Co- tolerant catalyst for pafc
US-2015380758-A1 · Dec 31, 2015 · US
US9748581B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9748581-B2 |
| Application number | US-201514634791-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 28, 2015 |
| Priority date | Feb 28, 2014 |
| Publication date | Aug 29, 2017 |
| Grant date | Aug 29, 2017 |
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A method of growing crystals on two-dimensional layered material is provided that includes reversibly hydrogenating a two-dimensional layered material, using a controlled radio-frequency hydrogen plasma, depositing Pt atoms on the reversibly hydrogenated two-dimensional layered material, using Atomic Layer Deposition (ALD), where the reversibly hydrogenated two-dimensional layered material promotes loss of methyl groups in an ALD Pt precursor, and forming Pt-O on the reversibly hydrogenated two-dimensional layered material, using combustion by O 2 , where the Pt-O is used for subsequent Pt half-cycles of the ALD process, where growth of Pt crystals occurs.
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What is claimed: 1. A method of growing crystals on two-dimensional layered material, comprising: a. reversibly hydrogenating a two-dimensional layered material, using a controlled radio-frequency hydrogen plasma; b. depositing Pt atoms on said reversibly hydrogenated or on a dehydrogenated two-dimensional layered material, using Atomic Layer Deposition (ALD), wherein said reversibly hydrogenated two-dimensional layered material promotes loss of methyl groups in an ALD Pt precursor, wherein said reversibly hydrogenated two-dimensional layered material is dehydrogenated prior to depositing said Pt using said ALD; and c. forming Pt-O on said reversibly hydrogenated two-dimensional layered material, using combustion by O 2 , wherein said Pt-O is used for subsequent Pt half-cycles of said ALD process, wherein growth of Pt crystals occurs. 2. The method according to claim 1 , wherein said two-dimensional layered material is selected from the group consisting of graphene, hexagonal boron nitride, and metal dichalcogenides. 3. The method according to claim 2 , wherein said metal dichalcogenides are selected from the group consisting of molybdenum sulfide (MoS 2 ), and tungsten selenide (WSe 2 ). 4. The method according to claim 1 , wherein said dehydrogenating is done by annealing two-dimensional layered material under argon at 300° C. 5. A method of growing crystals on a two-dimensional layered material, comprising: a. reversibly hydrogenating a two-dimensional layered material, using a controlled radio-frequency hydrogen plasma; b. depositing crystal-forming molecules on said reversibly hydrogenated or on a dehydrogenated two-dimensional layered material, using atomic layer deposition (ALD), wherein said reversibly hydrogenated two-dimensional layered material promotes loss of methyl groups in an ALD precursor, wherein said reversibly hydrogenated two-dimensional layered material is dehydrogenated prior to depositing said Pt using said ALD; and c. forming crystal-O x bonds on said reversibly hydrogenated two-dimensional layered material, using combustion by O 2 , wherein said crystal-O x is used for a subsequent half-cycle of said ALD process, wherein growth of said crystals occurs. 6. The method according to claim 5 , wherein said two-dimensional layered material is selected from the group consisting of graphene, hexagonal boron nitride, and dichalcogenides. 7. The method according to claim 6 , wherein said dichalcogenides are selected from the group consisting of molybdenum sulfide (MoS 2 ), and tungsten selenide (WSe 2 ). 8. The method according to claim 5 , wherein said crystal-forming molecule comprises Ti, wherein TiO 2 crystals are formed on said reversibly hydrogenated two-dimensional layered material. 9. The method according to claim 5 , wherein said crystal-forming molecule comprises Al 2 , wherein Al 2 O 3 crystals are formed on said reversibly hydrogenated two-dimensional layered material. 10. The method according to claim 5 , wherein said dehydrogenating is done by annealing two-dimensional layered material under argon at 300° C.
Oxides · CPC title
Deposition of sub-layers, e.g. to promote the adhesion of the main coating · CPC title
Vapour deposition · CPC title
applied in non-semiconductor technology · CPC title
on carbon or graphite · CPC title
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