of claim 11 , wherein contact resistances at one of the current injecting electrodes are neglected and said electrode is also used as one of the voltage sensing electrodes.

Assignees

• Sensirion Ag

Inventors

• Burgi Lukas
• Von Waldkirch Marc
• Mayer Felix

Classifications

• G01N27/128

  Microapparatus · CPC title

• G01N33/0027 Primary

  concerning the detector · CPC title

• G01N27/04

  by investigating resistance · CPC title

• G01N27/122

  Circuits particularly adapted therefor, e.g. linearising circuits · CPC title